JPH01116607A - Manufacture of optical semiconductor coupler - Google Patents

Abstract

PURPOSE:To eliminate the fluctuation at the time of soldering of an optical fiber by always bringing the optical fiber in the vicinity of an optical semiconductor element, into contact with a projecting part of a supporting base, and also, executing the soldering far in the rear separated from a supporting point which said fiber has come into contact with and fixing the optical fiber. CONSTITUTION:A part of a fiber holder 12 for always holding an optical fiber 11 is fixed in advance onto a substrate 10 being common to an optical semiconductor element 13, and brought into contact with a projecting part 14a of a supporting part 14a of a supporting base 14 for forming a supporting point positioned at a suitable gap against the optical semiconductor element 13. Subsequently, while holding this state, the optical axis adjustment is executed by using the contact part as the supporting point, and after the adjustment has been completed, the supporting base 14 and the fiber holder 12 are soldered and fixed by a soldering part 14b, at a position separated from a distance to the supporting point when it is seen from the optical semiconductor element 13, for instance, at a position which is distant by several times. In such a way, since the optical fiber 11 being in the vicinity of the optical semiconductor element 13 is always in a fixed state, the fluctuation of the soldering part 14b and the influence exerted on the tip of the fiber can be remarkably reduced.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing an optical semiconductor coupler, and in particular, to a method for manufacturing an optical semiconductor coupler that can accurately position an optical semiconductor element and an optical fiber. It is about the method.

(Prior Art) One method of manufacturing an optical semiconductor coupler is to directly couple the output of an optical semiconductor element to an optical fiber without using a lens or the like. According to this method, the tip of the optical fiber is processed into a spherical shape to provide a lens effect, thereby making it possible to obtain a coupling efficiency that is several orders of magnitude higher than when using a Rondo lens or the like.

However, in this case, the axis misalignment accuracy becomes several orders of magnitude more severe, and for example, when coupled with a single mode fiber, ±0
．． 5 μm is required.

Conventionally, there have been methods for manufacturing this type of optical semiconductor coupler as shown in FIGS. 7 and 8.

First, a conventional method for manufacturing an optical semiconductor coupler will be explained using FIG. 7. Here, FIG. 7(a) is a side view of the
FIG. 1(b) is a sectional view taken along line A--A in FIG. 7(a).

As shown in the figure, the tip of the optical fiber 1 is processed into a spherical shape, and the optical fiber 1 with the tip processed into a spherical shape is supported by a fiber holder 2 .

Furthermore, this fiber holder 2 has an optical axis adjustment jig 3.
is being held by. By moving the optical axis adjustment jig 3 in the three axis directions of X, Y, and Z while the optical semiconductor element 4 is emitting light, the optical axis of the optical fiber 1 and the optical semiconductor element 4 is adjusted to maximize the characteristics. At this point, attach the fiber holder 2 and support stand 5.
The space between them is fixed with solder 6 using a YAG laser or the like.

Further, FIG. 8 is an explanatory diagram of another conventional method of manufacturing an optical semiconductor coupler. That is, FIG. 8(a) is a side view of the
FIG. 8(b) is a sectional view taken along B-B vA in FIG. 8(a).

As shown in this figure, the optical fiber 7 and the support base 8 were fixed with solder 9 using a YAG laser or the like.

(Problem to be solved by the invention) However, with any of the methods described above,
As far as adjustment is performed in the three axis directions of Y and Z, the parts other than those supported by the optical axis adjustment jig 3 are always floating in the air, and no matter which part is fixed, the surface of the solder 6 and 9 when melted Due to tension, volumetric contraction during cooling, etc., the tip of the optical fiber becomes the 7th layer.
As shown in FIG. 8(b) and FIG. 8(b), there was a problem in that it was pulled in the direction of the arrow, and the bonding characteristics after soldering varied greatly.

SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-described fluctuations during soldering of optical fibers and to provide an optical semiconductor coupler with excellent coupling characteristics.

