JPH01120980U - - Google Patents
Info
- Publication number
- JPH01120980U JPH01120980U JP1655388U JP1655388U JPH01120980U JP H01120980 U JPH01120980 U JP H01120980U JP 1655388 U JP1655388 U JP 1655388U JP 1655388 U JP1655388 U JP 1655388U JP H01120980 U JPH01120980 U JP H01120980U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- rotating
- material onto
- coating material
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 4
- 238000000576 coating method Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1655388U JPH01120980U (de) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1655388U JPH01120980U (de) | 1988-02-10 | 1988-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01120980U true JPH01120980U (de) | 1989-08-16 |
Family
ID=31229585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1655388U Pending JPH01120980U (de) | 1988-02-10 | 1988-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01120980U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0392800U (de) * | 1990-01-11 | 1991-09-20 |
-
1988
- 1988-02-10 JP JP1655388U patent/JPH01120980U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0392800U (de) * | 1990-01-11 | 1991-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW449774B (en) | Apparatus and method for processing substrate | |
JPH01120980U (de) | ||
JPH01100435U (de) | ||
JPS62103247U (de) | ||
JPS63193573U (de) | ||
JPH02132933U (de) | ||
JPS62199942U (de) | ||
JPS6343428U (de) | ||
JPH0227724U (de) | ||
JPH0334064U (de) | ||
JPS62101230U (de) | ||
JPH0215864U (de) | ||
JPS639130U (de) | ||
JPH01120979U (de) | ||
JPH01172048U (de) | ||
JPH0290845U (de) | ||
JPH0192130U (de) | ||
JPH02132941U (de) | ||
JPS5982577U (ja) | 回転式塗布装置 | |
JPH02132932U (de) | ||
JPH03109330U (de) | ||
JPS62199178U (de) | ||
JPS6398629U (de) | ||
JPH02137030U (de) | ||
JPH02104873U (de) |