JPH01107997U - - Google Patents
Info
- Publication number
- JPH01107997U JPH01107997U JP302688U JP302688U JPH01107997U JP H01107997 U JPH01107997 U JP H01107997U JP 302688 U JP302688 U JP 302688U JP 302688 U JP302688 U JP 302688U JP H01107997 U JPH01107997 U JP H01107997U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- hinge
- piezo element
- piezo
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Lasers (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図ａ，ｂは第１図に示す３軸あおりステージの側
面図、第３図、第４図は従来の一例を示す平面図
および正断面図である。
１…固定部、２…可動部、３ａ，３ｂ，３ｃ…
ピエゾ素子、４ａ，４ｂ，４ｃ，５ａ，５ｂ，５
ｃ…ヒンジ。
Fig. 1 is a perspective view showing one embodiment of the present invention;
Figures a and b are side views of the three-axis tilting stage shown in Figure 1, and Figures 3 and 4 are a plan view and a front sectional view showing an example of the conventional stage. 1...Fixed part, 2...Movable part, 3a, 3b, 3c...
Piezo element, 4a, 4b, 4c, 5a, 5b, 5
c...Hinge.
Claims (1)
この上面と垂直な方向に変位する３個のピエゾ素
子と、一端が前記ピエゾ素子の他端に固着され前
記ピエゾ素子の変位方向と直角に２つの切り欠き
を有する２自由度のヒンジと、前記ヒンジの他端
に固着した可動部とを含むことを特徴とする３軸
あおりステージ。 a fixed part, three piezo elements whose one end is fixed to the upper surface of the fixed part and are displaced in a direction perpendicular to the upper surface; and one end fixed to the other end of the piezo element and perpendicular to the displacement direction of the piezo element. A three-axis tilting stage comprising a two-degree-of-freedom hinge having two notches and a movable part fixed to the other end of the hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP302688U JPH01107997U (en) | 1988-01-12 | 1988-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP302688U JPH01107997U (en) | 1988-01-12 | 1988-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01107997U true JPH01107997U (en) | 1989-07-20 |
Family
ID=31204300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP302688U Pending JPH01107997U (en) | 1988-01-12 | 1988-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01107997U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0386434A (en) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | Precision stage device |
| WO2001026168A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device |
| WO2001026167A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001026169A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001026166A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001097296A1 (en) * | 2000-06-16 | 2001-12-20 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of producing the same |
| JP2007095943A (en) * | 2005-09-28 | 2007-04-12 | Sumitomo Heavy Ind Ltd | Stage device |
| JP2009217150A (en) * | 2008-03-12 | 2009-09-24 | Canon Inc | Optical element holding device |
-
1988
- 1988-01-12 JP JP302688U patent/JPH01107997U/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0386434A (en) * | 1989-08-31 | 1991-04-11 | Sumitomo Heavy Ind Ltd | Precision stage device |
| WO2001026168A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device |
| WO2001026167A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001026169A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001026166A1 (en) * | 1999-10-01 | 2001-04-12 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
| WO2001097296A1 (en) * | 2000-06-16 | 2001-12-20 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of producing the same |
| JP2007095943A (en) * | 2005-09-28 | 2007-04-12 | Sumitomo Heavy Ind Ltd | Stage device |
| JP4689423B2 (en) * | 2005-09-28 | 2011-05-25 | 住友重機械工業株式会社 | Stage equipment |
| JP2009217150A (en) * | 2008-03-12 | 2009-09-24 | Canon Inc | Optical element holding device |