JPH01107219A - Optical fiber connecting structure of optical circuit substrate - Google Patents
Optical fiber connecting structure of optical circuit substrateInfo
- Publication number
- JPH01107219A JPH01107219A JP26579487A JP26579487A JPH01107219A JP H01107219 A JPH01107219 A JP H01107219A JP 26579487 A JP26579487 A JP 26579487A JP 26579487 A JP26579487 A JP 26579487A JP H01107219 A JPH01107219 A JP H01107219A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- groove
- optical
- light
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 50
- 239000000758 substrate Substances 0.000 title claims abstract description 26
- 230000003287 optical effect Effects 0.000 title claims description 32
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000006185 dispersion Substances 0.000 abstract description 6
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 238000005520 cutting process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000003754 machining Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は光集積回路に関し、光回路基板への光ファイバ
ーの接続構造に関する。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to an optical integrated circuit, and more particularly to a structure for connecting an optical fiber to an optical circuit board.
「従来の技術J
光集積回路では、集積回路基板に光ファイバーを結合し
、基板上の光導波路と光ファイバーとの間で効率よく光
情報の交換、即ち、光の入射及び出射を行う必要がある
。基板にはガラス材やニオブ酸リチウム(L iN b
o 3)の結晶材料が多く用いられ、光導波路にはチタ
ン(Ti)拡散層などからなる薄膜導波路が主に用いら
れる。``Prior Art J'' In an optical integrated circuit, it is necessary to couple an optical fiber to an integrated circuit board and to efficiently exchange optical information between the optical waveguide on the board and the optical fiber, that is, input and output light. The substrate is made of glass material or lithium niobate (LiNb).
o3) Crystal materials are often used, and thin film waveguides made of titanium (Ti) diffusion layers are mainly used as optical waveguides.
従来の光回路基板の光ファイバー接続構造としては、第
9図及び第1O図に示す様に、基板2に溝31を形成し
、この溝31に光ファイバー1を沿わせて紫外線硬化樹
脂により固定し、消31の先端32から始まる光導波路
6に光ファイバー1の先端を臨ませて直接光を入射する
ものがあった。As shown in FIG. 9 and FIG. 1O, a conventional optical fiber connection structure for an optical circuit board includes forming a groove 31 in the substrate 2, aligning the optical fiber 1 along the groove 31, and fixing it with an ultraviolet curing resin. There is one in which the tip of the optical fiber 1 faces the optical waveguide 6 starting from the tip 32 of the fiber optic 31 and the light is directly input thereto.
しかし、基板2は一般にぜい性の高い難削材を材質とす
ることから溝部31の加工が一般に困難であり、薄い砥
石33を用いた研削加工により溝加工を行っていた。こ
のため、湧31の端部32の形状が砥石33の半径で決
められてしまい、光ファイバー1を溝31に固定した際
に、光ファイバー1の端面と光導波路6との間に隙間S
gを生じ、この隙間Sgでの光の分散及び損失が大きく
なるという問題点があった。また、渭加工に砥石33を
用いず切削加工で行うものにあっては、溝加工時に微少
なチッピングを生じ易く、泪の端部の表面が荒れて光の
乱反射を引き起こし光損失が大きくなるという問題点が
あった。However, since the substrate 2 is generally made of a highly brittle and difficult-to-cut material, it is generally difficult to process the grooves 31, and the grooves have been formed by grinding using a thin grindstone 33. For this reason, the shape of the end 32 of the spring 31 is determined by the radius of the grindstone 33, and when the optical fiber 1 is fixed in the groove 31, there is a gap S between the end surface of the optical fiber 1 and the optical waveguide 6.
There is a problem in that the dispersion and loss of light in this gap Sg becomes large. In addition, if the groove processing is performed by cutting without using the grindstone 33, minute chipping is likely to occur during groove processing, and the surface of the edge of the groove is rough, causing diffuse reflection of light and increasing optical loss. There was a problem.
