JPH01143483A - Color solid-state image pickup device - Google Patents
Color solid-state image pickup deviceInfo
- Publication number
- JPH01143483A JPH01143483A JP62301376A JP30137687A JPH01143483A JP H01143483 A JPH01143483 A JP H01143483A JP 62301376 A JP62301376 A JP 62301376A JP 30137687 A JP30137687 A JP 30137687A JP H01143483 A JPH01143483 A JP H01143483A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- transparent resin
- color separation
- flat
- separation filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 claims abstract description 29
- 229920005989 resin Polymers 0.000 claims abstract description 29
- 238000000926 separation method Methods 0.000 claims abstract description 18
- 239000003086 colorant Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 26
- 239000000463 material Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、色分解フィルターが固体撮像素子の上に設け
られているカラー固体撮像素子に係る。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a color solid-state image sensor in which a color separation filter is provided on the solid-state image sensor.
〈従来の技術〉
固体撮像素子は、第３図に示す様に蓄積領域と受光領域
１２とスクライブ１３とが各々高さが異なる。<Prior Art> In a solid-state image sensor, as shown in FIG. 3, a storage region, a light-receiving region 12, and a scribe 13 have different heights.
また、受光領域１２でも、受光領域１４と非受光部１５
では、高さが異なる。Also, in the light receiving area 12, the light receiving area 14 and the non-light receiving area 15
Now, the heights are different.
その為に、我々は先願において、固体撮像素子上の凹凸
が感光性透明樹脂を付与する事で全面が平坦化された平
坦面上に色分解フィルターを設ける技術を開示した。To this end, in a previous application, we disclosed a technology in which a color separation filter is provided on a flat surface in which the entire surface of the solid-state imaging device is flattened by applying a photosensitive transparent resin to the unevenness.
〈発明が解決しようとする問題点〉
上述のようなカラー固体↑最像素子に於いて平坦面を形
成した場合に於いて、例え平坦になったとしても、次の
色分解フィルターを形成する場合、その色分解フィルタ
ーは、まず感光性透明樹脂を全面に塗布し、プリベーク
し、画素部を除いたパターンマスクを載せてから露光し
、現像し、ポストベークする。二色目以降も同様に形成
する。しかし、平坦面上に感光性透明樹脂を形成する場
合には、スピンコードして感光性透明樹脂液を均一にし
て乾かそうとするものである。しかしながら例えスピン
コードしたとしても、下地が透明樹脂と金属層もしくは
シリコン層とでは、親和性や表面粗さが相違し、均一な
厚さを持つ膜とはならない、この感光性透明樹脂はパタ
ーン化され染色されるわけでこれにより色分解フィルタ
ーの色濃度に直接影響される。従って、色濃度にムラの
あるカラーフィルターが形成される事となる。<Problems to be solved by the invention> When a flat surface is formed in the above-mentioned color solid ↑ most imaging element, even if it becomes flat, when forming the next color separation filter. , the color separation filter is first coated with a photosensitive transparent resin over the entire surface, pre-baked, a pattern mask excluding the pixel area is placed on it, exposed, developed, and post-baked. Form the second and subsequent colors in the same way. However, when forming a photosensitive transparent resin on a flat surface, spin coding is used to uniformly dry the photosensitive transparent resin liquid. However, even if spin-coded, the underlying transparent resin and metal or silicon layer have different compatibility and surface roughness, and the film will not have a uniform thickness.This photosensitive transparent resin cannot be patterned. This directly affects the color density of the color separation filter. Therefore, a color filter with uneven color density is formed.
〈問題点を解決するための手段〉
上述の問題に対し、平坦面にもう一層、バッ、ド部を除
く全面に同一材料からなる膜を形成する事により、平坦
面下の材料の違いによる塗布ムラを防止する。<Means for solving the problem> To solve the above-mentioned problem, by forming another layer of the same material on the entire surface except for the pad and pad areas, it is possible to solve the problem by applying different materials under the flat surface. Prevent unevenness.
〈作用〉
下層に同一材料による膜が形成されて、その上に透明樹
脂をスピンコードする場合、下層が全く同一材料である
為、均一にスピンコードされる。<Operation> When a film made of the same material is formed as the lower layer and a transparent resin is spin-coded thereon, since the lower layer is made of exactly the same material, it is spin-coded uniformly.
これは、何れの部分に於いても、下層との親和力。This is an affinity with the lower layer in any part.
粗さが同一となる為である。This is because the roughness is the same.
〈実施例〉 本実施例につき、図面を用いて詳細に説明する。<Example> This embodiment will be described in detail with reference to the drawings.
