JPH01125547U - - Google Patents
Info
- Publication number
- JPH01125547U JPH01125547U JP2136888U JP2136888U JPH01125547U JP H01125547 U JPH01125547 U JP H01125547U JP 2136888 U JP2136888 U JP 2136888U JP 2136888 U JP2136888 U JP 2136888U JP H01125547 U JPH01125547 U JP H01125547U
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- semiconductor
- speed
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000000052 comparative effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2136888U JPH01125547U (fr) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2136888U JPH01125547U (fr) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125547U true JPH01125547U (fr) | 1989-08-28 |
Family
ID=31238549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2136888U Pending JPH01125547U (fr) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125547U (fr) |
-
1988
- 1988-02-19 JP JP2136888U patent/JPH01125547U/ja active Pending
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