JPH01137465U - - Google Patents
Info
- Publication number
- JPH01137465U JPH01137465U JP3403388U JP3403388U JPH01137465U JP H01137465 U JPH01137465 U JP H01137465U JP 3403388 U JP3403388 U JP 3403388U JP 3403388 U JP3403388 U JP 3403388U JP H01137465 U JPH01137465 U JP H01137465U
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- sensor element
- comb
- ceramic substrate
- sensing element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3403388U JPH01137465U (ko) | 1988-03-15 | 1988-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3403388U JPH01137465U (ko) | 1988-03-15 | 1988-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137465U true JPH01137465U (ko) | 1989-09-20 |
Family
ID=31260752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3403388U Pending JPH01137465U (ko) | 1988-03-15 | 1988-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137465U (ko) |
-
1988
- 1988-03-15 JP JP3403388U patent/JPH01137465U/ja active Pending