「発明が解決しよ”うとする問題点」
本発明は上記の問題点を解決するためなされたものであ
り、光ファイバーを光導波路に密接して固定することを
可能とし、光ファイバーと光導波路との間の光の分散及
び損失を最小限にすることができる光回路基板の光ファ
イバー接続構造を提供することを目的とする。"Problems to be Solved by the Invention" The present invention has been made to solve the above problems, and it enables the optical fiber to be closely fixed to the optical waveguide, thereby improving the connection between the optical fiber and the optical waveguide. An object of the present invention is to provide an optical fiber connection structure for an optical circuit board that can minimize optical dispersion and loss between the optical circuit boards.
r問題点を解決するための手段」
このため本発明では、断面がV字形状をした7字溝と、
その7字溝の先端に位置すると共に前記7字溝の進行方
向線と略直交する垂直側面を有する第2の清とを基板表
面に形成し、光ファイバーの側周面を前記7字溝に沿わ
せて配設し、光ファイバーの先端面が前記第2の溝の垂
直側面に当接するように基板に固定したことを特徴とす
る光回路基板の光ファイバー接続構造が提供される。``Means for Solving Problems'' Therefore, in the present invention, a 7-shaped groove having a V-shaped cross section,
A second layer is formed on the surface of the substrate, and is located at the tip of the 7-shaped groove and has a vertical side surface that is substantially orthogonal to the traveling direction line of the 7-shaped groove, and the side circumferential surface of the optical fiber is aligned along the 7-shaped groove. There is provided an optical fiber connection structure for an optical circuit board, characterized in that the optical fibers are arranged together and fixed to the board so that the tip end surface of the optical fiber abuts the vertical side surface of the second groove.
「作用」
上記の構成によれば、光ファイバーの接続部は2本の溝
により構成される。第1の溝であるv字゛溝に−沿わせ
て光ファイバーを配設固定することにより、光ファイバ
ーを精度よく光回路基板上に位置決めすることができる
。第2の溝は7字溝に直交して形成されているため、光
ファイバーの先端面を第2の溝の垂直側面に当接させる
ことができる。光導波路を第2の溝の垂TPL側面から
始まるように基板上に形成しておけば、光ファイバーの
先端を精度良く、光導波路に密着させて゛固定すること
ができる。光導波路の光入射面は第2の溝の垂直側面で
あるから、円板状砥石の側面による研削加工により精密
な平面に鏡面仕上げすることができる。光入射面が鏡面
加工され、また光入射面と光ファイバー先端との間に隙
間がないため、光の分散及び損失が極めて少なく結合効
率が高い接続構造となる。"Operation" According to the above configuration, the optical fiber connection portion is composed of two grooves. By arranging and fixing the optical fiber along the V-shaped groove, which is the first groove, the optical fiber can be accurately positioned on the optical circuit board. Since the second groove is formed perpendicular to the figure 7 groove, the tip end surface of the optical fiber can be brought into contact with the vertical side surface of the second groove. If the optical waveguide is formed on the substrate so as to start from the vertical TPL side surface of the second groove, the tip of the optical fiber can be accurately fixed in close contact with the optical waveguide. Since the light incident surface of the optical waveguide is a vertical side surface of the second groove, it can be polished to a precise plane with a mirror finish by grinding with the side surface of a disc-shaped grindstone. The light entrance surface is mirror-finished and there is no gap between the light entrance surface and the tip of the optical fiber, resulting in a connection structure with extremely low light dispersion and loss and high coupling efficiency.
「実施例」
本発明の実施例について図面に従って具体的に説明する
。"Embodiments" Examples of the present invention will be specifically described with reference to the drawings.
第1図は光ファイバーの接続箇所を示す分解斜視図、第
2図は縦断面図である。FIG. 1 is an exploded perspective view showing the connection points of optical fibers, and FIG. 2 is a longitudinal sectional view.
