JPS6375034U - - Google Patents

Info

Publication number

JPS6375034U

JPS6375034U JP16907186U JP16907186U JPS6375034U JP S6375034 U JPS6375034 U JP S6375034U JP 16907186 U JP16907186 U JP 16907186U JP 16907186 U JP16907186 U JP 16907186U JP S6375034 U JPS6375034 U JP S6375034U

Authority

JP

Japan

Prior art keywords

protective cover

plasma

processing

processing chamber

processing apparatus

Prior art date

1986-11-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 2
• 230000001681 protective effect Effects 0.000 claims 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
• 235000012239 silicon dioxide Nutrition 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1