JPH01124271U - - Google Patents

Info

Publication number

JPH01124271U

JPH01124271U JP2139888U JP2139888U JPH01124271U JP H01124271 U JPH01124271 U JP H01124271U JP 2139888 U JP2139888 U JP 2139888U JP 2139888 U JP2139888 U JP 2139888U JP H01124271 U JPH01124271 U JP H01124271U

Authority

JP

Japan

Prior art keywords

coating liquid

substrate

spin coater

scattering

gas supply

Prior art date

1988-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000576 coating method Methods 0.000 claims description 10
• 239000011248 coating agent Substances 0.000 claims description 8
• 239000007788 liquid Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 7
• 239000002904 solvent Substances 0.000 claims description 3
• 230000002093 peripheral effect Effects 0.000 claims 1
• 230000002265 prevention Effects 0.000 claims 1
• 238000005259 measurement Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1

Cited By (1)