JPH01124396U - - Google Patents
Info
- Publication number
- JPH01124396U JPH01124396U JP1951488U JP1951488U JPH01124396U JP H01124396 U JPH01124396 U JP H01124396U JP 1951488 U JP1951488 U JP 1951488U JP 1951488 U JP1951488 U JP 1951488U JP H01124396 U JPH01124396 U JP H01124396U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- spacer
- blades
- spacers
- circumferential surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019514U JPH0617036Y2 (ja) | 1988-02-17 | 1988-02-17 | ターボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019514U JPH0617036Y2 (ja) | 1988-02-17 | 1988-02-17 | ターボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01124396U true JPH01124396U (US07652168-20100126-C00068.png) | 1989-08-24 |
| JPH0617036Y2 JPH0617036Y2 (ja) | 1994-05-02 |
Family
ID=31235090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988019514U Expired - Lifetime JPH0617036Y2 (ja) | 1988-02-17 | 1988-02-17 | ターボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617036Y2 (US07652168-20100126-C00068.png) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358810A (en) * | 1976-11-08 | 1978-05-27 | Aisin Seiki Co Ltd | High vacuum pump |
| EP0129709A2 (en) * | 1983-04-26 | 1985-01-02 | Anelva Corporation | Combinational molecular pump capable of readily being cleaned |
| JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
| JPS60243395A (ja) * | 1985-04-30 | 1985-12-03 | Shimadzu Corp | ターボ分子ポンプ |
| JPS61145394A (ja) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | 分子ポンプ |
| EP0260733A1 (en) * | 1986-08-12 | 1988-03-23 | Ultra-Centrifuge Nederland N.V. | High-vacuum pump |
-
1988
- 1988-02-17 JP JP1988019514U patent/JPH0617036Y2/ja not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358810A (en) * | 1976-11-08 | 1978-05-27 | Aisin Seiki Co Ltd | High vacuum pump |
| EP0129709A2 (en) * | 1983-04-26 | 1985-01-02 | Anelva Corporation | Combinational molecular pump capable of readily being cleaned |
| JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
| JPS61145394A (ja) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | 分子ポンプ |
| JPS60243395A (ja) * | 1985-04-30 | 1985-12-03 | Shimadzu Corp | ターボ分子ポンプ |
| EP0260733A1 (en) * | 1986-08-12 | 1988-03-23 | Ultra-Centrifuge Nederland N.V. | High-vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617036Y2 (ja) | 1994-05-02 |
