JPH01121867U - - Google Patents
Info
- Publication number
- JPH01121867U JPH01121867U JP1714988U JP1714988U JPH01121867U JP H01121867 U JPH01121867 U JP H01121867U JP 1714988 U JP1714988 U JP 1714988U JP 1714988 U JP1714988 U JP 1714988U JP H01121867 U JPH01121867 U JP H01121867U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- chip
- measured
- needles
- probe needles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 15
- 239000011111 cardboard Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案のプローブカード及びこれを用
いたプロービング状態を示す平面図、第２図は本
考案のプローブカードにおけるチエツク時の顕微
鏡の視野を示す図、第３図は従来のプローブカー
ド及びこれを用いたプロービング状態の平面図、
第４図はプロービング時のアライメント状態を示
す模式的断面図、第５図は顕微鏡の高倍率状態の
視野を示す図、第６図は顕微鏡の低倍率状態の視
野を示す図である。
１，１Ａ……プローブカード、２……プローブ
カード基板、３……試験装置接続ピン部、４……
プローブ針、５……識別マーク、１０……測定ウ
エハ、１１ａ〜１１ｄ……被測定ＩＣチツプ、１
２……電極パツド、１３……テストヘツド部、１
４……目視穴、１５……顕微鏡。
Fig. 1 is a plan view showing the probe card of the present invention and the probing state using the same, Fig. 2 is a view showing the field of view of the microscope during checking with the probe card of the present invention, and Fig. 3 is a plan view showing the probe card of the present invention and the probing state using the same. A plan view of the probing state using this,
FIG. 4 is a schematic cross-sectional view showing the alignment state during probing, FIG. 5 is a view showing the field of view of the microscope in a high magnification state, and FIG. 6 is a view showing the field of view of the microscope in a low magnification state. 1, 1A...Probe card, 2...Probe card board, 3...Test device connection pin section, 4...
Probe needle, 5...Identification mark, 10...Measurement wafer, 11a to 11d...IC chip to be measured, 1
2... Electrode pad, 13... Test head section, 1
4... viewing hole, 15... microscope.
Claims (1)
持させ、これらプローブ針を被測定ＩＣチツプの
電極パツドに接触させて被測定ＩＣチツプを試験
装置に電気的に接続させるプローブカードにおい
て、前記プローブ針は複数個の被測定ＩＣチツプ
の各電極パツドに同時に接触するように構成され
ると共に、これらプローブ針には異なる被測定Ｉ
Ｃチツプに対応するプローブ針を夫々区別するた
めの識別マークを施したことを特徴とするプロー
ブカード。 In a probe card in which a plurality of probe needles are supported on a probe card board, and the probe needles are brought into contact with electrode pads of an IC chip to be measured to electrically connect the IC chip to be measured to a test device, the plurality of probe needles are The probe needles are configured to simultaneously contact each electrode pad of each IC chip to be measured, and these probe needles have different IC chips to be measured.
A probe card characterized in that an identification mark is provided to distinguish each probe needle corresponding to a C chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714988U JPH01121867U (en) | 1988-02-12 | 1988-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714988U JPH01121867U (en) | 1988-02-12 | 1988-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121867U true JPH01121867U (en) | 1989-08-18 |
Family
ID=31230675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1714988U Pending JPH01121867U (en) | 1988-02-12 | 1988-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121867U (en) |
-
1988
- 1988-02-12 JP JP1714988U patent/JPH01121867U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01121867U (en) | ||
| JPH01121866U (en) | ||
| JPS6276274A (en) | Ic socket | |
| JPH05144895A (en) | Probe card | |
| JPS60107773U (en) | Connection confirmation device between circuit board and circuit tester | |
| JP2817673B2 (en) | Testing method of probe card and IC chip | |
| JPH0547874A (en) | Semiconductor device | |
| JPS6439743A (en) | Container for integrated circuit | |
| JPH0363935U (en) | ||
| JPH0323368U (en) | ||
| JPH01180675U (en) | ||
| JPS6190246U (en) | ||
| JPH0432757Y2 (en) | ||
| JPS6137776B2 (en) | ||
| JPS63207146A (en) | Probe card | |
| JPS62170543U (en) | ||
| JPS62157146U (en) | ||
| JPH0316069U (en) | ||
| JPS61132761U (en) | ||
| JPH0328465U (en) | ||
| JPS6457644U (en) | ||
| JPH05340966A (en) | Probe card | |
| JPS58148934U (en) | integrated circuit measurement equipment | |
| JPS62157145U (en) | ||
| JPH028037U (en) |