JPH01112043U - - Google Patents

Info

Publication number
JPH01112043U
JPH01112043U JP678688U JP678688U JPH01112043U JP H01112043 U JPH01112043 U JP H01112043U JP 678688 U JP678688 U JP 678688U JP 678688 U JP678688 U JP 678688U JP H01112043 U JPH01112043 U JP H01112043U
Authority
JP
Japan
Prior art keywords
chamber
dust collection
electrostatic dust
load chamber
collection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP678688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP678688U priority Critical patent/JPH01112043U/ja
Publication of JPH01112043U publication Critical patent/JPH01112043U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Semiconductors (AREA)
JP678688U 1988-01-21 1988-01-21 Pending JPH01112043U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP678688U JPH01112043U (US07655688-20100202-C00086.png) 1988-01-21 1988-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP678688U JPH01112043U (US07655688-20100202-C00086.png) 1988-01-21 1988-01-21

Publications (1)

Publication Number Publication Date
JPH01112043U true JPH01112043U (US07655688-20100202-C00086.png) 1989-07-27

Family

ID=31211246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP678688U Pending JPH01112043U (US07655688-20100202-C00086.png) 1988-01-21 1988-01-21

Country Status (1)

Country Link
JP (1) JPH01112043U (US07655688-20100202-C00086.png)

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