JPH01115494A - Treatment of drainage - Google Patents
Treatment of drainageInfo
- Publication number
- JPH01115494A JPH01115494A JP26938187A JP26938187A JPH01115494A JP H01115494 A JPH01115494 A JP H01115494A JP 26938187 A JP26938187 A JP 26938187A JP 26938187 A JP26938187 A JP 26938187A JP H01115494 A JPH01115494 A JP H01115494A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- solid
- acid
- drainage
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims abstract description 35
- 239000000126 substance Substances 0.000 claims abstract description 24
- 239000002245 particle Substances 0.000 claims abstract description 17
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000007790 solid phase Substances 0.000 claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 4
- 239000002699 waste material Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 16
- 238000004065 wastewater treatment Methods 0.000 claims description 7
- 230000002378 acidificating effect Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract description 14
- 239000011787 zinc oxide Substances 0.000 abstract description 7
- 239000002253 acid Substances 0.000 abstract description 6
- 239000000843 powder Substances 0.000 abstract description 6
- 239000006228 supernatant Substances 0.000 abstract description 6
- 239000011701 zinc Substances 0.000 abstract description 5
- 239000008394 flocculating agent Substances 0.000 abstract description 4
- 238000005189 flocculation Methods 0.000 abstract description 4
- 230000016615 flocculation Effects 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 239000003513 alkali Substances 0.000 abstract 2
- 230000029219 regulation of pH Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000002351 wastewater Substances 0.000 description 8
- 238000001914 filtration Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000005345 coagulation Methods 0.000 description 4
- 230000015271 coagulation Effects 0.000 description 4
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 238000000975 co-precipitation Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000010979 pH adjustment Methods 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229960002089 ferrous chloride Drugs 0.000 description 1
- 244000144992 flock Species 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
Landscapes
- Removal Of Specific Substances (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ、産業上の利用分野
この発明は排液処理方法、特に避雷器用半導体製造の際
に排出される排液処理方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a method for treating waste liquid, particularly a method for treating waste liquid discharged during the manufacture of semiconductors for lightning arresters.
Ｂ０発明の概要
この発明は酸可溶の固相粒子を含む排液から該固相物質
を効率良く分離除去させるために、該排液に酸性物質を
添加して該排液のｐＨを２〜３とし、次にアルカリ性物
質を添加して該排液のｐＨを９〜１０とし、該排液中に
析出した水酸化物を分離除去するものである。B0 Summary of the Invention This invention aims to efficiently separate and remove solid phase substances from a waste liquid containing acid-soluble solid particles by adding an acidic substance to the waste liquid to adjust the pH of the waste liquid to 2-2. 3, and then an alkaline substance is added to adjust the pH of the waste liquid to 9 to 10, and the hydroxide precipitated in the waste liquid is separated and removed.
Ｃ８従来の技術
避雷器用の半導体素子（以下、単に「素子」という。）
は主剤及び添加剤からなる原料粉体を次の工程に従って
処理することにより製造されている。C8 Conventional technology Semiconductor element for lightning arrester (hereinafter simply referred to as "element")
is manufactured by processing raw material powder consisting of a main ingredient and additives according to the following steps.
混合工程−成型工程−仮焼工程−焼成工程−研摩工程→
メタライズ工程。Mixing process - Molding process - Calcination process - Firing process - Polishing process →
metallization process.
上記研摩工程においては素子の研摩が湿式で行なわれて
いるため、多量の有害金属を含んだ排液か排出される。In the above-mentioned polishing process, since the element is polished wet, a large amount of waste fluid containing harmful metals is discharged.
この排液の成分は酸化亜鉛、酸化ビスマス、酸化アンチ
モン、酸化マンガン、酸化ニッケル、酸化クロムなどで
ある。The components of this wastewater include zinc oxide, bismuth oxide, antimony oxide, manganese oxide, nickel oxide, and chromium oxide.
これらの物質のうちで公害上問題となるものとして酸化
亜鉛がある（酸化マンガンも公害上問題となるが、この
素子の場合は添加物であるので、特には問題とならない
。）。Among these substances, zinc oxide poses a pollution problem (manganese oxide also poses a pollution problem, but in the case of this element, it is not a particular problem because it is an additive).