(Means for Solving the Problems) In order to solve the above problems, the present invention fixes a part of the fiber holder that always holds the optical fiber on a common substrate with the optical semiconductor element, and The semiconductor element is brought into contact with the protruding part of the support base that forms a fulcrum located with an appropriate gap, and while maintaining this state, the optical axis is adjusted using the contact part as a fulcrum. After the adjustment is completed, the optical axis is adjusted as seen from the optical semiconductor element. The support base and the fiber holder are fixed by soldering at a position farther away than the distance to the fulcrum, for example, at a position several times farther away.

(Function) According to the present invention, with the above configuration, the optical fiber near the optical semiconductor element is always in a fixed state, so that the influence of fluctuations in the soldered portion on the fiber tip can be extremely reduced. Therefore, it is possible to manufacture an optical semiconductor coupler with less variation in characteristics.

Furthermore, since the movement of the optical fiber tip can be made smaller than the actual movement amount of the adjustment jig, highly accurate optical axis adjustment is possible with an inexpensive adjustment jig.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

Fig. 1 is an overall configuration diagram of an optical semiconductor coupler manufacturing apparatus that implements the present invention, Fig. 2 is a perspective view of a support stand for the optical semiconductor coupler, and Fig. 3 is a diagram showing the attachment of an optical fiber to the support stand. It is a figure showing a process.

In the figure, 10 is a substrate, 11 is an optical fiber, 12 is a fiber holder that holds this optical fiber, 13 is an optical semiconductor element, 14 is a support stand, 14a is a protrusion, 14b is a soldering part, and 15 is an optical axis adjustment Jig, 16 is joint A, 17 is upper arm, 18 is compression spring, 19 is joint B, 20
is the lower arm.

As shown in this figure, the optical axis adjustment jig 15 has an upper arm 17 that is movable only laterally around the joint A16.
and a lower arm 20 which is connected to the upper arm 17 by a compression spring 18 and is movable only in the vertical direction around the joint B19, and the fiber holder 12 is supported by the lower arm 20. . As shown in FIGS. 2 and 3, the support stand 14 includes a protrusion 14a and a soldering portion 14b.

That is, the protrusion 14a has a v-shaped protrusion on its upper part, and has a structure in which two points having an included angle of about 90'' when viewed from the center of the fiber holder are in contact with the fiber holder 12.Fiber holder 12 is always set against this protrusion by a compression spring 18.

On the other hand, the soldering part 14b has a semicircular groove in its upper part, and has a structure in which the fiber holder 12 is centered with an appropriate adjustment margin.

Next, FIGS. 4 and 5 are diagrams illustrating the manufacturing process of the optical semiconductor coupler of the present invention. That is, FIG. 4(a) is a plan view illustrating the first step, and FIG. 4(b) is a plan view illustrating the first step.
), Figure 4(c) is a cross-sectional view taken along line C-C of Figure 4(b).
5(a) is a plan view explaining the second step, FIG. 5(b) is a sectional view taken along line E-E in FIG. c) is a sectional view taken along line FF in FIG. 5(b).

First, as shown in FIGS. 1 and 4, when the fiber holder 12 is pressed against the protrusion 14a forming the fulcrum, for example, the optical axis adjustment jig 15 cannot be moved in the lateral direction by the upper arm. 17 is replaced by a horizontal rotational movement, and the vertical movement is replaced by a vertical rotational movement of the lower arm 20. These movements further adjust the optical axis by moving the tip of the optical fiber in a direction parallel to the active layer of the optical semiconductor element 13 and in a direction perpendicular to the active layer, respectively, using the projection 14a of the support base 14 as a fulcrum. do. Of course, adjustment in the optical axis direction can be made by simply sliding the fiber holder 12 on the support base 14 by moving the adjustment jig 15 back and forth. As described above, the optical axis can be adjusted while keeping the fiber holder 12 pressed against the protrusion 14a of the support base 14. In these adjustments, the ratio of the actual amount of movement of the fiber tip to the amount of movement of the optical axis adjustment jig 15 is A/B as shown in FIG. Axis adjustments can be made.

Here, for example, A is 2 ms and B is about 5011 ms. Further, the angular deviation that occurs at this time is small and can be sufficiently corrected by adjustment in the X and Y directions.

