JPH01142149U - - Google Patents
Info
- Publication number
- JPH01142149U JPH01142149U JP3865788U JP3865788U JPH01142149U JP H01142149 U JPH01142149 U JP H01142149U JP 3865788 U JP3865788 U JP 3865788U JP 3865788 U JP3865788 U JP 3865788U JP H01142149 U JPH01142149 U JP H01142149U
- Authority
- JP
- Japan
- Prior art keywords
- screw
- spring
- built
- cylinder
- ion gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例の正面図、第２図は
第１図の治具Ａのａ―ａ′線断面図、第３図は従
来の電子銃の一例の正面図である。
１……イオン銃本体、２……外周リング、３，
５……ナツト、７……シリンダ、９……ピストン
、１０……ねじ、１１，１２……パルスモータ、
１３……インターフエイス、１４……入力装置、
１５……ＣＰＵ、１７……スプリング、１８……
ねじ。
FIG. 1 is a front view of an embodiment of the present invention, FIG. 2 is a sectional view taken along line aa' of jig A in FIG. 1, and FIG. 3 is a front view of an example of a conventional electron gun. 1...Ion gun body, 2...Outer ring, 3,
5... Nut, 7... Cylinder, 9... Piston, 10... Screw, 11, 12... Pulse motor,
13...Interface, 14...Input device,
15...CPU, 17...Spring, 18...
screw.
Claims (1)
には少くとも４つのねじ穴を設け、該ねじ穴には
該ねじ穴に適合するねじが外周に切られ、かつ、
内部が中空のシリンダ状で該シリンダ内部にスプ
リングを内蔵し該シリンダの両端部の内径は中央
部の内径よりも細く前記シリンダの外側の一端に
ねじを備え該ねじの先端は前記シリンダに内蔵さ
れた前記スプリングの一端に接し、かつ、内蔵さ
れた前記スプリングのもう一方の側にはピストン
を備え該ピストンの先端が前記イオン銃本体に接
する前記スプリングを内蔵する治具と、外側にケ
ーブルによりインターフエイスを介して制御用の
コンピユータに接続され、かつ、該コンピユータ
には入力装置が接続され該入力装置から入力され
たデータにより回転を制御するパルスモータを備
えたねじが前記リングの前記スプリングを内蔵す
る治具と対称の位置にあるねじ穴に備えられ、前
記スプリングを内蔵する治具と、外部に前記パル
スモータを備えたねじにより前記イオン銃本体を
支える構造を有することを特徴とするイオン銃。 A ring is provided on the outside of the ion gun body, the ring is provided with at least four screw holes, and the screw holes have threads cut on the outer periphery to fit the screw holes, and
The cylinder has a hollow cylindrical shape and a spring is built in the cylinder, the inner diameter of both ends of the cylinder is narrower than the inner diameter of the center part, and a screw is provided at one end of the outer side of the cylinder, and the tip of the screw is built in the cylinder. A jig containing the spring is in contact with one end of the spring and a piston is provided on the other side of the built-in spring, and the tip of the piston is in contact with the ion gun body, and a jig is connected to the outside by a cable. A screw is connected to a control computer via a face, an input device is connected to the computer, and the screw includes a pulse motor that controls rotation based on data input from the input device, and the spring of the ring is built in. The ion gun has a structure in which the ion gun main body is supported by a jig that is provided in a screw hole located symmetrically to the jig that is used for the ion gun, and that has the spring built in therein, and a screw that is provided with the pulse motor on the outside. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3865788U JPH01142149U (en) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3865788U JPH01142149U (en) | 1988-03-23 | 1988-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01142149U true JPH01142149U (en) | 1989-09-28 |
Family
ID=31265203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3865788U Pending JPH01142149U (en) | 1988-03-23 | 1988-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01142149U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019167165A1 (en) * | 2018-02-28 | 2019-09-06 | 株式会社日立ハイテクノロジーズ | Ion milling device and method for adjusting ion source of ion milling device |
-
1988
- 1988-03-23 JP JP3865788U patent/JPH01142149U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019167165A1 (en) * | 2018-02-28 | 2019-09-06 | 株式会社日立ハイテクノロジーズ | Ion milling device and method for adjusting ion source of ion milling device |
| JPWO2019167165A1 (en) * | 2018-02-28 | 2021-02-04 | 株式会社日立ハイテク | Ion milling device and ion source adjustment method for ion milling device |
| US11244802B2 (en) | 2018-02-28 | 2022-02-08 | Hitachi High-Tech Corporation | Ion milling device and ion source adjusting method for ion milling device |
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