JPH01135755U - - Google Patents

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Publication number
JPH01135755U
JPH01135755U JP3029088U JP3029088U JPH01135755U JP H01135755 U JPH01135755 U JP H01135755U JP 3029088 U JP3029088 U JP 3029088U JP 3029088 U JP3029088 U JP 3029088U JP H01135755 U JPH01135755 U JP H01135755U
Authority
JP
Japan
Prior art keywords
main discharge
excimer laser
laser device
ionization mechanism
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3029088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3029088U priority Critical patent/JPH01135755U/ja
Publication of JPH01135755U publication Critical patent/JPH01135755U/ja
Pending legal-status Critical Current

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  • Lasers (AREA)
JP3029088U 1988-03-09 1988-03-09 Pending JPH01135755U (uk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3029088U JPH01135755U (uk) 1988-03-09 1988-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3029088U JPH01135755U (uk) 1988-03-09 1988-03-09

Publications (1)

Publication Number Publication Date
JPH01135755U true JPH01135755U (uk) 1989-09-18

Family

ID=31255229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3029088U Pending JPH01135755U (uk) 1988-03-09 1988-03-09

Country Status (1)

Country Link
JP (1) JPH01135755U (uk)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014007274A (ja) * 2012-06-25 2014-01-16 Mitsubishi Electric Corp ガスレーザ装置およびガスレーザ装置に適用されるレーザ光発生方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014007274A (ja) * 2012-06-25 2014-01-16 Mitsubishi Electric Corp ガスレーザ装置およびガスレーザ装置に適用されるレーザ光発生方法

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