Next, after completing the optical axis adjustment, as shown in FIG.
For example, a YAG laser or the like is used to solder and fix the fiber holder to the soldering portion 14b of the support base 14, which is formed at a position several times farther away. Note that the spring pressure applied to the lower arm 20 is set to an amount such that the fiber holder 12 does not bend. At this time, the ratio of the amount of axis deviation of the actual fiber tip to the fluctuation of the soldered part that occurs is as shown in Figure 6(b).
Since it is an A/C, variation in characteristics during soldering can be greatly reduced. Here, for example, A is 2 points and C is 5 points.
．． It is 5 cranes. In other words, from the optical semiconductor element 13 to the support base 1
The shorter the distance to the protrusion 14a of No. 4, the narrower the optical axis adjustment range becomes, but it becomes possible to adjust the optical axis with high precision, and fluctuations during soldering are also reduced.

Note that the present invention is not limited to the above embodiments,
Various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

(Effects of the Invention) As described above in detail, according to the present invention, unlike the conventional method, the optical fiber near the optical semiconductor element is always in contact with the protrusion of the support base, and Since the optical fiber is fixed by soldering far behind the fulcrum, the effect of fluctuations in the soldered part on the fiber tip can be greatly reduced.
It is possible to manufacture an optical semiconductor coupler with little variation in characteristics.

Furthermore, since the movement of the optical fiber tip can be made smaller than the actual movement amount of the adjustment jig, highly accurate optical axis adjustment is possible with an inexpensive adjustment jig.

[Brief explanation of the drawing]

Fig. 1 is an overall configuration diagram of an optical semiconductor coupler manufacturing apparatus that implements the present invention, Fig. 2 is a perspective view of a support stand for the optical semiconductor coupler, and Fig. 3 is a diagram showing the attachment of an optical fiber to the support stand. 4 and 5 are diagrams illustrating the manufacturing process of the optical semiconductor coupler of the present invention, Figure 6 is a detailed explanatory diagram of the present invention, and Figure 7 is a conventional optical semiconductor coupler. A diagram showing the manufacturing process of
FIG. 8 is a diagram showing the manufacturing process of another conventional optical semiconductor coupler. . DESCRIPTION OF SYMBOLS 10... Substrate, 11... Optical fiber, 12... Fiber holder, 13... Optical semiconductor element, 14... Support stand, 14a... Protrusion part, 14b... Soldering part,
15... Optical axis adjustment jig, 16... Joint A11
7... Upper arm, 18... Compression spring, 19...
Joint B120...lower arm. Patent applicant Oki Electric Industry Co., Ltd.

Claims (3)

[Claims] (1) A method for manufacturing an optical semiconductor coupler in which an optical semiconductor element and a support for fixing an optical fiber are provided on a substrate, the optical axes of the optical fiber and the optical semiconductor element are aligned, and then the optical fiber is fixed to the support. (a) A part of the fiber holder supporting the optical fiber,
(b) adjusting the optical axis of the optical semiconductor element and the tip of the optical fiber while the optical semiconductor element is pressed against a protrusion forming a fulcrum provided on the support; (b) adjusting the protrusion while maintaining the above state; An optical semiconductor coupler comprising the step of fixing the supporting base and the fiber holder by soldering at a rear position that is further away from the fulcrum when viewed from the optical semiconductor element. Production method. (2) The support base is installed on the optical semiconductor element with an appropriate gap, and using the protrusion on the support base as a fulcrum, a part of the fiber holder is brought into contact with the protrusion with an appropriate pressing pressure, and this contact point is By moving the adjustment jig around , the tip of the optical fiber is moved in a direction symmetrical to the direction of movement, and the distances from the adjustment jig to the fulcrum and from the fulcrum to the tip of the optical fiber are The method for manufacturing an optical semiconductor coupler according to claim 1, characterized in that the ratio is made larger than 1 so that the amount of movement at the tip of the optical fiber is smaller than the amount of movement of the actual adjustment jig. . (3) By making the ratio of the distance from the soldering part of the fiber holder and support stand to the protrusion and from the protrusion to the fiber tip larger than 1, the optical fiber tip 2. The method of manufacturing an optical semiconductor coupler according to claim 1, wherein the optical axis shift in the optical semiconductor coupler is made small.