光回路基板2はニオブ酸リチウム(LiNbOs)の結
晶を素材としている。基板2には、断面がV字形状をし
た7字溝3が基板2の一端から形成され、その7字溝3
に直交してT字状に第2の溝である平溝4が形成されて
いる。平溝4の深さは7字溝3よりやや深く形成され、
7字溝3に対向する垂直側面5は基板表面に対して正確
に垂直に、また、精密な歪みのない平面となるよう仕上
げられている。7字溝3の進行方向の延長線に沿って基
板2表面にチタン拡散層からなる光導波路6が形成され
ている。光導波路6は平溝4の垂直側面5で断たれ、こ
の垂直側面5が光導波路6への光の入射面となる。The optical circuit board 2 is made of lithium niobate (LiNbOs) crystal. In the substrate 2, a 7-shaped groove 3 having a V-shaped cross section is formed from one end of the substrate 2.
A flat groove 4, which is a second groove, is formed in a T-shape orthogonal to the groove. The depth of the flat groove 4 is formed slightly deeper than the 7-shaped groove 3,
The vertical side surface 5 facing the 7-shaped groove 3 is finished to be exactly perpendicular to the substrate surface and to be a precise flat surface without distortion. An optical waveguide 6 made of a titanium diffusion layer is formed on the surface of the substrate 2 along the extension line of the 7-shaped groove 3 in the traveling direction. The optical waveguide 6 is cut off by a vertical side surface 5 of the flat groove 4, and this vertical side surface 5 becomes the incident surface of light into the optical waveguide 6.
光ファイバー1がその側周面を7字溝3に沿わせて配設
され、光ファイバー1の先端面が平溝4の垂直側面5に
密着するように位置決められ、紫外線硬化樹脂により基
板2上に固定される。このとき、光ファイバー1の中心
部のコアが正確に先導波路6の端面6Aに位置するよう
に、7字溝3の深さ及び形状が形成されている。従って
、光ファイバー1のコア中を伝送されてきた光は光導波
路6の端部6Aに直接入射される。二とになる。Optical fiber 1 is arranged with its side peripheral surface along 7-shaped groove 3, positioned so that the tip end surface of optical fiber 1 is in close contact with vertical side surface 5 of flat groove 4, and fixed on substrate 2 with ultraviolet curing resin. be done. At this time, the depth and shape of the 7-shaped groove 3 are formed so that the central core of the optical fiber 1 is accurately located on the end surface 6A of the leading waveguide 6. Therefore, the light transmitted through the core of the optical fiber 1 is directly incident on the end 6A of the optical waveguide 6. It becomes two.
7字溝3及び平溝4の加工方法について説明する。加工
手順は予め先導波路6が形成された基板2に、まず7字
溝3を形成し、次いで平溝4を形成する。A method of machining the 7-shaped groove 3 and the flat groove 4 will be explained. The processing procedure is to first form a 7-shaped groove 3 on a substrate 2 on which a guiding waveguide 6 has been formed in advance, and then to form a flat groove 4.
7字溝3の形成には、第3図に示す様に、角錐工具11
による切削加工が行われる。被加工物である基板2はニ
オブ敢すチュウム(L iN bo 5)等のぜい性が
高く割れ易い部材である。これを加工する角錐工具11
は超微粒子を焼結した超硬合余若しくはダイヤモンドか
らなる。角誰工0.11は丸棒の先端が四角錐に研がれ
た形状をなし、その角錐部12が刃部をなす、−h記の
形状によれば、角錐工具11の工具すくい角は負の角度
になるから、ぜい件部材をほとんどチッピングなく切削
加エすることができる。角錐部12の角度(以下、先端
角と称する)が60°、丸棒部13の径が5−の角錐工
具11を用いて基板2に幅及びP!iさが約0.1am
の■字溝3を加工する。加工は、エンドミルによる溝加
工と同様に、角錐工具11に回転と送りを同時に与え、
角工作部12により切削加工を行う、なお、直径0 、
1 m+*のエンドミルを作成することは非常に困難で
あり、かつ折れ易く、また、エンドミルを用いた切削で
は基板2が割れてしまい、溝を加工することができない
。To form the 7-shaped groove 3, as shown in Fig. 3, a pyramidal tool 11 is used.
