JPS6437069U - - Google Patents
Info
- Publication number
- JPS6437069U JPS6437069U JP13256387U JP13256387U JPS6437069U JP S6437069 U JPS6437069 U JP S6437069U JP 13256387 U JP13256387 U JP 13256387U JP 13256387 U JP13256387 U JP 13256387U JP S6437069 U JPS6437069 U JP S6437069U
- Authority
- JP
- Japan
- Prior art keywords
- thin tube
- ion laser
- gas return
- cylindrical connecting
- return hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案によるイオンレーザ管の一実施
例の縦断面図であり、第２図は従来のイオンレー
ザ管の縦断面図であり、第３図は外囲部材と細管
路用部品の部分を示す断面図である。
主な参照番号、１……細管用部品、２……放電
路孔、３……ガス帰還用孔、４……外囲部材、５
……筒状接続部材、６……放電路部、７ａ，７ｂ
……端部金属部材、８……アノード、９……カソ
ード、１０ａ，１０ｂ……ブリユースタ窓、１１
……導入棒、１２ａ，１２ｂ……窓支持筒、１４
……排気口。
FIG. 1 is a longitudinal sectional view of an embodiment of the ion laser tube according to the present invention, FIG. 2 is a longitudinal sectional view of a conventional ion laser tube, and FIG. It is a sectional view showing a part. Main reference numbers, 1... Thin tube parts, 2... Discharge path hole, 3... Gas return hole, 4... Enclosing member, 5
... Cylindrical connection member, 6 ... Discharge path section, 7a, 7b
... End metal member, 8 ... Anode, 9 ... Cathode, 10a, 10b ... Brieusta window, 11
...Introduction rod, 12a, 12b...Window support tube, 14
……exhaust port.
Claims (1)
性が良好な材料で形成された細管用部材と、該細
管部材を中央部に装着するとともにガス帰還用孔
を備えてる非導電性かつ高熱伝導性のセラミツク
材料によつて形成された外囲部材と、該外囲部材
のガス帰還用孔を内包する筒状接続部材とを有し
、上記外囲部材と上記筒状接続部材とが交互にか
つ気密に必要個数接続配置されているイオンレー
ザ管において、前記細管用部材が、隣接する外囲
部材に接するかまたはその近傍にまで達する突起
部を備えていることを特徴とするイオンレーザ管
。 A thin tube member having a discharge path hole and made of a material with good spatter resistance against plasma, and a non-conductive and highly thermally conductive ceramic material having the thin tube member mounted in the center and having a gas return hole. and a cylindrical connecting member that includes a gas return hole of the outer surrounding member, and the outer surrounding member and the cylindrical connecting member are arranged alternately and airtightly. An ion laser tube in which a number of ion laser tubes are connected and arranged, wherein the thin tube member is provided with a protrusion that comes into contact with or near an adjacent surrounding member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13256387U JPS6437069U (en) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13256387U JPS6437069U (en) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437069U true JPS6437069U (en) | 1989-03-06 |
Family
ID=31389636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13256387U Pending JPS6437069U (en) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437069U (en) |
-
1987
- 1987-08-31 JP JP13256387U patent/JPS6437069U/ja active Pending