JPH01112125A - Strain detector - Google Patents

Strain detector

Info

Publication number
JPH01112125A
JPH01112125A JP27116587A JP27116587A JPH01112125A JP H01112125 A JPH01112125 A JP H01112125A JP 27116587 A JP27116587 A JP 27116587A JP 27116587 A JP27116587 A JP 27116587A JP H01112125 A JPH01112125 A JP H01112125A
Authority
JP
Japan
Prior art keywords
magnetic layer
adhesive
passive shaft
magnetic
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27116587A
Other languages
Japanese (ja)
Inventor
Hiroshi Sato
博 佐藤
Yoshihiko Utsui
良彦 宇津井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27116587A priority Critical patent/JPH01112125A/en
Priority to PCT/JP1988/000727 priority patent/WO1989000770A1/en
Priority to US07/346,112 priority patent/US4954215A/en
Publication of JPH01112125A publication Critical patent/JPH01112125A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

PURPOSE:To preclude an irregularity in coating and the involution of an air bubble, to make the thickness of an adhesive uniform, and to improve the output characteristics and temperature characteristics by adhering a magnetic layer to a passive shaft with a filmy adhesive formed by impregnating a net type member with resin. CONSTITUTION:The magnetic layer 5(6) is adhered to the passive shaft 1 with the filmy adhesive 16 formed by impregnating the nonmagnetic net type member 17 with the epoxy resin 18. The filmy adhesive 16 is only arranged between the passive shaft 1 and magnetic layer 5(6) and need not be applied. Then neither an irregularity in coating nor the involution of an air bubble is caused. The net type member 17 serves as a spacer and the thickness of the adhesive 18 is held uniform. Then the transmission of stress from the passive shaft 1 to the magnetic layer 5(6) is improved and the detection sensitivity is improved. Further, the linearity of the temperature characteristics and output characteristics is improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は歪検出器に関するものである。[Detailed description of the invention] [Industrial application field] This invention relates to a distortion detector.

〔従来の技術〕[Conventional technology]

第2図は従来の歪検出器の構成を示し、1は回転軸から
なる受動軸、2は受動軸1の中心軸、3゜4は受動軸1
を回転自在に支持する軸受である。
Figure 2 shows the configuration of a conventional strain detector, where 1 is a passive shaft consisting of a rotating shaft, 2 is the central axis of the passive shaft 1, and 3°4 is the passive shaft 1.
This is a bearing that rotatably supports the

受動軸lの外周には高磁歪材例えばアモルファス高磁歪
材からなる第1及び第2の磁性層5.6が固着きれる。
First and second magnetic layers 5.6 made of a high magnetostrictive material, such as an amorphous high magnetostrictive material, are firmly fixed to the outer periphery of the passive shaft l.

第1の磁性層5は中心軸2に対して+45度方向に、第
2の磁性層6は中心軸2に対して一45度方向にそれぞ
れ細長く複数条形成されている。又、各磁性層5.6の
外周には円筒状のコイルポビン7が受動軸1と同軸状に
配役はれる。コイルボビン7の外周には第1及び第2の
検出コイル8.9が巻装され、各検出コイル8.9は図
示しない検出回路に接続式ねる。
The first magnetic layer 5 is formed in a plurality of elongated strips in a direction of +45 degrees with respect to the central axis 2, and the second magnetic layer 6 is formed in a plurality of strips in a direction of -45 degrees with respect to the central axis 2. Further, a cylindrical coil pobbin 7 is arranged coaxially with the passive shaft 1 on the outer periphery of each magnetic layer 5.6. First and second detection coils 8.9 are wound around the outer periphery of the coil bobbin 7, and each detection coil 8.9 is connected to a detection circuit (not shown).

上記構成において、受動軸1に外部からトルクが印加さ
れると、各磁性層5.6の一方に引張力が発生するとと
もに他方に圧縮力が発生し、歪が生じる。この歪によシ
透磁率が変化し、引張力による場合と圧縮力による場合
では透磁率が逆方向に変化する。検出コイル8.9は透
磁率の変化を磁気的インピーダンスの変化として検出し
、検出回路は検出コイル8.9の出力を入力され、受動
軸1の歪量に応じた検出電圧を出力する。
In the above configuration, when torque is applied to the passive shaft 1 from the outside, a tensile force is generated in one of the magnetic layers 5, 6, and a compressive force is generated in the other, resulting in distortion. The magnetic permeability changes due to this strain, and the magnetic permeability changes in opposite directions depending on whether the tensile force is applied or the compressive force is applied. The detection coil 8.9 detects a change in magnetic permeability as a change in magnetic impedance, and the detection circuit receives the output of the detection coil 8.9 and outputs a detection voltage corresponding to the amount of strain on the passive shaft 1.

