JPH01121704A - Size measuring instrument - Google Patents

Abstract

PURPOSE:To measure plural positions of a body even in a complicate shape with nearly continuous light by performing time-division control over respective detection parts and limiting light irradiation of only a detection part where there is no interference at any point of time during measurement. CONSTITUTION:A measuring instrument main body is equipped with a time- division switch which distributes a light irradiation and measurement indication signal 8 to respective measuring instruments on a time-division basis. Then the body 2 to be measured is mounted on an X-Y stage and moves right and left, or forward and backward. Measuring instrument detection parts 2, 3, and 4 measure the distance between the body surface and detection part. Here, when the body 1 to be measured shifts in a relative position with the detection parts 2, 3, and 4, the distances between the plane part of the object body 1 and detection parts 2, 3, and 4 are measured, so the height is found. The body 1 is moved forth and back while the measuring instrument detection parts 2, 3, and 4 are in operation so as to shorten the measurement time. During this measurement, the measurement indication signal 8 is switched by the time- division switch 9 to put one of the detection parts 2, 3, and 4 in operation at all times, so mutual light mixture is eliminated.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a device for measuring the dimensions of complex-shaped objects using a light beam. It is something that can be demonstrated.

[Summary of the invention]

When measuring the dimensions of a small object at multiple locations continuously using multiple devices that emit light and measure dimensions using the reflected light, multiple devices are operated simultaneously to shorten the measurement time. Depending on the shape and surface condition of the object, the light emitted by another device may mix into the incident light of another device, resulting in erroneous measurements. In order to prevent this, the above-mentioned problem will disappear if the light irradiation and the measurement of the incident light are performed in sequence in a time-sharing manner.

It is easy to reduce the period of this time division to less than m seconds,
If measurements are taken sequentially at this level of frequency, the purpose of continuous measurement can often be practically achieved.

This hardly impairs the overall measurement speed.

For example, the present invention is particularly effective when scanning and measuring several locations on each hemisphere in sequence when hemispheres with mirror-like surfaces are lined up closely.

[Conventional technology]

Conventionally, methods of measuring dimensions by reflection of irradiated light have been put into practical use based on various principles, but it is difficult to measure dimensions by reflecting irradiated light.
There is still no device that can measure dimensions at multiple locations on a spherical object 0.0 with a mirror-like surface.

[Problem that the invention seeks to solve]

If you attempt to continuously measure the dimensions of an object with a complex shape at multiple locations using multiple devices that measure dimensions by receiving reflected light from the irradiation, it is possible that other light may mix between the devices. In this case, an error occurs in the dimension measurement value.

[Means for solving problems]

The present invention aims to solve these problems.

The present invention is characterized in that the number of devices that irradiate effective light and measure reflected light at any microscopic point in time is limited to one device or a combination of devices that do not cause any interference due to their arrangement.

[Effect]

As a result, no disturbance light enters the measuring device that is performing the measuring operation, and the measurements of the two individual measuring devices become accurate.

〔Example〕

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

Reference numeral 1 denotes an object to be measured, in which 9 minute hemispheres, for example several hundred micrometers in size, are arranged closely on a plane. 2.3.4 is a measuring device detection section, which has an element that emits a laser beam, for example, and an element that emits an electric signal according to the receiving position of the reflected light of the beam, and uses the principle of triangulation to connect the detection section and the object to be measured. Measure the distance to the surface of 1. The detection unit itself is a known device. Same <
, 5, 6. 7 is a known measuring device main body, 8 is a light irradiation and measurement instruction signal, and 9 is a time division switch 10 for distributing 8 to each measurement device in a time division manner for driving the time division switch 9. This is a timing generation circuit.

These operations will be explained below.

The object to be measured 1 is usually placed on an X-Y stage (not shown) and moves left and right or front and back. Measuring device detection unit 2,
3.4 measures the distance between the surface of the object to be measured and the detection section by irradiating the object surface with light from a direction perpendicular to the measurement surface of each part. Here, to describe an example of a height measurement method, if the relative position of the object to be measured 1 and the detection section 2.3.4 is changed, the flat part of the object to be measured 1 (i.e., the bottom of the hemisphere) and the detection section 2
Since the distance from 3.4 degrees can be measured, it is natural that the height dimension can be determined from these values. In order to shorten the measurement time, the measuring device detection section 2.3.4 remains in the operating state and the object to be measured 1 moves back and forth (or left and right).

During this measurement, if the measurement instruction signal 8 is switched by the time division switch 9 so that only one of the detection units 2, 3.4 is activated at all times, light will not mix with each other.

〔Effect of the invention〕

According to the present invention, dimensions of an object having a complex shape can be measured continuously at multiple locations using light.

As described in the embodiments, the present invention is most effective when used for measuring objects to be inspected that are approximately several hundred micrometers in size, but is not limited to measuring minute dimensions.

[Brief explanation of the drawing]

The figure is a block diagram of the present invention. 1: object to be measured, 2, 3.4: detection section, 9: two-time division switch, 10: timing generator.

Claims (1)

[Claims] 1. In a device that measures the dimensions of an object by emitting light and measuring the reflected light, when measuring the dimensions of multiple locations on the object to be measured, there are multiple detection units that emit light and measure the reflected light. 1. A dimension measuring device characterized in that each of the individual detection sections is time-divisionally controlled so that light irradiation is limited to only those detection sections that do not interfere with each other at any time during measurement.