第１図は、本発明の一実施例を示す部分断面図、第５図
は、同平坦層上に感光性透明樹脂を設けたときの断面図
である。第４図は、同二回目の感光性樹脂層形成後の断
面図、第３図は、同一回目の感光性樹脂層形成後の断面
図、第２図は、同感光性樹脂層形成前の断面図である。FIG. 1 is a partial cross-sectional view showing one embodiment of the present invention, and FIG. 5 is a cross-sectional view when a photosensitive transparent resin is provided on the flat layer. Figure 4 is a cross-sectional view after forming the same photosensitive resin layer for the second time, Figure 3 is a cross-sectional view after forming the same photosensitive resin layer, and Figure 2 is a cross-sectional view after forming the same photosensitive resin layer. FIG.
この固体撮像素子は、パッド部１６と蓄積領域１１が特
に高く形成され、この部分が他より高い。また、スクラ
イブ部１３とパッド部１６と蓄積領域１１と受光部１４
を除いたほぼ全面は、はぼその高さが同じ様になってい
る。また、スクライブ部１３と受光部１４については、
他より低くなっている。この状態は、第２図で示されて
いる。この様な固体撮像素子に対し、全面に感光性透明
樹脂を形成する。In this solid-state imaging device, the pad portion 16 and the storage region 11 are formed particularly high, and this portion is higher than the other portions. In addition, the scribe section 13, the pad section 16, the accumulation region 11, and the light receiving section 14
Almost the entire surface except for the ridges are of the same height. Moreover, regarding the scribe section 13 and the light receiving section 14,
It is lower than others. This situation is shown in FIG. A photosensitive transparent resin is formed on the entire surface of such a solid-state image sensor.
次にプリベークとたあとこの上より受光部１４とスクラ
イブ部１３を除いたパターンのマスクを用いて露光し、
現像し、ポストベークを行ない、第３図に示した様な第
一層目の感光性透明樹脂１２１が設けられた状態にする
。次に、全面に感光性透明樹脂を形成したのち、プリベ
ークし、更にパッド部１６と蓄積領域１１のみパターン
でマスクし、露光したあと現像し、ポストベークを行な
う事によって第４図に示した様な第二層目の感光性樹脂
層２２が設けられた平坦な平坦面が設けられた固体撮像
素子を得る。この平坦面上に感光性透明樹脂をスピンコ
ードで全面に形成し、プリベークした後パッド部１６の
みのパターンでマスクし、露光したあと現像し、ポスト
ベークを行なう事によって平坦化して平坦層２３を設け
、第５図の様な固体撮像素子を得る。Next, after pre-baking, a mask with a pattern excluding the light receiving part 14 and the scribe part 13 is used to expose the above.
It is developed and post-baked to provide a first layer of photosensitive transparent resin 121 as shown in FIG. Next, after forming a photosensitive transparent resin on the entire surface, pre-baking is performed, and only the pad portion 16 and accumulation region 11 are masked with a pattern, exposed, developed, and post-baked, as shown in FIG. 4. A solid-state image sensor is obtained which has a flat surface on which a second photosensitive resin layer 22 is provided. A photosensitive transparent resin is formed on the entire surface of this flat surface using a spin code, and after pre-baking, it is masked with a pattern of only the pad portion 16, exposed, developed, and post-baked to be flattened to form a flat layer 23. A solid-state image sensor as shown in FIG. 5 is obtained.
この後、この上より画素部以外をマスクした上で露光し
、現像したのち染色し、−色目の色分解フィルター３１
を設ける。この上に更に感光性透明樹脂を全面に設けた
後プリベークし、パッド部のパターンのマスクを載せて
露光し、現像し、ポストベークを行ない、中間層５１を
得る。二層目以降についても、同様に二層目の色分解フ
ィルター３２、二層目の色分解フィルター３３、中間層
５２、上部保護層５３を設け、第１図の様なカラー固体
撮像素子を得る。After that, the area other than the pixel area is masked and exposed, developed, and then dyed.
will be established. A photosensitive transparent resin is further provided on the entire surface and then prebaked, a mask with a pattern of the pad portion is placed, exposed, developed, and postbaked to obtain the intermediate layer 51. For the second and subsequent layers, a second color separation filter 32, a second color separation filter 33, an intermediate layer 52, and an upper protective layer 53 are provided in the same manner, to obtain a color solid-state image sensor as shown in FIG. .
