JPH01108930U - - Google Patents
Info
- Publication number
- JPH01108930U JPH01108930U JP318188U JP318188U JPH01108930U JP H01108930 U JPH01108930 U JP H01108930U JP 318188 U JP318188 U JP 318188U JP 318188 U JP318188 U JP 318188U JP H01108930 U JPH01108930 U JP H01108930U
- Authority
- JP
- Japan
- Prior art keywords
- large number
- reaction chamber
- upper electrode
- electrodes
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP318188U JPH01108930U (ko) | 1988-01-14 | 1988-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP318188U JPH01108930U (ko) | 1988-01-14 | 1988-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108930U true JPH01108930U (ko) | 1989-07-24 |
Family
ID=31204586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP318188U Pending JPH01108930U (ko) | 1988-01-14 | 1988-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108930U (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04225797A (ja) * | 1990-04-27 | 1992-08-14 | Internatl Business Mach Corp <Ibm> | 対流冷却システム |
| JP2007525021A (ja) * | 2003-11-19 | 2007-08-30 | アプライド マテリアルズ インコーポレイテッド | 排気アパーチャーを特徴とするガス分配シャワーヘッド |
| JP2012209456A (ja) * | 2011-03-30 | 2012-10-25 | Toray Ind Inc | プラズマ処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6059078A (ja) * | 1983-09-12 | 1985-04-05 | Nec Corp | ドライエツチング装置 |
-
1988
- 1988-01-14 JP JP318188U patent/JPH01108930U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6059078A (ja) * | 1983-09-12 | 1985-04-05 | Nec Corp | ドライエツチング装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04225797A (ja) * | 1990-04-27 | 1992-08-14 | Internatl Business Mach Corp <Ibm> | 対流冷却システム |
| JP2007525021A (ja) * | 2003-11-19 | 2007-08-30 | アプライド マテリアルズ インコーポレイテッド | 排気アパーチャーを特徴とするガス分配シャワーヘッド |
| JP2012209456A (ja) * | 2011-03-30 | 2012-10-25 | Toray Ind Inc | プラズマ処理装置 |