JPH01127904A - 走査トンネル顕微鏡のスキャナ - Google Patents

走査トンネル顕微鏡のスキャナ

Info

Publication number
JPH01127904A
JPH01127904A JP62285837A JP28583787A JPH01127904A JP H01127904 A JPH01127904 A JP H01127904A JP 62285837 A JP62285837 A JP 62285837A JP 28583787 A JP28583787 A JP 28583787A JP H01127904 A JPH01127904 A JP H01127904A
Authority
JP
Japan
Prior art keywords
axis
displacement
scanner
pzt
stuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62285837A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583121B2 (enExample
Inventor
Masashi Iwatsuki
岩槻　正志
Koro Oi
公郎 大井
Ikuya Nishimura
西村　生哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62285837A priority Critical patent/JPH01127904A/ja
Publication of JPH01127904A publication Critical patent/JPH01127904A/ja
Publication of JPH0583121B2 publication Critical patent/JPH0583121B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP62285837A 1987-11-12 1987-11-12 走査トンネル顕微鏡のスキャナ Granted JPH01127904A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62285837A JPH01127904A (ja) 1987-11-12 1987-11-12 走査トンネル顕微鏡のスキャナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62285837A JPH01127904A (ja) 1987-11-12 1987-11-12 走査トンネル顕微鏡のスキャナ

Publications (2)

Publication Number Publication Date
JPH01127904A true JPH01127904A (ja) 1989-05-19
JPH0583121B2 JPH0583121B2 (enExample) 1993-11-24

Family

ID=17696724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62285837A Granted JPH01127904A (ja) 1987-11-12 1987-11-12 走査トンネル顕微鏡のスキャナ

Country Status (1)

Country Link
JP (1) JPH01127904A (enExample)

Also Published As

Publication number Publication date
JPH0583121B2 (enExample) 1993-11-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term