JPH01125567U - - Google Patents
Info
- Publication number
- JPH01125567U JPH01125567U JP2003288U JP2003288U JPH01125567U JP H01125567 U JPH01125567 U JP H01125567U JP 2003288 U JP2003288 U JP 2003288U JP 2003288 U JP2003288 U JP 2003288U JP H01125567 U JPH01125567 U JP H01125567U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- solid
- output
- laser diode
- oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims 3
- 239000007787 solid Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図及び第２図は本考案の実施例の概略構成
図である。
記号の説明：１１はヒートシンク、１２はレー
ザダイオード（ＬＤ）、１３は集光レンズ、１４
は固体レーザ媒質、１５は出力反射鏡、１６はビ
ームスプリツタ、１７は光学アツテネータ、１８
はモニタセンサ、１９は温度制御器、２０はレー
ザダイオード出力光（ＬＤ出力光）、２１は固体
レーザ光、２２は全反射鏡、１０１は全反射鏡、
１０２は固体レーザ媒質、１０３はＡＯＱスイツ
チ素子、１０４は出力反射鏡、１０５はヒートシ
ンク、１０６はレーザダイオード（ＬＤ）、１０
７はレーザダイオード（ＬＤ光）、１０８は固体
レーザ光、１０９はＱスイツチドライバ、１１０
はビームスプリツタ、１１１は光学アツテネータ
、１１２はモニタセンサ、１１３はピークホルダ
回路、１１４は温度制御器である。
FIGS. 1 and 2 are schematic diagrams of an embodiment of the present invention. Explanation of symbols: 11 is a heat sink, 12 is a laser diode (LD), 13 is a condenser lens, 14
is a solid laser medium, 15 is an output reflector, 16 is a beam splitter, 17 is an optical attenuator, 18
is a monitor sensor, 19 is a temperature controller, 20 is a laser diode output light (LD output light), 21 is a solid laser beam, 22 is a total reflection mirror, 101 is a total reflection mirror,
102 is a solid laser medium, 103 is an AOQ switch element, 104 is an output reflector, 105 is a heat sink, 106 is a laser diode (LD), 10
7 is a laser diode (LD light), 108 is a solid laser beam, 109 is a Q switch driver, 110
111 is a beam splitter, 111 is an optical attenuator, 112 is a monitor sensor, 113 is a peak holder circuit, and 114 is a temperature controller.
Claims (1)
ードの発振光で励起してレーザ発振させるレーザ
ダイオード励起固体レーザ装置において、 前記固体レーザ媒質の発振レーザ出力を分割し
てモニタするモニタセンサと、このモニタセンサ
の出力に応じて前記レーザ発振の出力が最大とな
るよう前記レーザダイオードの温度を制御する温
度制限手段とを付設して成ることを特徴とするレ
ーザダイオード励起固体レーザ装置。[Claims for Utility Model Registration] In a laser diode-pumped solid-state laser device that excites a solid-state laser medium with oscillation light from a temperature-controlled laser diode to oscillate a laser, the oscillation laser output of the solid-state laser medium is divided and monitored. A laser diode-pumped solid-state laser device comprising: a monitor sensor; and a temperature limiting means for controlling the temperature of the laser diode so that the output of the laser oscillation is maximized according to the output of the monitor sensor. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288U JPH01125567U (en) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288U JPH01125567U (en) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125567U true JPH01125567U (en) | 1989-08-28 |
Family
ID=31236066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003288U Pending JPH01125567U (en) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125567U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000031841A1 (en) * | 1998-11-19 | 2000-06-02 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser-excited solid laser |
| WO2017168584A1 (en) * | 2016-03-29 | 2017-10-05 | ギガフォトン株式会社 | Laser apparatus and system for generating extreme ultraviolet light |
-
1988
- 1988-02-19 JP JP2003288U patent/JPH01125567U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000031841A1 (en) * | 1998-11-19 | 2000-06-02 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser-excited solid laser |
| WO2017168584A1 (en) * | 2016-03-29 | 2017-10-05 | ギガフォトン株式会社 | Laser apparatus and system for generating extreme ultraviolet light |
| US10340654B2 (en) | 2016-03-29 | 2019-07-02 | Gigaphoton Inc. | Laser apparatus and extreme ultraviolet light generating system |
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