第3図(a)〜(d)け従来の磁性層の形成方法を示し
、まず(al図に示すように磁性層(磁性材薄帯)5゜
6の裏面に接着剤JOを塗布し、この磁性層5゜6を(
b)図に示すように受動軸1の周囲に巻回して接着する
。次に、(C)図に示すようにオートクレーブ法または
加圧法によシ磁性層5.6全加圧し、この加圧状態で加
熱硬化サセる。オートクレーブ法では(c)図の上半部
に示すように磁性層5.6の外周側をチューブ11で榎
い、チューブ11内を排気によシ減圧し、大気圧との差
圧にょシ出性層5.6を加圧する。又、加圧法ではチュ
ーブ11の外側ヲサらにカバー12で覆い、このカバー
12内に給気して圧力全大気圧より高めて磁性層5゜6
全加圧する。この加圧状態で接着剤10を加熱硬化させ
たのち、エツチングにより磁性層5.6の選択除去処理
を行い、(d)図に示すようなシェブロンノミターンの
磁性層5.6f得る。
Figures 3(a) to 3(d) show the conventional method of forming a magnetic layer. First, as shown in figure al, an adhesive JO is applied to the back surface of the magnetic layer (magnetic material ribbon) 5.6, This magnetic layer 5°6 (
b) Wrap it around the passive shaft 1 and glue it as shown in the figure. Next, as shown in Figure (C), the entire magnetic layer 5.6 is pressurized by an autoclave method or a pressurizing method, and the magnetic layer is heated and cured in this pressurized state. In the autoclave method (c), as shown in the upper half of the figure, the outer periphery of the magnetic layer 5.6 is covered with a tube 11, the pressure inside the tube 11 is reduced by exhaust, and the differential pressure with atmospheric pressure is released. Pressurize layer 5.6. In addition, in the pressurization method, the outer side of the tube 11 is covered with a cover 12, and air is supplied into the cover 12 to raise the pressure above the total atmospheric pressure to create a magnetic layer of 5°6.
Apply full pressure. After the adhesive 10 is heated and cured in this pressurized state, the magnetic layer 5.6 is selectively removed by etching to obtain a chevron-shaped magnetic layer 5.6f as shown in FIG.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

し力)シながら、上記した従来の歪検出器におい”li
:、$4図(幻、(b)に示すようにスキージ(へら)
13により磁性層5.6に接着剤10を塗布する場合に
気泡14を巻き込んだり、あるいは接着剤10の厚さに
むらを生じた。このため、第5図(a)。
However, the conventional strain detector described above
:, $4 figure (phantom, squeegee (spatula) as shown in (b)
13, when applying the adhesive 10 to the magnetic layer 5.6, air bubbles 14 were drawn in or the thickness of the adhesive 10 was uneven. For this reason, FIG. 5(a).

(b)に示すように磁性層5.6の裏面側や周辺の接着
剤10中に巻込み気泡】4あるいは加熱硬fヒ時の反応
ガスによる気泡15が生じ、接着面積が小さくなって磁
性層5.6の接着強度が弱くなった。
As shown in (b), air bubbles 15 are generated by the reaction gas during heating and hardening, and the bonding area becomes smaller, causing the magnetic layer to become magnetic. The adhesive strength of layer 5.6 became weaker.

又、応力伝播性が低下して感度が低下した。ざらに、接
着剤10の厚さが均一でないために残留熱応力などの温
度特性及び出力特性の直線性が低下した。
In addition, the stress propagation property was lowered and the sensitivity was lowered. In general, since the thickness of the adhesive 10 was not uniform, the linearity of temperature characteristics such as residual thermal stress and output characteristics deteriorated.

