JPH01130537U - - Google Patents

Info

Publication number
JPH01130537U
JPH01130537U JP2700388U JP2700388U JPH01130537U JP H01130537 U JPH01130537 U JP H01130537U JP 2700388 U JP2700388 U JP 2700388U JP 2700388 U JP2700388 U JP 2700388U JP H01130537 U JPH01130537 U JP H01130537U
Authority
JP
Japan
Prior art keywords
boat
carrier
rotating roller
semiconductor wafer
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2700388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249716Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2700388U priority Critical patent/JPH0249716Y2/ja
Publication of JPH01130537U publication Critical patent/JPH01130537U/ja
Application granted granted Critical
Publication of JPH0249716Y2 publication Critical patent/JPH0249716Y2/ja
Expired legal-status Critical Current

Links

JP2700388U 1988-02-29 1988-02-29 Expired JPH0249716Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2700388U JPH0249716Y2 (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2700388U JPH0249716Y2 (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Publications (2)

Publication Number Publication Date
JPH01130537U true JPH01130537U (enrdf_load_stackoverflow) 1989-09-05
JPH0249716Y2 JPH0249716Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=31249131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2700388U Expired JPH0249716Y2 (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH0249716Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0249716Y2 (enrdf_load_stackoverflow) 1990-12-27

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