JPS6359327U - - Google Patents

Info

Publication number
JPS6359327U
JPS6359327U JP15281986U JP15281986U JPS6359327U JP S6359327 U JPS6359327 U JP S6359327U JP 15281986 U JP15281986 U JP 15281986U JP 15281986 U JP15281986 U JP 15281986U JP S6359327 U JPS6359327 U JP S6359327U
Authority
JP
Japan
Prior art keywords
movable frame
boat
view
wafer
point support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15281986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15281986U priority Critical patent/JPS6359327U/ja
Publication of JPS6359327U publication Critical patent/JPS6359327U/ja
Pending legal-status Critical Current

Links

JP15281986U 1986-10-03 1986-10-03 Pending JPS6359327U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15281986U JPS6359327U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15281986U JPS6359327U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Publications (1)

Publication Number Publication Date
JPS6359327U true JPS6359327U (enrdf_load_stackoverflow) 1988-04-20

Family

ID=31071144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15281986U Pending JPS6359327U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Country Status (1)

Country Link
JP (1) JPS6359327U (enrdf_load_stackoverflow)

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