JPH01110259U - - Google Patents
Info
- Publication number
- JPH01110259U JPH01110259U JP490588U JP490588U JPH01110259U JP H01110259 U JPH01110259 U JP H01110259U JP 490588 U JP490588 U JP 490588U JP 490588 U JP490588 U JP 490588U JP H01110259 U JPH01110259 U JP H01110259U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- furnace
- vacuum
- reaction gas
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 3
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Chemical Vapour Deposition (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Details (AREA)
Description
第１図は本考案の一実施例における排ガスライ
ンの系統図、第２図は他の実施例の系統図、第３
図は従来の排ガスラインの系統図である。
１０……炉体、１１……配管（排ガスライン）
、１２……真空排気装置、１４……配管（反応ガ
ス導入ライン）。
Fig. 1 is a system diagram of an exhaust gas line in one embodiment of the present invention, Fig. 2 is a system diagram of another embodiment, and Fig. 3 is a system diagram of an exhaust gas line in one embodiment of the present invention.
The figure is a system diagram of a conventional exhaust gas line. 10...Furnace body, 11...Piping (exhaust gas line)
, 12... Vacuum exhaust device, 14... Piping (reactive gas introduction line).
Claims (1)
インの途中に、前記排ガス中に含まれる有害成分
と反応してその成分を無害化する反応ガスを導入
するための反応ガス導入ラインを接続したことを
特徴とする真空炉における炉排ガスの処理構造。 A reaction gas introduction line is connected in the middle of the exhaust gas line from the furnace body of the vacuum furnace to the vacuum evacuation device for introducing a reaction gas that reacts with harmful components contained in the exhaust gas and renders the components harmless. Furnace exhaust gas processing structure in a vacuum furnace characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP490588U JPH01110259U (en) | 1988-01-19 | 1988-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP490588U JPH01110259U (en) | 1988-01-19 | 1988-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110259U true JPH01110259U (en) | 1989-07-25 |
Family
ID=31207826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP490588U Pending JPH01110259U (en) | 1988-01-19 | 1988-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110259U (en) |
-
1988
- 1988-01-19 JP JP490588U patent/JPH01110259U/ja active Pending
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