JPH01120148U - - Google Patents

Info

Publication number
JPH01120148U
JPH01120148U JP1988016037U JP1603788U JPH01120148U JP H01120148 U JPH01120148 U JP H01120148U JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H01120148 U JPH01120148 U JP H01120148U
Authority
JP
Japan
Prior art keywords
pellicle
container
lid
frame
synthetic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988016037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0645965Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988016037U priority Critical patent/JPH0645965Y2/ja
Publication of JPH01120148U publication Critical patent/JPH01120148U/ja
Application granted granted Critical
Publication of JPH0645965Y2 publication Critical patent/JPH0645965Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1988016037U 1988-02-09 1988-02-09 ペリクル用容器 Expired - Lifetime JPH0645965Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988016037U JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988016037U JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Publications (2)

Publication Number Publication Date
JPH01120148U true JPH01120148U (US07714131-20100511-C00001.png) 1989-08-15
JPH0645965Y2 JPH0645965Y2 (ja) 1994-11-24

Family

ID=31228617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988016037U Expired - Lifetime JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Country Status (1)

Country Link
JP (1) JPH0645965Y2 (US07714131-20100511-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007328226A (ja) * 2006-06-09 2007-12-20 Shin Etsu Chem Co Ltd ペリクル収納容器及びその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6243359U (US07714131-20100511-C00001.png) * 1985-09-04 1987-03-16
JPS62143948U (US07714131-20100511-C00001.png) * 1986-03-07 1987-09-10
JPS6322379A (ja) * 1986-05-30 1988-01-29 インコ インダストリアル コ−ポレ−シヨン 光学薄膜組立体の梱包方法と容器
JPS63140526U (US07714131-20100511-C00001.png) * 1987-03-06 1988-09-16

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6243359U (US07714131-20100511-C00001.png) * 1985-09-04 1987-03-16
JPS62143948U (US07714131-20100511-C00001.png) * 1986-03-07 1987-09-10
JPS6322379A (ja) * 1986-05-30 1988-01-29 インコ インダストリアル コ−ポレ−シヨン 光学薄膜組立体の梱包方法と容器
JPS63140526U (US07714131-20100511-C00001.png) * 1987-03-06 1988-09-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007328226A (ja) * 2006-06-09 2007-12-20 Shin Etsu Chem Co Ltd ペリクル収納容器及びその製造方法

Also Published As

Publication number Publication date
JPH0645965Y2 (ja) 1994-11-24

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