この素子を製造する際に原料として使用している酸化亜
鉛は平均粒径０．５μｍ程度の微小粉体であるが、焼成
時に１０μｍ程度に結晶成長するため、研摩排液には１
０μｍ以上の粒子状物質が存在する。Zinc oxide, which is used as a raw material when manufacturing this element, is a fine powder with an average particle size of about 0.5 μm, but since the crystals grow to about 10 μm during firing, the polishing waste liquid contains
Particulate matter with a size of 0 μm or more is present.
現在のところ、これら排液の処理は粒子状物質が比較的
粗大であることから、急速ろ過による物理的な方法によ
って行なっている。At present, these waste liquids are treated by physical methods such as rapid filtration because the particulate matter is relatively coarse.
しかし、急速ろ過による物理的な方法でほろ材の目詰ま
りにより処理不良となることが少なくなく、ろ過装置の
管理が難しい。However, the physical method of rapid filtration often results in poor processing due to clogging of the filtration material, making it difficult to manage the filtration equipment.
ところで、有害金属の処理方法としては、一般に凝集沈
殿処理法がある。凝集沈殿処理法（以下「沈殿法」と略
する。）は、排液処理における最も重要な単一操作の一
つであり、原水（上澄液）と薬品との混合、粒子の成長
、粒子の分Ｄｒの三要素から成り立っている。By the way, as a method for treating harmful metals, there is generally a coagulation sedimentation treatment method. The coagulation-sedimentation treatment method (hereinafter abbreviated as "sedimentation method") is one of the most important single operations in wastewater treatment, and involves mixing raw water (supernatant liquid) with chemicals, particle growth, and It consists of three elements: Dr.
沈殿物は水中で安定なコロイド性粒子として分散してお
り、そのまま固液分離することは困難であり、この三要
素の中では粒子の成長が沈殿法における最も重要なファ
クターとなる。従って、固液分離を容易にするにはコロ
イド粒子を互いに凝集させて大粒の凝塊（以下、単に「
フロック」という。）にさせることが必要である。この
ため、排水処理には、通常、凝集剤が用いられてる。The precipitate is dispersed as stable colloidal particles in water, and it is difficult to separate solid-liquid as it is, and among these three factors, particle growth is the most important factor in the precipitation method. Therefore, in order to facilitate solid-liquid separation, colloidal particles should be aggregated together into large agglomerates (hereinafter simply referred to as "
It's called "flock". ). For this reason, flocculants are usually used in wastewater treatment.
Ｄ９発明が解決しようとする問題点
しかし、研摩時に生じる粒子は安定な非イオン性の粒子
であるため、凝集剤による凝集が困難であることが考え
られ、粒子の成長は望めないのではないかと考えられた
。D9 Problems to be solved by the invention However, since the particles generated during polishing are stable nonionic particles, it may be difficult to agglomerate them with a flocculant, and it may not be possible to expect the particles to grow. it was thought.
Ｅ１問題点を解決するための手段
この発明に係る排液処理方法は、酸可溶の固相粒子を含
む排液に酸性物質を添加して該排液のｐＨを２〜３とし
、次にアルカリ性物質を添加して該排液のｐＨを９〜１
０とし、該排液中に析出した水酸化物を分離除去するこ
とにより上記問題点を解決したものである。Means for Solving Problem E1 The wastewater treatment method according to the present invention includes adding an acidic substance to the wastewater containing acid-soluble solid phase particles to adjust the pH of the wastewater to 2 to 3, and then Add an alkaline substance to adjust the pH of the waste liquid to 9-1.
The above problem was solved by separating and removing the hydroxide precipitated in the waste liquid.
Ｆ９作用
酸可溶の固相粒子を含む排液に酸性物質を添加して該排
液のｐＨを２〜３とすると該固相粒子が溶解し、該固相
粒子が溶解した排液にアルカリ性物質を添加して該排液
のｐＨを９〜１０とすると該固相の水酸化物が析出し、
凝集沈殿する。When an acidic substance is added to the wastewater containing F9-acting acid-soluble solid phase particles to adjust the pH of the wastewater to 2 to 3, the solid phase particles are dissolved, and the wastewater in which the solid phase particles are dissolved becomes alkaline. When the pH of the waste liquid is adjusted to 9 to 10 by adding a substance, the hydroxide in the solid phase is precipitated,
Coagulate and precipitate.