この発明は上記のような問題点を解決するために成され
たものであり、磁性層の接着強度及び感度を向上すると
ともに、出力特性及び温度特性を向上することができる
歪検出器ヲ得ること全目的とする。
This invention has been made to solve the above-mentioned problems, and it is an object of the present invention to obtain a strain detector that can improve the adhesive strength and sensitivity of the magnetic layer, as well as improve the output characteristics and temperature characteristics. For all purposes.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る歪検出器・は、磁性層をネット状部材に
樹脂を含浸させたフィルム状接着剤を介して受動軸に接
着したものである。
The strain detector according to the present invention has a magnetic layer bonded to a passive shaft via a film adhesive made of a net-like member impregnated with resin.

〔作 用〕[For production]

この発明に係る磁性層はネット状部材に樹脂を含浸ざぜ
たフィルム状接着剤金介して受動軸に接着されており、
フィルム状接着剤は予めフィルム状になっているので受
動TlIh&磁性層の間に配置するだけで良く塗布する
必要がない。このため、塗布むらや気泡の巻き込みは生
じない。又、ネット状部材はスペーサの役目全し、接着
剤の浮式は均一に保たノア、る。
The magnetic layer according to the present invention is bonded to the passive shaft through a film-like adhesive metal made of a net-like member impregnated with resin,
Since the film adhesive is already in the form of a film, it can be simply placed between the passive TlIh & magnetic layer and does not need to be coated. Therefore, uneven coating and inclusion of air bubbles do not occur. In addition, the net-like member serves as a spacer, and the floating adhesive is maintained uniformly.

〔実施例〕〔Example〕

以下、この発明の実施例を図面とともVこ説明する。こ
の実施例においてd:、第1図(alに示すようxat
g−層5,6をフィルム状接着剤16を介して受動11
+ ]に接着する。フィルム状接着剤J6は第1図(b
lに示すように非磁性のネット状部材17にエポキシ樹
脂]8を含浸ざセたものであり、予めフィルム状となっ
ている。従って、フィルム状接着剤】6を磁性層5.6
丑たは受動軸1に接着した状態で磁性層5.6を受動軸
1に巻き付け、この両者全フィルム状接着剤16を介し
て相互に接着する。その後は従来同様にオートクレーブ
法あるいは加圧法により磁性層5.6全受動軸IK加圧
し、この状態でフィルム状接着剤16を加熱硬fヒさせ
る。最後にエツチングにより磁性層5.6の選択除去処
理全行い、シェブロン形状の磁性層5.6を形成する。
Embodiments of the present invention will be described below with reference to the drawings. In this example, d:, xat as shown in FIG.
G-layers 5 and 6 are bonded to the passive layer 11 via a film adhesive 16.
+ ]. Film adhesive J6 is shown in Figure 1 (b
As shown in FIG. 1, a non-magnetic net-like member 17 is impregnated with an epoxy resin 8, and is in the form of a film in advance. Therefore, the film adhesive] 6 is replaced by the magnetic layer 5.6.
The magnetic layer 5.6 is wound around the passive shaft 1 while being adhered to the passive shaft 1, and both are adhered to each other via the film adhesive 16. Thereafter, the entire magnetic layer 5 and 6 are subjected to IK pressure using an autoclave method or a pressure method as in the conventional method, and in this state, the film adhesive 16 is heated and hardened. Finally, the magnetic layer 5.6 is selectively removed by etching to form a chevron-shaped magnetic layer 5.6.

この実施例においては、接着剤16は予めフィルム状部
なっているので磁性層5.6及び受動軸1に単に接着す
るだけで良く、塗布する必巣はない。従って、塗布むら
や気泡の巻込みは生じず、接着面積の増大により接着強
度及び感度が上昇する。又、ネット状部材がスペーサの
役目を果すので接着剤10の厚さが均一(±5%以下)
になり、出力特性及び温度%性も均一になる。
In this embodiment, since the adhesive 16 is already in the form of a film, it is sufficient to simply adhere it to the magnetic layer 5.6 and the passive shaft 1, and there is no need to apply it. Therefore, uneven coating and inclusion of air bubbles do not occur, and the adhesive strength and sensitivity increase due to the increased adhesive area. In addition, since the net-like member serves as a spacer, the thickness of the adhesive 10 is uniform (±5% or less).
This results in uniform output characteristics and temperature characteristics.

