JPH01118190U - - Google Patents

Info

Publication number
JPH01118190U
JPH01118190U JP1391688U JP1391688U JPH01118190U JP H01118190 U JPH01118190 U JP H01118190U JP 1391688 U JP1391688 U JP 1391688U JP 1391688 U JP1391688 U JP 1391688U JP H01118190 U JPH01118190 U JP H01118190U
Authority
JP
Japan
Prior art keywords
vacuum
purge gas
magnetic bearing
evacuation
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1391688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720395Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988013916U priority Critical patent/JPH0720395Y2/ja
Publication of JPH01118190U publication Critical patent/JPH01118190U/ja
Application granted granted Critical
Publication of JPH0720395Y2 publication Critical patent/JPH0720395Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988013916U 1988-02-03 1988-02-03 真空排気装置 Expired - Lifetime JPH0720395Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988013916U JPH0720395Y2 (ja) 1988-02-03 1988-02-03 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988013916U JPH0720395Y2 (ja) 1988-02-03 1988-02-03 真空排気装置

Publications (2)

Publication Number Publication Date
JPH01118190U true JPH01118190U (OSRAM) 1989-08-09
JPH0720395Y2 JPH0720395Y2 (ja) 1995-05-15

Family

ID=31224637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988013916U Expired - Lifetime JPH0720395Y2 (ja) 1988-02-03 1988-02-03 真空排気装置

Country Status (1)

Country Link
JP (1) JPH0720395Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114008736A (zh) * 2019-06-19 2022-02-01 爱德华兹真空泵有限责任公司 多个真空腔室排气系统和抽空多个真空腔室的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110685U (ja) * 1983-12-28 1985-07-26 日本電子株式会社 タ−ボ分子ポンプを用いた排気系
JPS60163663U (ja) * 1984-04-09 1985-10-30 株式会社日立製作所 電子顕微鏡等の真空排気装置
JPS61277896A (ja) * 1985-05-31 1986-12-08 Shimadzu Corp タ−ボ分子ポンプの磁気軸受装置
JPS62168992A (ja) * 1985-11-27 1987-07-25 Shimadzu Corp タ−ボ分子ポンプの腐食性ガス排気方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110685U (ja) * 1983-12-28 1985-07-26 日本電子株式会社 タ−ボ分子ポンプを用いた排気系
JPS60163663U (ja) * 1984-04-09 1985-10-30 株式会社日立製作所 電子顕微鏡等の真空排気装置
JPS61277896A (ja) * 1985-05-31 1986-12-08 Shimadzu Corp タ−ボ分子ポンプの磁気軸受装置
JPS62168992A (ja) * 1985-11-27 1987-07-25 Shimadzu Corp タ−ボ分子ポンプの腐食性ガス排気方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114008736A (zh) * 2019-06-19 2022-02-01 爱德华兹真空泵有限责任公司 多个真空腔室排气系统和抽空多个真空腔室的方法
JP2022537981A (ja) * 2019-06-19 2022-08-31 エドワーズ バキューム リミテッド ライアビリティ カンパニー 複数真空チャンバの排気システム及び複数真空チャンバの排気方法

Also Published As

Publication number Publication date
JPH0720395Y2 (ja) 1995-05-15

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