JPS63185552U - - Google Patents
Info
- Publication number
- JPS63185552U JPS63185552U JP7785187U JP7785187U JPS63185552U JP S63185552 U JPS63185552 U JP S63185552U JP 7785187 U JP7785187 U JP 7785187U JP 7785187 U JP7785187 U JP 7785187U JP S63185552 U JPS63185552 U JP S63185552U
- Authority
- JP
- Japan
- Prior art keywords
- sets
- electrodes
- insulating substrate
- interval
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7785187U JPS63185552U (ko) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7785187U JPS63185552U (ko) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185552U true JPS63185552U (ko) | 1988-11-29 |
Family
ID=30926247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7785187U Pending JPS63185552U (ko) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185552U (ko) |
-
1987
- 1987-05-22 JP JP7785187U patent/JPS63185552U/ja active Pending