なお、接着剤16を接着する前にエポキシ樹脂などを受
動軸1及び磁性層5.6の双方に塗布しておく(ゾライ
マ処理)と、接着を円滑に行うことができる。又、ネッ
ト状部材17を非磁性としたのは、検出コイル8.9の
通電によシ発生した磁束が接着剤16中を流れることに
より磁性層5゜6に流れる磁束が減少し、感度が低下す
るのを防ぐためである。
Note that if an epoxy resin or the like is applied to both the passive shaft 1 and the magnetic layer 5.6 (Zolaima treatment) before bonding the adhesive 16, the bonding can be performed smoothly. The reason why the net-like member 17 is made non-magnetic is that the magnetic flux generated by energizing the detection coil 8.9 flows through the adhesive 16, reducing the magnetic flux flowing to the magnetic layer 5.6, thereby reducing the sensitivity. This is to prevent it from decreasing.

第6図(a)〜(c)はこの発明の第2の実施例を示し
、この実施例では受動軸1における磁性層5.6の接着
部分、特に最終的な接着部分の周囲に凹部1aを設けて
いる。この場合、まず第6図(a)に示すように、受動
軸lにフィルム状接着剤16を介して磁性層5.6を巻
き付け、さらに磁性層5.6の外側にチューブ11を配
設し、オートクレーブ法によシ磁性層5.6yt加圧す
る。この状態で第6図(b)に示すように加熱硬化処理
全行うと、硬化する前に流動状態になった接着剤16の
エポキシ樹脂18は凹部1aに流入する。接着剤16の
厚さtはネット状部材17によ)確保される。次に、第
6図(C)に示すように磁性層5.6の凹部1a上にあ
る部分5a、6a′f!:エツチングによシ除去し、シ
ェブロン状の磁性層5.6を得る。
6(a) to 6(c) show a second embodiment of the present invention, in which a recess 1a is formed around the adhesive portion of the magnetic layer 5.6 on the passive shaft 1, especially around the final adhesive portion. has been established. In this case, first, as shown in FIG. 6(a), the magnetic layer 5.6 is wound around the passive shaft l via the film adhesive 16, and the tube 11 is further arranged outside the magnetic layer 5.6. , a magnetic layer of 5.6 yt was pressurized by an autoclave method. When the entire heat curing process is performed in this state as shown in FIG. 6(b), the epoxy resin 18 of the adhesive 16, which has become fluid before being cured, flows into the recess 1a. The thickness t of the adhesive 16 is ensured by the net-like member 17). Next, as shown in FIG. 6(C), the portions 5a, 6a'f! of the magnetic layer 5.6 located above the recess 1a! : Removed by etching to obtain a chevron-shaped magnetic layer 5.6.

第7図(a) 、 (b)は凹部1aの形成の2例を示
し、第7図(aJでは凹部1aを磁性層5.6の最終的
な接着部分の周囲に相互に連結してハシゴ状に設けてお
)、第7図6)では最終的な接着部分の周囲にのみ環状
に設けている。
FIGS. 7(a) and 7(b) show two examples of the formation of the recesses 1a, and in FIG. In FIG. 7 6), it is provided in an annular shape only around the final bonded part.

この第2の実施例は第1の実施例の欠点を補うものであ
シ、即ち第1の実施例では第1図(a)のように余剰の
エポキシ樹脂]8の逃げ場がないため磁性層5,6の端
部などで接着剤16の厚さが厚くなったが、この実施例
では余剰のエポキシ樹脂18は凹部1aに流入するので
接着剤16の厚さの均一性は容易に保持される。
This second embodiment is intended to compensate for the shortcomings of the first embodiment. In other words, in the first embodiment, as shown in FIG. Although the thickness of the adhesive 16 becomes thicker at the ends of 5 and 6, in this embodiment, the excess epoxy resin 18 flows into the recess 1a, so the uniformity of the thickness of the adhesive 16 is easily maintained. Ru.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、磁性層に対して接着剤
を塗布する必要がなくなったので、塗布むらや気泡の巻
き込みが生じず接着面積が大きくなシ、接着強度が大き
ぐなシ、信頼性が向上する。
As described above, according to the present invention, there is no need to apply adhesive to the magnetic layer, so uneven coating and air bubbles do not occur, and the adhesive area is large and the adhesive strength is high. Improved reliability.

