JPH0113995Y2 - - Google Patents
Info
- Publication number
- JPH0113995Y2 JPH0113995Y2 JP16701280U JP16701280U JPH0113995Y2 JP H0113995 Y2 JPH0113995 Y2 JP H0113995Y2 JP 16701280 U JP16701280 U JP 16701280U JP 16701280 U JP16701280 U JP 16701280U JP H0113995 Y2 JPH0113995 Y2 JP H0113995Y2
- Authority
- JP
- Japan
- Prior art keywords
- disc
- spin dryer
- substrate
- disk
- tangent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 28
- 239000011521 glass Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16701280U JPH0113995Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-11-21 | 1980-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16701280U JPH0113995Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-11-21 | 1980-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5789193U JPS5789193U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-06-01 |
| JPH0113995Y2 true JPH0113995Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-04-24 |
Family
ID=29525653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16701280U Expired JPH0113995Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-11-21 | 1980-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0113995Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1980
- 1980-11-21 JP JP16701280U patent/JPH0113995Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5789193U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-06-01 |