The cutting process is performed by The substrate 2, which is a workpiece, is a highly brittle and easily broken material such as niobium oxide (LiNbo 5). Pyramid tool 11 for processing this
is made of cemented carbide or diamond made by sintering ultrafine particles. The square tool 0.11 has the shape of a round bar with the tip sharpened into a square pyramid, and the pyramid part 12 forms the cutting edge.According to the shape indicated in -h, the tool rake angle of the pyramid tool 11 is Since the angle is negative, fragile parts can be cut with almost no chipping. Width and P! are formed on the substrate 2 using a pyramidal tool 11 in which the angle of the pyramidal part 12 (hereinafter referred to as the tip angle) is 60° and the diameter of the round bar part 13 is 5-. i is about 0.1am
Machining ■-shaped groove 3. Machining is performed by applying rotation and feed to the pyramidal tool 11 at the same time, similar to groove machining with an end mill.
Cutting is performed by the corner machining part 12, and the diameter is 0.
It is very difficult to make an end mill of 1 m+*, and it is easily broken, and cutting using an end mill breaks the substrate 2, making it impossible to process a groove.
第4図は上記の様にして加工された■字溝3を示す斜視
図である。このV字溝3は、断面が角錐工具11の形状
に従って7字形状に精密に形成される。このため、円形
断面を有する光ファイバー1を基板2上に精度良く位置
決めすることができ、光ファイバー1の中心軸線をjE
確に先導波1i’86の位置と一致させることが容易に
なる。FIG. 4 is a perspective view showing the ■-shaped groove 3 machined as described above. The V-shaped groove 3 is precisely formed to have a 7-shaped cross section in accordance with the shape of the pyramidal tool 11. Therefore, the optical fiber 1 having a circular cross section can be accurately positioned on the substrate 2, and the central axis of the optical fiber 1 can be aligned with jE.
It becomes easy to precisely match the position of the leading wave 1i'86.
また、加工されたV字溝3の先端部14の形状は、角錐
工具11の回転による加工であるから角錐工具11の先
端角度で決まる小さな円錐面形状になる。この円錐面形
状の先端部14を削除するように、平溝4の形成が行わ
れる。Further, the shape of the tip end 14 of the machined V-shaped groove 3 is a small conical surface shape determined by the tip angle of the pyramidal tool 11 because the process is performed by rotating the pyramidal tool 11. The flat groove 4 is formed so as to eliminate the conical tip 14.
平溝4の形成には、第5図に示す様に、薄い円板状砥石
15を用いた精密研削加工が行われる。To form the flat grooves 4, precision grinding is performed using a thin disk-shaped grindstone 15, as shown in FIG.
−V字−溝3の先端部14の曲面形状が小さいから、薄
い円板状砥石15でもって先端部14を削除し、平面か
らなる垂直側面5を形成することができる。- Since the curved surface shape of the tip 14 of the V-shaped groove 3 is small, the tip 14 can be removed using a thin disk-shaped grindstone 15 to form the vertical side surface 5 made of a flat surface.
砥石軸16が基板2表面の光導波路6と正確に平行にな
るようにセットされ、円板状砥石15が高速回転しなが
ら紙面と垂直方向に送られ、第1図に示す様な、平溝4
が基板2に形成される。平溝4の垂直側面5は円板状砥
石15の側面による連続的な研削により、チッピングの
ない鏡面状態に仕上げられる。The grindstone shaft 16 is set so as to be exactly parallel to the optical waveguide 6 on the surface of the substrate 2, and the disc-shaped grindstone 15 is sent in a direction perpendicular to the plane of the paper while rotating at high speed, creating a flat groove as shown in FIG. 4
is formed on the substrate 2. The vertical side surface 5 of the flat groove 4 is continuously ground by the side surface of the disk-shaped grindstone 15, so that it is finished into a mirror-like state without chipping.
