JPH01113374U - - Google Patents

Info

Publication number
JPH01113374U
JPH01113374U JP935888U JP935888U JPH01113374U JP H01113374 U JPH01113374 U JP H01113374U JP 935888 U JP935888 U JP 935888U JP 935888 U JP935888 U JP 935888U JP H01113374 U JPH01113374 U JP H01113374U
Authority
JP
Japan
Prior art keywords
disc
discharge path
ion laser
convex portion
concave portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP935888U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP935888U priority Critical patent/JPH01113374U/ja
Publication of JPH01113374U publication Critical patent/JPH01113374U/ja
Pending legal-status Critical Current

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  • Lasers (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案によるイオンレーザ管の好まし
い一態様を示す断面図、第2図は本考案に用いる
円盤状部材の断面図であり、第3図、第4図は従
来のイオンレーザ管を示す断面図である。 1……細管部品、2……放電路用貫通孔、3…
…円盤状部材、4……ガス帰還路用貫通孔、5…
…筒状接続部材、6……アノード、7,11……
端子部材、8……換気管、9,12……端部金属
部材、10……カソード、13……ブリユースタ
ー窓、14……低融点封着用ガラス。
FIG. 1 is a cross-sectional view showing a preferred embodiment of the ion laser tube according to the present invention, FIG. 2 is a cross-sectional view of a disc-shaped member used in the present invention, and FIGS. FIG. 1...Thin tube parts, 2...Through hole for discharge path, 3...
...Disc-shaped member, 4... Through hole for gas return path, 5...
...Cylindrical connecting member, 6...Anode, 7, 11...
Terminal member, 8... Ventilation pipe, 9, 12... End metal member, 10... Cathode, 13... Breustar window, 14... Low melting point sealing glass.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 放電路用貫通孔を備え、プラズマに対する耐ス
パツタ特性が良好な材質で形成された細管部品を
、ガス帰還路用の貫通孔を備え、非導電性かつ高
熱伝導性のセラミツク材料によつて形成された円
盤状部材の内側に収納して円盤状部材を連設する
ことにより放電路を形成し、該放電路の両側に陽
極と陰極とを設けたイオンレーザ管であつて、該
円盤状部材の各々は、その一方の面に中央部が隆
起した凸部を有し、他方の面に凹部を有し、該凸
部と該凹部とを嵌合して連設され、該凸部又は凹
部が前記細管部品の端面に接するかあるいはその
近傍にまで達していることを特徴とするイオンレ
ーザ管。
A thin tube part with a through hole for the discharge path and made of a material with good spatter resistance against plasma, and a through hole for the gas return path and made of a non-conductive and highly thermally conductive ceramic material. The ion laser tube is an ion laser tube in which a discharge path is formed by storing the disc-shaped member inside a disc-shaped member and connecting the disc-shaped members in a row, and an anode and a cathode are provided on both sides of the discharge path. Each has a convex portion with a raised central portion on one surface and a concave portion on the other surface, and the convex portion and the concave portion are fitted and connected, and the convex portion or the concave portion is connected to each other. An ion laser tube that is in contact with or near the end surface of the thin tube component.
JP935888U 1988-01-26 1988-01-26 Pending JPH01113374U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP935888U JPH01113374U (en) 1988-01-26 1988-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP935888U JPH01113374U (en) 1988-01-26 1988-01-26

Publications (1)

Publication Number Publication Date
JPH01113374U true JPH01113374U (en) 1989-07-31

Family

ID=31216038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP935888U Pending JPH01113374U (en) 1988-01-26 1988-01-26

Country Status (1)

Country Link
JP (1) JPH01113374U (en)

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