JPH01107851A - ドラフトチャンバーにおける送風排気方法及びその装置 - Google Patents

ドラフトチャンバーにおける送風排気方法及びその装置

Info

Publication number
JPH01107851A
JPH01107851A JP62264954A JP26495487A JPH01107851A JP H01107851 A JPH01107851 A JP H01107851A JP 62264954 A JP62264954 A JP 62264954A JP 26495487 A JP26495487 A JP 26495487A JP H01107851 A JPH01107851 A JP H01107851A
Authority
JP
Japan
Prior art keywords
air
path
amount
exhaust
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62264954A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0586261B2 (enrdf_load_html_response
Inventor
Kiyomitsu Ito
清光 伊藤
Shigeto Hirao
平尾 重人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oriental Giken Inc
Original Assignee
Oriental Giken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oriental Giken Inc filed Critical Oriental Giken Inc
Priority to JP62264954A priority Critical patent/JPH01107851A/ja
Publication of JPH01107851A publication Critical patent/JPH01107851A/ja
Publication of JPH0586261B2 publication Critical patent/JPH0586261B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023Fume cabinets or cupboards, e.g. for laboratories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP62264954A 1987-10-20 1987-10-20 ドラフトチャンバーにおける送風排気方法及びその装置 Granted JPH01107851A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62264954A JPH01107851A (ja) 1987-10-20 1987-10-20 ドラフトチャンバーにおける送風排気方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62264954A JPH01107851A (ja) 1987-10-20 1987-10-20 ドラフトチャンバーにおける送風排気方法及びその装置

Publications (2)

Publication Number Publication Date
JPH01107851A true JPH01107851A (ja) 1989-04-25
JPH0586261B2 JPH0586261B2 (enrdf_load_html_response) 1993-12-10

Family

ID=17410507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62264954A Granted JPH01107851A (ja) 1987-10-20 1987-10-20 ドラフトチャンバーにおける送風排気方法及びその装置

Country Status (1)

Country Link
JP (1) JPH01107851A (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008295448A (ja) * 2007-06-01 2008-12-11 Gyoseiin Roko Iinkai Roko Anzen Eisei Kenkyusho エアーカーテン式生物学的安全性キャビネット
CN101224437B (zh) 2006-12-20 2010-06-02 株式会社日立产机系统 安全柜
JP2016203035A (ja) * 2015-04-15 2016-12-08 国立大学法人大阪大学 実験台
JPWO2016079777A1 (ja) * 2014-11-17 2017-04-27 株式会社日立産機システム クリーンエア装置および塵埃点検方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109047259A (zh) * 2018-10-26 2018-12-21 北京佰安智能科技有限公司 一种实验室节能型通风橱

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164940U (enrdf_load_html_response) * 1985-03-18 1986-10-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164940U (enrdf_load_html_response) * 1985-03-18 1986-10-13

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101224437B (zh) 2006-12-20 2010-06-02 株式会社日立产机系统 安全柜
JP2008295448A (ja) * 2007-06-01 2008-12-11 Gyoseiin Roko Iinkai Roko Anzen Eisei Kenkyusho エアーカーテン式生物学的安全性キャビネット
JPWO2016079777A1 (ja) * 2014-11-17 2017-04-27 株式会社日立産機システム クリーンエア装置および塵埃点検方法
US10525458B2 (en) 2014-11-17 2020-01-07 Hitachi Industrial Equipment Systems Co., Ltd. Clean air device and air cleaning unit inspecting method
JP2016203035A (ja) * 2015-04-15 2016-12-08 国立大学法人大阪大学 実験台

Also Published As

Publication number Publication date
JPH0586261B2 (enrdf_load_html_response) 1993-12-10

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