JPH01127929A - 振動形差圧センサ - Google Patents
振動形差圧センサInfo
- Publication number
- JPH01127929A JPH01127929A JP28627487A JP28627487A JPH01127929A JP H01127929 A JPH01127929 A JP H01127929A JP 28627487 A JP28627487 A JP 28627487A JP 28627487 A JP28627487 A JP 28627487A JP H01127929 A JPH01127929 A JP H01127929A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- differential pressure
- vibrating
- vibrating beam
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 31
- 239000010703 silicon Substances 0.000 abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 30
- 230000003068 static effect Effects 0.000 abstract description 23
- 241000238557 Decapoda Species 0.000 description 30
- 238000005530 etching Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 8
- 229910052796 boron Inorganic materials 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 241000143060 Americamysis bahia Species 0.000 description 1
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28627487A JPH01127929A (ja) | 1987-11-12 | 1987-11-12 | 振動形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28627487A JPH01127929A (ja) | 1987-11-12 | 1987-11-12 | 振動形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01127929A true JPH01127929A (ja) | 1989-05-19 |
| JPH0519090B2 JPH0519090B2 (enrdf_load_stackoverflow) | 1993-03-15 |
Family
ID=17702243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28627487A Granted JPH01127929A (ja) | 1987-11-12 | 1987-11-12 | 振動形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127929A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085115A (ja) * | 2007-10-01 | 2009-04-23 | Mazda Motor Corp | ロータリピストンエンジンの燃料噴射装置 |
| DE102017010600A1 (de) | 2016-11-21 | 2018-05-24 | Yokogawa Electric Corporation | Resonanzwandler |
-
1987
- 1987-11-12 JP JP28627487A patent/JPH01127929A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085115A (ja) * | 2007-10-01 | 2009-04-23 | Mazda Motor Corp | ロータリピストンエンジンの燃料噴射装置 |
| DE102017010600A1 (de) | 2016-11-21 | 2018-05-24 | Yokogawa Electric Corporation | Resonanzwandler |
| JP2018084441A (ja) * | 2016-11-21 | 2018-05-31 | 横河電機株式会社 | 振動式トランスデューサ |
| US11211916B2 (en) | 2016-11-21 | 2021-12-28 | Yokogawa Electric Corporation | Resonant transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519090B2 (enrdf_load_stackoverflow) | 1993-03-15 |
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