JPH01125011A - Coating method for cavity forming material of resin sealing type resonator - Google Patents

Coating method for cavity forming material of resin sealing type resonator

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Publication number
JPH01125011A
JPH01125011A JP28274687A JP28274687A JPH01125011A JP H01125011 A JPH01125011 A JP H01125011A JP 28274687 A JP28274687 A JP 28274687A JP 28274687 A JP28274687 A JP 28274687A JP H01125011 A JPH01125011 A JP H01125011A
Authority
JP
Japan
Prior art keywords
forming material
cavity
cavity forming
resonator
piezoelectric substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28274687A
Other languages
Japanese (ja)
Other versions
JP2607103B2 (en
Inventor
Takashi Yoshinaga
義永 喬士
Takamichi Kitajima
北嶋 宝道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP62282746A priority Critical patent/JP2607103B2/en
Publication of JPH01125011A publication Critical patent/JPH01125011A/en
Application granted granted Critical
Publication of JP2607103B2 publication Critical patent/JP2607103B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To simultaneously form a film of a cavity forming material on a vibrating electrode of the surface and the reverse side of a piezoelectric substrate by supplying a droplet of the cavity forming material of a prescribed quantity to the upper end part, in a state that the piezoelectric substrate is erected in the vertical direction. CONSTITUTION:A resonator 1 to which terminals 10, 20 are connected is erected in the vertical direction, and from its upper part, a trowel 40 of an applying device is brought close. To the tip part of the trowel 40, a cavity forming material 50 being in a molten state is allowed to adhere. The tip of the trowel 40 is brought into contact with or brought close to the upper end of the resonator 1, and a droplet of the cavity forming material 50 is shifted onto the resonator 1. Thereafter, the resonator 1 is sealed with an insulating resin 30 by a technique of an immersion method, a mold method, etc., and the cavity forming material 50 is absorbed by the insulating resin 30, by which a cavity 31 is formed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電共握子を樹脂封止する場合に、その振動電
極の周囲に空洞を形成するための空洞形成材を塗布する
方法に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method of applying a cavity forming material to form a cavity around a vibrating electrode when sealing a piezoelectric common grip with a resin. It is.

(従来技術とその問題点〕 従来、この種の樹脂封止形共振子において、振動電極を
形成した圧電基板の周囲を樹脂封止したときに振動電極
の周囲に空洞を形成する方法として、振動電極の周囲に
予めワックスやパラフィンなどの常温では固体または半
固体で、温めると容易に軟化し、比較的低温で融解する
空洞形成材を塗布せしめ、絶縁性樹脂の封止時または封
止後に加熱し、上記空−洞形成材を融解させて絶縁性樹
脂に吸収させる方法が知られている(特公昭45−22
384号公報)。
(Prior art and its problems) Conventionally, in this type of resin-sealed resonator, vibration was used as a method of forming a cavity around the vibrating electrode when the piezoelectric substrate on which the vibrating electrode was formed was sealed with resin. A cavity-forming material such as wax or paraffin that is solid or semi-solid at room temperature, easily softens when heated, and melts at a relatively low temperature is applied around the electrode in advance, and then heated during or after sealing with the insulating resin. However, a method is known in which the cavity-forming material is melted and absorbed into an insulating resin (Japanese Patent Publication No. 45-22
Publication No. 384).

上記のような空洞形成材を圧電基板に塗布する場合には
、まず圧電基板を表向きにして表面の振動電極上に空洞
形成材を塗布したあと、圧電基板を裏返しにして裏面の
振動電極上に空洞形成材を塗布するという2回の塗布動
作を行う必要がある。
When applying a cavity forming material as described above to a piezoelectric substrate, first turn the piezoelectric substrate face up and apply the cavity forming material onto the vibrating electrode on the front side, then turn the piezoelectric substrate over and apply the cavity forming material onto the vibrating electrode on the back side. It is necessary to perform two application operations to apply the cavity forming material.

そのため、作業性が悪く、塗布処理に時間を要するとと
もに、塗布処理を自動化しようとすると装置が大形化す
る問題があった。
Therefore, there are problems in that workability is poor, the coating process takes time, and if the coating process is attempted to be automated, the size of the apparatus increases.

