JPH01130526U - - Google Patents

Info

Publication number
JPH01130526U
JPH01130526U JP2779388U JP2779388U JPH01130526U JP H01130526 U JPH01130526 U JP H01130526U JP 2779388 U JP2779388 U JP 2779388U JP 2779388 U JP2779388 U JP 2779388U JP H01130526 U JPH01130526 U JP H01130526U
Authority
JP
Japan
Prior art keywords
fork
heat treatment
boat
treatment furnace
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2779388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2779388U priority Critical patent/JPH01130526U/ja
Publication of JPH01130526U publication Critical patent/JPH01130526U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本考案の半導体ウエハー熱処理炉用
ボートローデイングフオークの縦断面図であり、
第2図は、第1図のA―A′断面図である。第3
図は、本考案を、熱処理炉システムに応用した断
面図である。第4図は、従来の半導体ウエハー熱
処理炉用ボートローデイングフオークの外観図、
第5図は、第4図の縦断面である。 1a,1b,1c……ヒーター、2a,2b,
2c……熱電対、3……断熱材、4……シリコン
カーバイト、5……ガス加熱ヒーター、6……石
英管、7……半導体ウエハー、8……半導体ウエ
ハー積載用ボート、9……フオーク温度コントロ
ーラ、10……フオーク用ガス供給システム、1
1……フオーク移動レール、12……半導体ウエ
ハー熱処理炉ヒーター、13……プロセス用石英
管、14……熱処理炉。
FIG. 1 is a longitudinal cross-sectional view of a boat loading fork for a semiconductor wafer heat treatment furnace of the present invention;
FIG. 2 is a sectional view taken along the line AA' in FIG. Third
The figure is a sectional view of the present invention applied to a heat treatment furnace system. Figure 4 is an external view of a conventional boat loading fork for semiconductor wafer heat treatment furnaces.
FIG. 5 is a longitudinal section of FIG. 4. 1a, 1b, 1c...heater, 2a, 2b,
2c...Thermocouple, 3...Insulating material, 4...Silicon carbide, 5...Gas heating heater, 6...Quartz tube, 7...Semiconductor wafer, 8...Semiconductor wafer loading boat, 9... Fork temperature controller, 10...Gas supply system for fork, 1
DESCRIPTION OF SYMBOLS 1... Fork moving rail, 12... Semiconductor wafer heat treatment furnace heater, 13... Quartz tube for process, 14... Heat treatment furnace.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウエハー熱処理炉システムの半導体ウエ
ハーを積載したボートを載せ、該熱処理炉内へボ
ートと半導体ウエハーの移動を行なうボートロー
デイングフオークにおいて、フオーク内部にフオ
ーク加熱ヒーター、ヒーター出力の制御に用いる
温度モーター用熱電対及び、フオーク積載部への
プロセスガス供給機構を具備したことを特徴とし
た半導体ウエハー熱処理炉用ボートローデイング
フオーク。
In a boat loading fork that carries a boat loaded with semiconductor wafers in a semiconductor wafer heat treatment furnace system and moves the boat and semiconductor wafers into the heat treatment furnace, there is a fork heating heater inside the fork, and a temperature motor used to control the heater output. A boat loading fork for a semiconductor wafer heat treatment furnace characterized by being equipped with a thermocouple and a process gas supply mechanism to the fork loading section.
JP2779388U 1988-03-01 1988-03-01 Pending JPH01130526U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2779388U JPH01130526U (en) 1988-03-01 1988-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2779388U JPH01130526U (en) 1988-03-01 1988-03-01

Publications (1)

Publication Number Publication Date
JPH01130526U true JPH01130526U (en) 1989-09-05

Family

ID=31250598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2779388U Pending JPH01130526U (en) 1988-03-01 1988-03-01

Country Status (1)

Country Link
JP (1) JPH01130526U (en)

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