JPH01112039U - - Google Patents

Info

Publication number
JPH01112039U
JPH01112039U JP586188U JP586188U JPH01112039U JP H01112039 U JPH01112039 U JP H01112039U JP 586188 U JP586188 U JP 586188U JP 586188 U JP586188 U JP 586188U JP H01112039 U JPH01112039 U JP H01112039U
Authority
JP
Japan
Prior art keywords
axis slider
axis
piston
guide rail
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP586188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517876Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP586188U priority Critical patent/JPH0517876Y2/ja
Publication of JPH01112039U publication Critical patent/JPH01112039U/ja
Application granted granted Critical
Publication of JPH0517876Y2 publication Critical patent/JPH0517876Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP586188U 1988-01-22 1988-01-22 Expired - Lifetime JPH0517876Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP586188U JPH0517876Y2 (enExample) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP586188U JPH0517876Y2 (enExample) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112039U true JPH01112039U (enExample) 1989-07-27
JPH0517876Y2 JPH0517876Y2 (enExample) 1993-05-13

Family

ID=31209603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP586188U Expired - Lifetime JPH0517876Y2 (enExample) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0517876Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134729A (ja) * 2000-06-02 2007-05-31 Asml Netherlands Bv リソグラフィ投影装置、支持アセンブリ、およびデバイス製造方法
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134729A (ja) * 2000-06-02 2007-05-31 Asml Netherlands Bv リソグラフィ投影装置、支持アセンブリ、およびデバイス製造方法
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure

Also Published As

Publication number Publication date
JPH0517876Y2 (enExample) 1993-05-13

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