JPH01127688U - - Google Patents
Info
- Publication number
- JPH01127688U JPH01127688U JP1988019185U JP1918588U JPH01127688U JP H01127688 U JPH01127688 U JP H01127688U JP 1988019185 U JP1988019185 U JP 1988019185U JP 1918588 U JP1918588 U JP 1918588U JP H01127688 U JPH01127688 U JP H01127688U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser light
- workpiece
- processing device
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Lasers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019185U JPH01127688U (fr) | 1988-02-15 | 1988-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019185U JPH01127688U (fr) | 1988-02-15 | 1988-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01127688U true JPH01127688U (fr) | 1989-08-31 |
Family
ID=31234474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988019185U Pending JPH01127688U (fr) | 1988-02-15 | 1988-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127688U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016206085A (ja) * | 2015-04-27 | 2016-12-08 | パナソニックＩｐマネジメント株式会社 | レーザ出力測定装置及びレーザ加工方法 |
-
1988
- 1988-02-15 JP JP1988019185U patent/JPH01127688U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016206085A (ja) * | 2015-04-27 | 2016-12-08 | パナソニックＩｐマネジメント株式会社 | レーザ出力測定装置及びレーザ加工方法 |