又、受動軸から磁性層への応力の伝播性が向上し、検出
感度が向上する。さらに、接着剤におけるネット状部材
がスペーサの役目をするので接着剤の厚さが均一となシ
、残留熱応力などの温度特性及び出力特性の直線性が向
上する。
Furthermore, the propagation of stress from the passive shaft to the magnetic layer is improved, and detection sensitivity is improved. Furthermore, since the net-like member in the adhesive acts as a spacer, the thickness of the adhesive is uniform, and the linearity of temperature characteristics such as residual thermal stress and output characteristics are improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)はこの発明の第1の実施例におけ
る歪検出器の要部断面図及びフィルム状接着剤の説明図
、第2図は歪検出器の断面図、M3図(a)〜(d)は
従来における磁性層の製造方法の説明図、第4図(a)
、(blは従来における接着剤塗布状態を示すf+視図
及び側面図、第5図(a)、 (b)は従来の磁性層部
分の正面図及びそのA部拡大図、第6図(a)〜(c)
はこの発明の第2の実施例における磁性層の製造方法の
説明図、第79(a)、(bJはこの発明のM2の実施
例における受動軸の凹部形成状態の説明図である。 1・・・受動軸、1a・・・凹部、5.6・・・磁性層
、8゜9・・・検出コイル、16・・・フィルム状接着
剤、17・・・ネット状部材、18・・・エポキシ樹脂
。 尚、図中同一符号は同−又は相当部分を示す。 代理人   大  岩  増  雄 美’9        Jlビ
FIGS. 1(a) and (b) are sectional views of essential parts of a strain detector and an explanatory diagram of a film adhesive in the first embodiment of the present invention, FIG. 2 is a sectional view of the strain detector, and FIG. (a) to (d) are explanatory diagrams of the conventional method of manufacturing a magnetic layer, and Fig. 4 (a)
, (bl is an f+ view and side view showing the conventional adhesive application state, FIGS. 5(a) and 5(b) are a front view and an enlarged view of part A of the conventional magnetic layer portion, and FIG. 6(a) )~(c)
79(a) and 79(b) are explanatory diagrams of the method of manufacturing the magnetic layer in the second embodiment of the present invention, and (bJ are explanatory diagrams of the state of formation of the recessed portion of the passive shaft in the embodiment of M2 of the present invention.1. ...Passive shaft, 1a...Recess, 5.6...Magnetic layer, 8°9...Detection coil, 16...Film-like adhesive, 17...Net-like member, 18... Epoxy resin. In addition, the same reference numerals in the drawings indicate the same or corresponding parts. Agent Masu Oiwa '9 Jl Bi

Claims (2)

【特許請求の範囲】[Claims] (1)応力を受ける受動軸と、この受動軸の外周上に固
着された高磁歪率の磁性層と、磁性層の周囲に配設され
、磁性層の上記応力に応じた歪による透磁率変化を検出
する検出コイルを備えた歪検出器において、磁性層をネ
ット状部材に樹脂を含浸させたフィルム状接着剤を介し
て受動軸に接着したことを特徴とする歪検出器。
(1) A passive shaft that is subjected to stress, a magnetic layer with a high magnetostriction fixed on the outer periphery of the passive shaft, and a change in magnetic permeability due to strain in the magnetic layer that is arranged around the magnetic layer in response to the stress. What is claimed is: 1. A strain detector equipped with a detection coil for detecting , characterized in that a magnetic layer is adhered to a passive shaft via a film-like adhesive in which a net-like member is impregnated with resin.
(2)上記受動軸における磁性層の接着部分の周囲に凹
部を設けたことを特徴とする特許請求の範囲第1項記載
の歪検出器。
(2) The strain detector according to claim 1, wherein a recess is provided around the adhesive portion of the magnetic layer on the passive shaft.
JP27116587A 1987-07-21 1987-10-26 Strain detector Pending JPH01112125A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP27116587A JPH01112125A (en) 1987-10-26 1987-10-26 Strain detector
PCT/JP1988/000727 WO1989000770A1 (en) 1987-07-21 1988-07-20 Production of stress sensor
US07/346,112 US4954215A (en) 1987-07-21 1988-07-20 Method for manufacture stress detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27116587A JPH01112125A (en) 1987-10-26 1987-10-26 Strain detector

Publications (1)

Publication Number Publication Date
JPH01112125A true JPH01112125A (en) 1989-04-28

Family

ID=17496244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27116587A Pending JPH01112125A (en) 1987-07-21 1987-10-26 Strain detector

Country Status (1)

Country Link
JP (1) JPH01112125A (en)

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