JPH01118434U - - Google Patents
Info
- Publication number
- JPH01118434U JPH01118434U JP1988013033U JP1303388U JPH01118434U JP H01118434 U JPH01118434 U JP H01118434U JP 1988013033 U JP1988013033 U JP 1988013033U JP 1303388 U JP1303388 U JP 1303388U JP H01118434 U JPH01118434 U JP H01118434U
- Authority
- JP
- Japan
- Prior art keywords
- reduced pressure
- pressure cvd
- boat
- quartz tube
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013033U JPH01118434U (enExample) | 1988-02-04 | 1988-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013033U JPH01118434U (enExample) | 1988-02-04 | 1988-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118434U true JPH01118434U (enExample) | 1989-08-10 |
Family
ID=31222999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988013033U Pending JPH01118434U (enExample) | 1988-02-04 | 1988-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118434U (enExample) |
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1988
- 1988-02-04 JP JP1988013033U patent/JPH01118434U/ja active Pending