JPS6296561U - - Google Patents

Info

Publication number
JPS6296561U
JPS6296561U JP18799185U JP18799185U JPS6296561U JP S6296561 U JPS6296561 U JP S6296561U JP 18799185 U JP18799185 U JP 18799185U JP 18799185 U JP18799185 U JP 18799185U JP S6296561 U JPS6296561 U JP S6296561U
Authority
JP
Japan
Prior art keywords
sensing element
temperature
humidity
insulating substrate
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18799185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18799185U priority Critical patent/JPS6296561U/ja
Publication of JPS6296561U publication Critical patent/JPS6296561U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP18799185U 1985-12-06 1985-12-06 Pending JPS6296561U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18799185U JPS6296561U (ko) 1985-12-06 1985-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18799185U JPS6296561U (ko) 1985-12-06 1985-12-06

Publications (1)

Publication Number Publication Date
JPS6296561U true JPS6296561U (ko) 1987-06-19

Family

ID=31138953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18799185U Pending JPS6296561U (ko) 1985-12-06 1985-12-06

Country Status (1)

Country Link
JP (1) JPS6296561U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217437A (ja) * 1988-07-06 1990-01-22 Osaka Gas Co Ltd ガスセンサ
WO2013161559A1 (ja) * 2012-04-24 2013-10-31 株式会社村田製作所 湿度センサ素子およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217437A (ja) * 1988-07-06 1990-01-22 Osaka Gas Co Ltd ガスセンサ
WO2013161559A1 (ja) * 2012-04-24 2013-10-31 株式会社村田製作所 湿度センサ素子およびその製造方法

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