このように本実施例の加工方法によれば、光ファイバー
1の位置決めを行う■字溝3は切削加工により効率よく
加工され、一方、光の入射面(5゜6A)を形成する平
溝4は研削加工により表面状態が良好に加工される。As described above, according to the processing method of this embodiment, the square groove 3 for positioning the optical fiber 1 is efficiently processed by cutting, while the flat groove 4 forming the light incident surface (5° 6A) is The surface condition is improved by grinding.
以上述べた実施例では基板2に一本の光ファイバー1を
接続するものとして説明したが、第6図に示す様に、一
つの平溝4に対向して複数のV字溝3及び光導波路6を
形成し、複数本の光ファイバー1を接続する構造とする
ことも容易である。In the embodiment described above, one optical fiber 1 is connected to the substrate 2, but as shown in FIG. It is also easy to form a structure in which a plurality of optical fibers 1 are connected.
また、平溝4を基板2の側面にまで開放した形状とせず
、円板状砥石15を上下方向に送ることにより、第7図
に示す様に、基板2の一部の短い区間にのみ溝17を形
成し、その垂直側面18を光入射面とすることも可能で
ある。In addition, by not making the flat groove 4 open to the side surface of the substrate 2, but by sending the disc-shaped grindstone 15 in the vertical direction, the groove is formed only in a short section of the substrate 2, as shown in FIG. 17 and its vertical side surface 18 can be used as the light entrance surface.
また、光入射面を構成する溝は平溝4に限られるもので
はなく、第8図に示す様に、テーパー形状の砥石20を
用いて断面が7字形状の溝21を形成し、その垂直側面
22を光導波路6への光入射面とすることも可能である
。Furthermore, the grooves constituting the light incident surface are not limited to the flat grooves 4, but as shown in FIG. It is also possible to use the side surface 22 as a light incident surface to the optical waveguide 6.
さらに、前記実施例では、光入射面をなす平溝4の垂直
側面5が■字fi3の進行方向線及び光導波路6に直交
する様に平溝4を形成したが、垂直側面5を上下方向又
は横方向に僅かに傾斜させ、垂直側面5と、光導波路6
とが完全には直交しないようにしてもよい、このように
することが、光入射面6Aにおける戻り光による干渉を
防止する上で好ましい場合があるからである。Further, in the above embodiment, the flat groove 4 was formed so that the vertical side surface 5 of the flat groove 4 forming the light incident surface was perpendicular to the traveling direction line of the character fi 3 and the optical waveguide 6. Or slightly inclined laterally, the vertical side surface 5 and the optical waveguide 6
They may not be completely perpendicular to each other, as this may be preferable in order to prevent interference due to returned light at the light incidence surface 6A.
「発明の効果」
以上説明したように本発明は上記の構成を有し、光ファ
イバーを案内するV字溝と、光の入射面をなす垂直側面
を有する第2の溝とを用いて、光ファイバーを基板に接
続するものであるから、光ファイバーを光導波路に密接
して直接光を入射することができ、接続部における光の
分散及び損失を極めて少なくすることができ、高い結合
効率を得ることができるという優れた効果がある。また
、V字溝により光ファイバーを案内しているから、光フ
ァイバーの基板への組付けが極めて容易であり、安価に
提供できるという効果を奏する。"Effects of the Invention" As explained above, the present invention has the above configuration, and uses a V-shaped groove for guiding an optical fiber and a second groove having a vertical side surface that forms a light incident surface to guide an optical fiber. Since it is connected to the substrate, the optical fiber can be brought into close contact with the optical waveguide and the light can be directly input, and the dispersion and loss of light at the connection part can be extremely minimized, making it possible to obtain high coupling efficiency. This has an excellent effect. Furthermore, since the optical fiber is guided by the V-shaped groove, it is extremely easy to assemble the optical fiber to the substrate, and it is possible to provide the optical fiber at a low cost.