〔発明の目的〕[Purpose of the invention]

本発明は上記問題点に鑑みてなされたもので、その目的
は、圧電基板を表裏反転させずに、1回の塗布動作で表
裏面の振動電極上に空洞形成材の被膜を形成できる、作
業性に優れた樹脂封止形共振子の空洞形成材塗布方法を
提供することにある。
The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to form a film of a cavity forming material on the vibrating electrodes on the front and back surfaces in a single coating operation without turning the piezoelectric substrate upside down. An object of the present invention is to provide a method for applying a cavity forming material for a resin-sealed resonator with excellent properties.

〔発明の構成〕[Structure of the invention]

上記目的を達成するために、本発明の空洞形成材塗布方
法は、圧電基板を鉛直方向に立てる工程と、立てた圧電
基板の上端に空洞形成材の塗布装置を近接させ、該塗布
装置から圧電基板の上端に溶融した空洞形成材の点滴を
供給する工程と、上記点滴が圧電基板の表裏面の少なく
とも上記振動電極を被う位置まで流れた状態で、点滴を
固化または半面化させる工程とを含むものである。
In order to achieve the above object, the method for applying a cavity forming material of the present invention includes the step of vertically standing up a piezoelectric substrate, bringing a cavity forming material application device close to the upper end of the upright piezoelectric substrate, and applying a cavity forming material from the application device to the piezoelectric substrate. A step of supplying a drip of molten cavity forming material to the upper end of the substrate, and a step of solidifying or half-forming the drip in a state where the drip flows to a position covering at least the vibrating electrode on the front and back surfaces of the piezoelectric substrate. It includes.

〔作用〕[Effect]

圧電基板を鉛直方向に立てた状態で、その上端部に一定
量の空洞形成材の点滴を供給すると、点滴は重力により
圧電基板の両側面に沿って流れ、振動電極を被うことに
なる。即ち、圧電基板を反転させずに、1回の点滴動作
で表裏面の振動電極上に空洞形成材を塗布できる。そし
て、空洞形成材が振動電極を被うた状態で固化または半
面化させれば、次の樹脂封止工程へ移送する段階で空洞
形成材が他の部位へ流れることがない。
When a certain amount of droplets of cavity-forming material are supplied to the top end of the piezoelectric substrate in a vertically erected state, the droplets flow along both sides of the piezoelectric substrate due to gravity and cover the vibrating electrodes. That is, the cavity forming material can be applied onto the vibrating electrodes on the front and back surfaces in one dripping operation without inverting the piezoelectric substrate. If the cavity-forming material is solidified or halved while covering the vibrating electrode, the cavity-forming material will not flow to other parts during transfer to the next resin sealing step.

(実施例〕 第1図、第2図は本発明方法により製造された樹脂封止
形共振子を示す。
(Example) FIGS. 1 and 2 show a resin-sealed resonator manufactured by the method of the present invention.

図面において、共振子lはエネルギー閉じ込め形厚み縦
振動モード構造を有し、端子10.20を接続した状態
で、その外周が絶縁性樹脂30で封止されている。
In the drawing, the resonator I has an energy-trapped thickness longitudinal vibration mode structure, and its outer periphery is sealed with an insulating resin 30 with terminals 10 and 20 connected.

共振子lは、正方形の薄板状セラミック等からなる圧電
基板2と、その表面に設けられた電極3と、表面に上記
電極3とは180°対称位置に設けられた同一形状の電
極4とを具備している0表面側の電極3は、基板中央に
位置する円形の振動部(振動電極)3aと、基板の一側
縁部に形成された端子部3bと、両部3a、3bを接婢
する2本の引出し部3cとで構成され、裏面側の電極4
も同様に、振動部(振動電極)4a、端子部4b、引出
し部4cで構成されている。なお、振動部3a、 4a
と端子部3b、4bとを接続する引出し部3c、4cを
各々2本ずつ設けることに、より、半田喰われ現象によ
る引出し部3c、4cの断iを防止できる。また、上記
電極3゜4が同一形状でかつ基板2の表裏面の180@
対称位置に形成されているので、方向性がなく、自動機
による組み立゛てが容易となる。
The resonator 1 includes a piezoelectric substrate 2 made of a square thin ceramic plate, an electrode 3 provided on the surface thereof, and an electrode 4 of the same shape provided on the surface at a position 180 degrees symmetrical with the electrode 3. The provided electrode 3 on the front surface connects a circular vibrating part (vibrating electrode) 3a located at the center of the board, a terminal part 3b formed on one side edge of the board, and both parts 3a and 3b. The electrode 4 on the back side
Similarly, it is composed of a vibrating part (vibrating electrode) 4a, a terminal part 4b, and a drawer part 4c. In addition, the vibrating parts 3a, 4a
By providing two each of the lead-out parts 3c and 4c that connect the terminal parts 3b and 4b, it is possible to prevent the lead-out parts 3c and 4c from being disconnected due to the solder eating phenomenon. Further, the electrodes 3.4 have the same shape and 180@ on the front and back surfaces of the substrate 2.
Since they are formed in symmetrical positions, there is no directionality, and assembly using an automatic machine is easy.