〈発明の効果〉
本発明を用いる事により、色分解フィルターの厚みがほ
ぼ一定となり、特に蓄積領域等の盛り上った形状の部分
に近い領域においても、均一な厚さの色分解フィルター
となり、分光特性も均一となる。<Effects of the Invention> By using the present invention, the thickness of the color separation filter becomes almost constant, and the color separation filter has a uniform thickness even in areas close to raised areas such as accumulation areas. Spectral characteristics also become uniform.
第１図は、本発明の一実施例を示す断面図、第２図は、
同感光性樹脂層形成前の断面図、第３図は、同一回目の
感光性樹脂層形成後の断面図、第４図は、同二回目の感
光性樹脂層形成後の断面図、第５図は、同平坦層上に感
光性透明樹脂を設けたときの断面図である。第６図は、
同完成後の平面図である。
１１・・・蓄積領域
１２・・・受光領域
１３・・・スクライブ部
１４・・・受光部
１５・・・非受光部
１６・・・パッド部
２１・・・−層目の感光性樹脂層
２２・・・二層目の感光性樹脂層
２３・・・平坦層
３１・・・−色目の色分解フィルター
３２・・・二層目の色分解フィルター
３３・・・二層目の色分解フィルター
５１．５２・・・中間層
５３・・・保Ｓｉ層
特 許 出 願 人
凸版印刷株式会社
代表者 鈴木和夫
第２図
第３図FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view showing an embodiment of the present invention.
3 is a cross-sectional view before forming the same photosensitive resin layer, FIG. 4 is a cross-sectional view after forming the same photosensitive resin layer for the second time, and FIG. The figure is a cross-sectional view when a photosensitive transparent resin is provided on the flat layer. Figure 6 shows
It is a plan view after completion of the same. 11...Storage area 12...Light receiving area 13...Scribe part 14...Light receiving part 15...Non light receiving part 16...Pad part 21...-th photosensitive resin layer 22 ...Second layer photosensitive resin layer 23...Flat layer 31...-color separation filter 32...Second layer color separation filter 33...Second layer color separation filter 51 .52...Intermediate layer 53...Si protection layer Patent application: Toppan Printing Co., Ltd. Representative: Kazuo Suzuki Figure 2 Figure 3
Claims (1)
事で前面が平坦化された平坦面上に、パッド部以外を除
いた全面に更に一層感光性透明樹脂よりなる平坦層を設
け、その上に色分解フィルターが設けられているカラー
固体撮像素子。1) On a flat surface whose front surface has been flattened by applying a photosensitive transparent resin to the unevenness on the solid-state image sensor, a further flat layer made of a photosensitive transparent resin is provided on the entire surface except for the pad portion, A color solid-state image sensor on which a color separation filter is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62301376A JP2605312B2 (en) | 1987-11-28 | 1987-11-28 | Flattening method for color solid-state imaging device surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62301376A JP2605312B2 (en) | 1987-11-28 | 1987-11-28 | Flattening method for color solid-state imaging device surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01143483A true JPH01143483A (en) | 1989-06-06 |
| JP2605312B2 JP2605312B2 (en) | 1997-04-30 |
Family
ID=17896129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62301376A Expired - Lifetime JP2605312B2 (en) | 1987-11-28 | 1987-11-28 | Flattening method for color solid-state imaging device surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2605312B2 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978568A (en) * | 1982-10-28 | 1984-05-07 | Toshiba Corp | Manufacture of color solid-state image pick-up element |
| JPS6064303A (en) * | 1983-09-20 | 1985-04-12 | Toshiba Corp | Production of color filter |
| JPS60106167A (en) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | Manufacture of color image sensor |
| JPS61289304A (en) * | 1985-06-17 | 1986-12-19 | Fuji Photo Film Co Ltd | Solid state color image sensing element |
| JPS6278502A (en) * | 1985-10-01 | 1987-04-10 | Toshiba Corp | Color solid state image pickup element and its production |
-
1987
- 1987-11-28 JP JP62301376A patent/JP2605312B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978568A (en) * | 1982-10-28 | 1984-05-07 | Toshiba Corp | Manufacture of color solid-state image pick-up element |
| JPS6064303A (en) * | 1983-09-20 | 1985-04-12 | Toshiba Corp | Production of color filter |
| JPS60106167A (en) * | 1983-11-14 | 1985-06-11 | Mitsubishi Electric Corp | Manufacture of color image sensor |
| JPS61289304A (en) * | 1985-06-17 | 1986-12-19 | Fuji Photo Film Co Ltd | Solid state color image sensing element |
| JPS6278502A (en) * | 1985-10-01 | 1987-04-10 | Toshiba Corp | Color solid state image pickup element and its production |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2605312B2 (en) | 1997-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
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