第1図乃至第8図は本発明の実施例を示し、第1図は光
ファイバー接続構造を示す分解斜視図、第2図は縦断面
図、第3図はV字溝の加工方法を示す正面図、第4図は
斜視図、第5図は平溝の加1方法を示す断面図、第6図
は第2の実施例を示す平面図、第7図は第3の実施例を
示す平面図、第8図は加工方法を示す断面図であり、第
9図は従来の接続構造を示す分解斜視図、第10図は縦
断面図である。
191.光ファイバー、 281.基板、 3 、、、
V字溝、 400.平溝、 501.垂直側面、 61
.。
先導波路。
第1図
第2図
第3図
又
第4[
第5図
第6図
第7図
第8図
第9図 33
/
第10図1 to 8 show embodiments of the present invention, FIG. 1 is an exploded perspective view showing an optical fiber connection structure, FIG. 2 is a vertical sectional view, and FIG. 3 is a front view showing a V-groove processing method. 4 is a perspective view, FIG. 5 is a sectional view showing a method of forming a flat groove, FIG. 6 is a plan view showing the second embodiment, and FIG. 7 is a plan view showing the third embodiment. 8 are sectional views showing the processing method, FIG. 9 is an exploded perspective view showing a conventional connection structure, and FIG. 10 is a longitudinal sectional view. 191. optical fiber, 281. Board, 3,...
V-groove, 400. Hirazo, 501. Vertical side, 61
.. . Leading wave path. Figure 1 Figure 2 Figure 3 and Figure 4 [ Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 33 / Figure 10
Claims (1)
置すると共に前記V字溝の進行方向線と略直交する垂直
側面を有する第2の溝とを基板表面に形成し、 光ファイバーの側周面を前記V字溝に沿わせて配設し、
光ファイバーの先端面が前記第2の溝の垂直側面に当接
するように基板に固定したことを特徴とする光回路基板
の光ファイバー接続構造。[Scope of Claims] A V-shaped groove having a V-shaped cross section, and a second groove located at the tip of the V-shaped groove and having a vertical side surface substantially perpendicular to the traveling direction line of the V-shaped groove. is formed on the substrate surface, and the side peripheral surface of the optical fiber is arranged along the V-shaped groove,
1. An optical fiber connection structure for an optical circuit board, characterized in that the optical fiber is fixed to the board so that its tip end surface contacts the vertical side surface of the second groove.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26579487A JPH01107219A (en) | 1987-10-21 | 1987-10-21 | Optical fiber connecting structure of optical circuit substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26579487A JPH01107219A (en) | 1987-10-21 | 1987-10-21 | Optical fiber connecting structure of optical circuit substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01107219A true JPH01107219A (en) | 1989-04-25 |
Family
ID=17422130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26579487A Pending JPH01107219A (en) | 1987-10-21 | 1987-10-21 | Optical fiber connecting structure of optical circuit substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01107219A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0194305A (en) * | 1987-10-07 | 1989-04-13 | Hitachi Ltd | Optical circuit device |
US6599803B2 (en) | 2001-12-03 | 2003-07-29 | Hynix Semiconductor Inc. | Method for fabricating semiconductor device |
-
1987
- 1987-10-21 JP JP26579487A patent/JPH01107219A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0194305A (en) * | 1987-10-07 | 1989-04-13 | Hitachi Ltd | Optical circuit device |
US6599803B2 (en) | 2001-12-03 | 2003-07-29 | Hynix Semiconductor Inc. | Method for fabricating semiconductor device |
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