JPH01142149U - - Google Patents
Info
- Publication number
- JPH01142149U JPH01142149U JP3865788U JP3865788U JPH01142149U JP H01142149 U JPH01142149 U JP H01142149U JP 3865788 U JP3865788 U JP 3865788U JP 3865788 U JP3865788 U JP 3865788U JP H01142149 U JPH01142149 U JP H01142149U
- Authority
- JP
- Japan
- Prior art keywords
- screw
- spring
- built
- cylinder
- ion gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3865788U JPH01142149U (zh) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3865788U JPH01142149U (zh) | 1988-03-23 | 1988-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01142149U true JPH01142149U (zh) | 1989-09-28 |
Family
ID=31265203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3865788U Pending JPH01142149U (zh) | 1988-03-23 | 1988-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01142149U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019167165A1 (ja) * | 2018-02-28 | 2019-09-06 | 株式会社日立ハイテクノロジーズ | イオンミリング装置及びイオンミリング装置のイオン源調整方法 |
-
1988
- 1988-03-23 JP JP3865788U patent/JPH01142149U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019167165A1 (ja) * | 2018-02-28 | 2019-09-06 | 株式会社日立ハイテクノロジーズ | イオンミリング装置及びイオンミリング装置のイオン源調整方法 |
JPWO2019167165A1 (ja) * | 2018-02-28 | 2021-02-04 | 株式会社日立ハイテク | イオンミリング装置及びイオンミリング装置のイオン源調整方法 |
US11244802B2 (en) | 2018-02-28 | 2022-02-08 | Hitachi High-Tech Corporation | Ion milling device and ion source adjusting method for ion milling device |
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