JPH01107997U - - Google Patents
Info
- Publication number
- JPH01107997U JPH01107997U JP1988003026U JP302688U JPH01107997U JP H01107997 U JPH01107997 U JP H01107997U JP 1988003026 U JP1988003026 U JP 1988003026U JP 302688 U JP302688 U JP 302688U JP H01107997 U JPH01107997 U JP H01107997U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- hinge
- piezo element
- piezo
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Machine Tool Units (AREA)
- Lasers (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988003026U JPH01107997U (it) | 1988-01-12 | 1988-01-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988003026U JPH01107997U (it) | 1988-01-12 | 1988-01-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01107997U true JPH01107997U (it) | 1989-07-20 |
Family
ID=31204300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988003026U Pending JPH01107997U (it) | 1988-01-12 | 1988-01-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01107997U (it) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0386434A (ja) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | 精密ステージ装置 |
WO2001026167A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif et procede de fabrication correspondant |
WO2001026169A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif et procede de fabrication correspondant |
WO2001026168A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif |
WO2001026166A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electro-strictif et procede de fabrication |
WO2001097296A1 (fr) * | 2000-06-16 | 2001-12-20 | Ngk Insulators, Ltd. | Dispositif piezoelectrique/electrostrictif et son procede de fabrication |
JP2007095943A (ja) * | 2005-09-28 | 2007-04-12 | Sumitomo Heavy Ind Ltd | ステージ装置 |
JP2009217150A (ja) * | 2008-03-12 | 2009-09-24 | Canon Inc | 光学素子保持装置 |
-
1988
- 1988-01-12 JP JP1988003026U patent/JPH01107997U/ja active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0386434A (ja) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | 精密ステージ装置 |
WO2001026167A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif et procede de fabrication correspondant |
WO2001026169A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif et procede de fabrication correspondant |
WO2001026168A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electrostrictif |
WO2001026166A1 (fr) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Dispositif piezo-electrique / electro-strictif et procede de fabrication |
WO2001097296A1 (fr) * | 2000-06-16 | 2001-12-20 | Ngk Insulators, Ltd. | Dispositif piezoelectrique/electrostrictif et son procede de fabrication |
JP2007095943A (ja) * | 2005-09-28 | 2007-04-12 | Sumitomo Heavy Ind Ltd | ステージ装置 |
JP4689423B2 (ja) * | 2005-09-28 | 2011-05-25 | 住友重機械工業株式会社 | ステージ装置 |
JP2009217150A (ja) * | 2008-03-12 | 2009-09-24 | Canon Inc | 光学素子保持装置 |