2本の端子10.20は、図示しないフープ材からプレ
スにて打ち抜かれたものであり、端子10.20の上端
部は上記電極3,4の端子部3b、4bに牛用などによ
って接続されている。端子10.20の下半分が絶縁性
樹脂30から露出している。
The two terminals 10.20 are punched out from a hoop material (not shown) using a press, and the upper ends of the terminals 10.20 are connected to the terminal portions 3b and 4b of the electrodes 3 and 4 by means of a cow type or the like. ing. The lower half of the terminal 10.20 is exposed from the insulating resin 30.

上記絶縁性樹脂30は浸漬法またはモールドt4qどの
方法にて共振子1の全周を封止しており、特に電極3.
4の振動部3a、4aの周囲には空洞31が形成されて
いるので、振動部3a、4aの厚み縦振動。
The insulating resin 30 seals the entire circumference of the resonator 1 using a dipping method or a molding method, and in particular, the electrodes 3.
Since the cavity 31 is formed around the vibrating parts 3a and 4a of No. 4, the thickness longitudinal vibration of the vibrating parts 3a and 4a occurs.

が阻害されない。is not inhibited.

上記構成の樹脂封止形共振子において、空洞31を形成
する方法は、前述の特公昭45− ?2384号公報に
記載の方法と同様である。即ち、共振子lに端子10.
20を接続した状態で、その表裏面の振動部3a、4g
上にワ、ツクスまたはパラフィンなどの常温では固体ま
たは半固体で、温めると容易に軟化し、比較的低温で融
解する空洞形成材を塗布し、絶縁性樹脂30で封止した
時または封止後に加熱し、空洞形成材を多孔質の絶縁性
樹脂30に吸収させることにより、空洞31を形成する
In the resin-sealed resonator having the above structure, the method for forming the cavity 31 is as described in the above-mentioned Japanese Patent Publication No. 1973-11. This method is similar to the method described in Japanese Patent No. 2384. That is, terminal 10. is connected to resonator l.
20 is connected, vibrating parts 3a and 4g on the front and back sides of the
A cavity forming material such as wax, tux or paraffin which is solid or semi-solid at room temperature, easily softens when heated, and melts at a relatively low temperature is applied on top, and when or after sealing is applied with an insulating resin 30. The cavity 31 is formed by heating and absorbing the cavity forming material into the porous insulating resin 30 .

ここで、本発明の要部であ、る空洞形成材を共振子lの
表裏面の振動部3a、4aに塗、布する方法を第3図〜
第8図についで説明する。
Here, a method of applying a cavity forming material to the front and back vibrating parts 3a and 4a of the resonator l, which is the main part of the present invention, will be explained in Figs.
This will be explained next with reference to FIG.

まず、第3図、第4図のように端子IQ、20を接続し
た共振子1を鉛直方向に立て、その上方より塗布装置の
コテ40を近づける。、コテ40の先端部には溶融状態
の空洞形成材50を溜めた楢に先端を浸漬したあと引き
上Lfることにより11、所寓量、の空洞形成材50が
付着している。卒お、コテ740は常時加□−町 熱されているので、空洞形成材50が溶融、状態で維持
される。
First, as shown in FIGS. 3 and 4, the resonator 1 to which the terminals IQ and 20 are connected is vertically erected, and the iron 40 of the coating device is approached from above. A predetermined amount of cavity-forming material 50 is attached to the tip of the trowel 40 by dipping the tip into an oak containing molten cavity-forming material 50 and then pulling it up Lf. Since the iron 740 is constantly heated, the cavity forming material 50 is maintained in a molten state.

次に、第5図、第6図のように、コテ40の先端を共振
子1の上端に接触または近接させ、空洞形成材50の点
滴を共振子1上に乗り移らせる。この時、空洞形成材5
0が共振子1の表裏面にほぼ均等に供給されるように、
コテ40を共振子1の上端部の中央に位置させる必要が
ある。
Next, as shown in FIGS. 5 and 6, the tip of the iron 40 is brought into contact with or close to the upper end of the resonator 1, and the droplet of the cavity forming material 50 is transferred onto the resonator 1. At this time, the cavity forming material 5
so that 0 is almost evenly supplied to the front and back surfaces of the resonator 1.
It is necessary to position the iron 40 at the center of the upper end of the resonator 1.

