JPS62157138U - - Google Patents

Info

Publication number
JPS62157138U
JPS62157138U JP4562386U JP4562386U JPS62157138U JP S62157138 U JPS62157138 U JP S62157138U JP 4562386 U JP4562386 U JP 4562386U JP 4562386 U JP4562386 U JP 4562386U JP S62157138 U JPS62157138 U JP S62157138U
Authority
JP
Japan
Prior art keywords
sample holder
sample
electrode
gas supply
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4562386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729631Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986045623U priority Critical patent/JPH0729631Y2/ja
Publication of JPS62157138U publication Critical patent/JPS62157138U/ja
Application granted granted Critical
Publication of JPH0729631Y2 publication Critical patent/JPH0729631Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1986045623U 1986-03-27 1986-03-27 ドライエッチング装置 Expired - Lifetime JPH0729631Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986045623U JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986045623U JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Publications (2)

Publication Number Publication Date
JPS62157138U true JPS62157138U (ko) 1987-10-06
JPH0729631Y2 JPH0729631Y2 (ja) 1995-07-05

Family

ID=30864528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986045623U Expired - Lifetime JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Country Status (1)

Country Link
JP (1) JPH0729631Y2 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60206027A (ja) * 1984-03-30 1985-10-17 Hitachi Ltd プラズマ処理装置
JPS6127334U (ja) * 1984-07-24 1986-02-18 日本電気株式会社 ドライエツチング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60206027A (ja) * 1984-03-30 1985-10-17 Hitachi Ltd プラズマ処理装置
JPS6127334U (ja) * 1984-07-24 1986-02-18 日本電気株式会社 ドライエツチング装置

Also Published As

Publication number Publication date
JPH0729631Y2 (ja) 1995-07-05

Similar Documents

Publication Publication Date Title
JPS62157138U (ko)
JPH0320439U (ko)
JPS6237932U (ko)
JPH0313733U (ko)
JPS6363606U (ko)
JPS61199039U (ko)
JPS6424828U (ko)
JPS6192052U (ko)
JPH02121194U (ko)
JPS62152437U (ko)
JPS62170762U (ko)
JPS6157517U (ko)
JPH02113330U (ko)
JPH0171439U (ko)
JPH01154871U (ko)
JPS62154648U (ko)
JPS6186461U (ko)
JPH0167738U (ko)
JPH0178024U (ko)
JPH0380364U (ko)
JPS61136537U (ko)
JPS63177957U (ko)
JPS63136327U (ko)
JPS6373351U (ko)
JPS6437040U (ko)