Ｇ、実施例 以下、この発明の一実施例を第１図に沿って説明する。G. Example An embodiment of the present invention will be described below with reference to FIG.
■処理原水（上澄液）には研摩粉（素子）と研摩粉（−
船釣にはＳｉＣが広く利用されている）が混合されてい
るが、これらは原水槽（２）で重力沈降により固液分離
する。■The treated raw water (supernatant liquid) contains abrasive powder (element) and abrasive powder (-
(SiC is widely used for boat fishing) is mixed in, but these are separated into solid and liquid by gravity settling in the raw water tank (2).
■固液分離された上澄液を調整槽（４）に移し、硫酸な
どの酸性物質゛を添加し、液のｐＨを２〜３とし、浮遊
しているＺｎＯ微粉体を溶解させる。(2) Transfer the solid-liquid separated supernatant liquid to an adjustment tank (4), add an acidic substance such as sulfuric acid to adjust the pH of the liquid to 2 to 3, and dissolve the suspended ZnO fine powder.
（ＺｎＯ＋Ｈ２ＳＯ４→Ｚｎ”＋５０４−＋Ｈ２０）■
調整槽（４）の液を凝集槽（６）に移し、水酸化ナトリ
ウムを添加してｐＨを９〜１０とし、溶解しているＺｎ
〜を難溶性の水酸化物として析出させる。（Ｚｎ”＋２
０８−−＊ Ｚｎ （ＯＨ） ２ ）■凝集槽（６）の
排液を凝降槽（８）に移し、液中の凝集物を沈殿させて
固液分離し、上澄液はろ通塔（１０）で急速ろ過した後
、ｐＨ調整槽（１２）に移し、硫酸又は水酸化ナトリウ
ムを添加してｐＨを調整し、放流する。(ZnO+H2SO4→Zn"+504-+H20)■
The liquid in the adjustment tank (4) is transferred to the flocculation tank (6), and sodium hydroxide is added to adjust the pH to 9 to 10 to remove the dissolved Zn.
~ is precipitated as a sparingly soluble hydroxide. (Zn”+2
08--* Zn (OH) 2 ) ■ The waste liquid from the coagulation tank (6) is transferred to the coagulation tank (8), the aggregates in the liquid are precipitated and solid-liquid separation is carried out, and the supernatant liquid is passed through the filtration tower ( After rapid filtration in step 10), the solution is transferred to a pH adjustment tank (12), the pH is adjusted by adding sulfuric acid or sodium hydroxide, and the solution is discharged.
上記排水処理における上澄液と処理水中の有害物質の濃
度とその除去率を求めたところ、次の第１表に示すよう
になった。The concentrations of harmful substances and their removal rates in the supernatant liquid and treated water in the above wastewater treatment were determined, and the results are shown in Table 1 below.
第１表
尚、上記工程において発生した沈殿物（図中斜線で示す
）は脱水後、廃棄する。Table 1 Note that the precipitate generated in the above process (indicated by diagonal lines in the figure) is discarded after dehydration.
また、酸に不溶な物質については、共沈作用により沈降
させるが、本素子の場合は含有量が数％程度であること
と、急速ろ過によって除去できることから公害上の問題
はないと考えられる。Substances that are insoluble in acids are precipitated by coprecipitation, but in the case of this element, the content is only a few percent and it can be removed by rapid filtration, so there is no pollution problem.
Ｈ１発明の効果
この発明は上記のように構成したので以下のような優れ
た効果を奏する。H1 Effects of the Invention Since the present invention is configured as described above, it has the following excellent effects.
■非イオン性の物質を酸にて溶解させることによって、
従来の共沈作用を利用した方法より除去率を高くするこ
とができる。■By dissolving nonionic substances with acid,
The removal rate can be made higher than the conventional method using coprecipitation.