次に、第7図、第8図のように、コテ40を共振子1の
上端から離すと、空洞形成材50は重力により下方に流
れ、電極3,4の振動部3a、4aを被う位置へ至る。
Next, as shown in FIGS. 7 and 8, when the iron 40 is removed from the upper end of the resonator 1, the cavity forming material 50 flows downward due to gravity and covers the vibrating parts 3a and 4a of the electrodes 3 and 4. reach the position.

コテ40を離れた空洞形成材50は外気温度によって固
化または半面化し始め、振動部3a。
The cavity forming material 50 that has left the iron 40 begins to solidify or become half-sided due to the outside temperature, and the vibrating portion 3a.

4aまで流れた時点で固化または半面化がほぼ完了する
。したがって、空洞形成材50の塗布工程から樹脂封止
工程まで移送する間で多少時間が経過したり振動が加わ
っても、空洞形成材50が共振子1から流れ落ちるおそ
れがない。
When the flow reaches 4a, solidification or half-layering is almost completed. Therefore, even if some time passes or vibration is applied during the transfer from the coating process of the cavity forming material 50 to the resin sealing process, there is no risk that the cavity forming material 50 will fall off the resonator 1.

なお、上記方法では共振子1に供給された空洞形成材5
0の点滴が自然冷却により固化または半面化する場合を
示したが、冷風を吹き掛けることにより、固化または半
面化を促進させてもよい。
Note that in the above method, the cavity forming material 5 supplied to the resonator 1
Although the case where the drip of 0 solidifies or becomes half-sided due to natural cooling is shown, solidification or half-sidedness may be promoted by blowing cold air.

上記のように表裏両面に空洞形成材50を塗布した後、
共振子1を浸漬法、モールド法などの手法により絶縁性
樹脂30で封止し、空洞形成材5oを絶縁性樹脂30に
吸収させることにより、空洞31が形成される。
After applying the cavity forming material 50 on both the front and back surfaces as described above,
A cavity 31 is formed by sealing the resonator 1 with an insulating resin 30 by a method such as a dipping method or a molding method, and absorbing the cavity forming material 5o into the insulating resin 30.

なお、上記空洞31は電極3,4の振動部3a、4aお
よびその近傍範囲のみに形成すれば、絶縁性樹脂30の
ダンピング機能により不要振動(スプリアス)を効果的
に除去できるので、良質の圧電共振子が得られる。その
ため、空洞形成材50が丁度振動部3a、 4a上で固
化または半面化するように、空洞形成材50の点滴量、
粘度、温度等を選択することが望ましい。
It should be noted that if the cavity 31 is formed only in the vibrating parts 3a, 4a of the electrodes 3, 4 and the vicinity thereof, unnecessary vibrations (spurious) can be effectively removed by the damping function of the insulating resin 30. A resonator is obtained. Therefore, the dripping amount of the cavity forming material 50 is adjusted so that the cavity forming material 50 is solidified or half-sided just on the vibrating parts 3a, 4a.
It is desirable to select the viscosity, temperature, etc.

また、上記実施例では塗布装置としてコテ40の例を示
したが、これに限らず、例えばノズルから空洞形成材の
点滴を共振子の上端に供給するようにしてもよい。
Further, in the above embodiment, the application device is an example of the iron 40, but the present invention is not limited to this, and for example, a droplet of the cavity forming material may be supplied from a nozzle to the upper end of the resonator.

〔発明の効果〕〔Effect of the invention〕

以上の説明で明らかなように、本発明によれば圧電基板
を鉛直方向に立てた状態で、その上端部に一定量の空洞
形成材の点滴を供給することにより、圧電基板の表裏面
の振動電極上に空洞形成材の被膜を同時に形成できるよ
うにしたので、圧電基板を反転させずに、1回の点滴動
作で塗布作業を完了できる。したがって、作業性が極め
て良く、塗布処理時間を大幅に短縮できる。
As is clear from the above description, according to the present invention, vibrations of the front and back surfaces of the piezoelectric substrate are generated by supplying a certain amount of a cavity forming material droplet to the upper end of the piezoelectric substrate while the piezoelectric substrate is vertically erected. Since the film of the cavity forming material can be simultaneously formed on the electrode, the application work can be completed in one drip operation without reversing the piezoelectric substrate. Therefore, workability is extremely good and coating processing time can be significantly shortened.

