JPH01119056U - - Google Patents
Info
- Publication number
- JPH01119056U JPH01119056U JP1464088U JP1464088U JPH01119056U JP H01119056 U JPH01119056 U JP H01119056U JP 1464088 U JP1464088 U JP 1464088U JP 1464088 U JP1464088 U JP 1464088U JP H01119056 U JPH01119056 U JP H01119056U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film thickness
- thickness distribution
- locus
- diagram showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1464088U JPH01119056U (cs) | 1988-02-08 | 1988-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1464088U JPH01119056U (cs) | 1988-02-08 | 1988-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119056U true JPH01119056U (cs) | 1989-08-11 |
Family
ID=31226022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1464088U Pending JPH01119056U (cs) | 1988-02-08 | 1988-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119056U (cs) |
-
1988
- 1988-02-08 JP JP1464088U patent/JPH01119056U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01119056U (cs) | ||
| JPH023463U (cs) | ||
| JPS6120559U (ja) | スパツタ装置 | |
| JPH0233257U (cs) | ||
| JPS62129058U (cs) | ||
| JPS62153364U (cs) | ||
| JPH0214361U (cs) | ||
| JPH0414167U (cs) | ||
| JPS61103819U (cs) | ||
| JPS6183099U (cs) | ||
| JPH0217550U (cs) | ||
| JPS60193964U (ja) | マグネトロンスパツタ装置のタ−ゲツト | |
| JPS6444440U (cs) | ||
| JPH0198159U (cs) | ||
| JPS60151580U (ja) | 回転塗布装置の基板ホルダ− | |
| JPS6264768U (cs) | ||
| JPS63183263U (cs) | ||
| JPH0228482U (cs) | ||
| JPH04964U (cs) | ||
| JPS60145307U (ja) | 膜厚測定装置 | |
| JPH0328768U (cs) | ||
| JPH03107400U (cs) | ||
| JPS63900U (cs) | ||
| JPH0189325U (cs) | ||
| JPS62134235U (cs) |