■共沈作用及び凝集作用を生じさせるべき物質として、
塩化第一鉄、硫酸バンドなどの無機凝集剤を適量添加し
ているが、定常的に動作しなかった場合、鉄などの金属
類が処理排液中に混入し、公害上の問題となることがあ
るが、この発明ではこれら無機凝集剤を添加しないため
、このような心配をする必要がない。■As a substance that should cause coprecipitation and flocculation,
Appropriate amounts of inorganic flocculants such as ferrous chloride and sulfuric acid are added, but if they do not operate regularly, metals such as iron may get mixed into the treated wastewater, causing a pollution problem. However, in the present invention, these inorganic flocculants are not added, so there is no need to worry about this.
■比重の大きな粒子も重力沈降によりスクリーニングす
るため、ろ過器などの複雑な処理施設か不要であり、ろ
過器の管理にともなう経費か不要となり、排液を低コス
トで処理できる。■Since particles with large specific gravity are screened by gravity sedimentation, there is no need for complex processing facilities such as filters, and the expense associated with managing filters is eliminated, allowing wastewater to be processed at low cost.
■素子成分が凝集剤として働くためミ凝集剤の添加が不
要であり、かつ凝集剤自体による公害上の問題がない。(2) Since the element components act as a flocculant, there is no need to add a flocculant, and there are no pollution problems caused by the flocculant itself.
凝集剤を使用しないことにより、凝集剤の調整が不要と
なり、排水処理施設のランニングコストを低くさせるこ
とができる。By not using a flocculant, there is no need to adjust the flocculant, and the running cost of the wastewater treatment facility can be lowered.
第１図はこの発明の一実施例を示す工程図である。
図において、（２）は原水槽、（４）は調整槽、（６）
は凝集槽、（８）は凝降槽、（１０）はろ通塔、（１２
）はｐＨ調整槽である。
代理人 弁理士 佐 藤 正 年FIG. 1 is a process diagram showing an embodiment of the present invention. In the figure, (2) is the raw water tank, (4) is the adjustment tank, and (6)
is a flocculation tank, (8) is a coagulation tank, (10) is a filter tower, (12)
) is a pH adjustment tank. Agent Patent Attorney Masatoshi Sato
Claims (4)
て該排液のｐＨを２〜３とし、次にアルカリ性物質を添
加して該排液のｐＨを９〜１０とし、該排液中に析出し
た水酸化物を分離除去することを特徴とする排液処理方
法。(1) Add an acidic substance to the effluent containing acid-soluble solid phase particles to adjust the pH of the effluent to 2 to 3, then add an alkaline substance to adjust the pH of the effluent to 9 to 10. A method for treating a waste liquid, which comprises separating and removing hydroxide precipitated in the waste liquid.
排液であることを特徴とする特許請求の範囲第１項に記
載の排液処理方法。(2) The waste liquid treatment method according to claim 1, wherein the waste liquid is a waste liquid discharged during manufacturing of semiconductors for lightning arresters.
請求の範囲第１項に記載の排液処理方法。(3) The wastewater treatment method according to claim 1, wherein the acidic substance is sulfuric acid.
とを特徴とする特許請求の範囲第１項に記載の排液処理
方法。(4) The wastewater treatment method according to claim 1, wherein the alkaline substance is sodium hydroxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26938187A JPH01115494A (en) | 1987-10-27 | 1987-10-27 | Treatment of drainage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26938187A JPH01115494A (en) | 1987-10-27 | 1987-10-27 | Treatment of drainage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01115494A true JPH01115494A (en) | 1989-05-08 |
Family
ID=17471615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26938187A Pending JPH01115494A (en) | 1987-10-27 | 1987-10-27 | Treatment of drainage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01115494A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011121039A (en) * | 2009-11-12 | 2011-06-23 | Panasonic Corp | Method for treating wastewater |
| JP2017013021A (en) * | 2015-07-03 | 2017-01-19 | 日立マクセル株式会社 | Device and method for removing heavy metal |
-
1987
- 1987-10-27 JP JP26938187A patent/JPH01115494A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011121039A (en) * | 2009-11-12 | 2011-06-23 | Panasonic Corp | Method for treating wastewater |
| JP2017013021A (en) * | 2015-07-03 | 2017-01-19 | 日立マクセル株式会社 | Device and method for removing heavy metal |
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