また、塗布処理を自動化する場合においても、共振子の
位置を変えずに塗布でき、しかも1個の共振子に対し1
回の塗布動作で済むので、装置を小型化できる利点があ
る。
Furthermore, even when automating the coating process, coating can be done without changing the position of the resonator, and one
Since only one coating operation is required, there is an advantage that the apparatus can be made smaller.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にかかる樹脂封止形共振子の正面図、第
2図は第1図の■−■線断面図、第3図は本発明方法の
第1工程の正面図、第4図は第3図のIV−TV線断面
図、第5図は第2工程の正面図、第6図は第5図の■−
■線断面図、第7図は第3工程の正面図、第8図は第7
図の■−■線断面図である。 1・・・共振子、2・・・圧電基板、3,4・・・電極
、3a。 4a・・・振動部(振動電極)、30・・・絶縁性樹脂
、31・・・空洞、40・・・コテ、50・・・空洞形
成材。
FIG. 1 is a front view of a resin-sealed resonator according to the present invention, FIG. 2 is a sectional view taken along the line ■-■ in FIG. 1, FIG. 3 is a front view of the first step of the method of the present invention, and FIG. The figure is a sectional view taken along the IV-TV line in Fig. 3, Fig. 5 is a front view of the second step, and Fig. 6 is a - - in Fig. 5.
■ Line sectional view, Figure 7 is a front view of the 3rd process, Figure 8 is the 7th
It is a sectional view taken along the line ■-■ in the figure. DESCRIPTION OF SYMBOLS 1... Resonator, 2... Piezoelectric substrate, 3, 4... Electrode, 3a. 4a... Vibrating part (vibrating electrode), 30... Insulating resin, 31... Cavity, 40... Trowel, 50... Cavity forming material.

Claims (1)

【特許請求の範囲】  圧電基板の表裏面に形成された振動電極に空洞形成材
からなる被膜を形成した状態で、圧電基板の周囲を絶縁
性樹脂にて封止し、該封止時または封止後に加熱して上
記一空洞形成材を絶縁性樹脂に吸収せしめることにより
、振動電極の周囲に空洞を形成するようにした樹脂封止
形共振子において、上記圧電基板を鉛直方向に立てる工
程と、 立てた圧電基板の上端に空洞形成材の塗布装置を近接さ
せ、該塗布装置から圧電基板の上端に溶融した空洞形成
材の点滴を供給する工程と、上記点滴が圧電基板の表裏
面の少なくとも上記振動電極を被う位置まで流れた状態
で、点滴を固化または半面化させる工程と、 を含む樹脂封止形共振子の空洞形成材塗布方法。
[Claims] With a film made of a cavity forming material formed on the vibrating electrodes formed on the front and back surfaces of the piezoelectric substrate, the periphery of the piezoelectric substrate is sealed with an insulating resin, and at the time of the sealing or sealing. In a resin-sealed resonator in which a cavity is formed around a vibrating electrode by heating and absorbing the cavity-forming material into an insulating resin after cooling, the piezoelectric substrate is erected in a vertical direction. , a step of bringing a cavity-forming material applicator close to the upper end of the piezoelectric substrate that is standing upright, and supplying a drip of molten cavity-forming material from the applicator to the upper end of the piezoelectric substrate; A method for applying a cavity forming material for a resin-sealed resonator, comprising: solidifying or halving the drip in a state where it flows to a position covering the vibrating electrode.
JP62282746A 1987-11-09 1987-11-09 Method for forming cavity of resin-sealed resonator Expired - Lifetime JP2607103B2 (en)

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JP62282746A JP2607103B2 (en) 1987-11-09 1987-11-09 Method for forming cavity of resin-sealed resonator

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JP62282746A JP2607103B2 (en) 1987-11-09 1987-11-09 Method for forming cavity of resin-sealed resonator

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JPH01125011A true JPH01125011A (en) 1989-05-17
JP2607103B2 JP2607103B2 (en) 1997-05-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033841U (en) * 1989-06-02 1991-01-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016711A (en) * 1983-07-08 1985-01-28 Matsushita Electric Ind Co Ltd Manufacture of ceramic resonator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016711A (en) * 1983-07-08 1985-01-28 Matsushita Electric Ind Co Ltd Manufacture of ceramic resonator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033841U (en) * 1989-06-02 1991-01-16

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