JPH01125536U - - Google Patents

Info

Publication number
JPH01125536U
JPH01125536U JP2060288U JP2060288U JPH01125536U JP H01125536 U JPH01125536 U JP H01125536U JP 2060288 U JP2060288 U JP 2060288U JP 2060288 U JP2060288 U JP 2060288U JP H01125536 U JPH01125536 U JP H01125536U
Authority
JP
Japan
Prior art keywords
camera
target object
mounting table
respect
object mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2060288U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2060288U priority Critical patent/JPH01125536U/ja
Publication of JPH01125536U publication Critical patent/JPH01125536U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す側面図、第２
図は本考案の動作を説明する説明図である。 １……カメラ、２……カメラ保持部、３……カ
メラ上下機構部、４……カメラ上下駆動モーター
、５……モーター制御部、ｂ……被対象物、７…
…段差、８……被対象物載置台、９……回転中心
、１０……絶対回転中心ズレａ、１１……回転中
心ズレ△ｘ、１２……カメラ上下移動距離△ｚ。 Figure 1 is a side view showing one embodiment of the present invention;
The figure is an explanatory diagram for explaining the operation of the present invention. DESCRIPTION OF SYMBOLS 1... Camera, 2... Camera holding part, 3... Camera vertical mechanism part, 4... Camera vertical drive motor, 5... Motor control part, b... Target object, 7...
...Step, 8...Object mounting table, 9...Rotation center, 10...Absolute rotation center deviation a, 11...Rotation center deviation △x, 12...Camera vertical movement distance △z.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体製造装置の被対象物認識用カメラと、該
カメラを被対象物載置台に対して上下動させる上
下機構と、前記カメラの上下動による被対象物載
置台の回転中心に対する相対ズレを補正する演算
処理部とを有することを特徴とする自動位置補正
機構。 A camera for recognizing a target object of a semiconductor manufacturing device, a vertical mechanism for vertically moving the camera with respect to a target object mounting table, and correcting a relative shift with respect to the center of rotation of the target object mounting table due to the vertical movement of the camera. An automatic position correction mechanism characterized by having an arithmetic processing section.
JP2060288U 1988-02-18 1988-02-18 Pending JPH01125536U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2060288U JPH01125536U (en) 1988-02-18 1988-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2060288U JPH01125536U (en) 1988-02-18 1988-02-18

Publications (1)

Publication Number Publication Date
JPH01125536U true JPH01125536U (en) 1989-08-28

Family

ID=31237108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2060288U Pending JPH01125536U (en) 1988-02-18 1988-02-18

Country Status (1)

Country Link
JP (1) JPH01125536U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618933A (en) * 1984-06-25 1986-01-16 Hitachi Tokyo Electronics Co Ltd Semiconductor manufacturing device
JPS62256449A (en) * 1986-04-30 1987-11-09 Toshiba Corp Semiconductor assembling device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618933A (en) * 1984-06-25 1986-01-16 Hitachi Tokyo Electronics Co Ltd Semiconductor manufacturing device
JPS62256449A (en) * 1986-04-30 1987-11-09 Toshiba Corp Semiconductor assembling device

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