JPH0234806A - Demultiplexer/multiplexer and its manufacture - Google Patents

Abstract

PURPOSE:To easily realize high-density packaging, to eliminate the need for the optical axis alignment between optical fibers, and to facilitate manufacture by arranging an optical fiber for incidence so that it cuts and crosses an optical fiber for demultiplexing and multiplexing, and also arranging a dielectric multilayered film so that it cuts and crosses those optical fibers. CONSTITUTION:First and second grooves 5a and 5b, and 6a and 6b which cross each other at a specific angle and a 3rd groove 7 which passes through the intersection part 8 of the 1st and 2nd grooves and extends orthogonally to the bisector of the 1st and 2nd grooves are formed on the top surface of a substrate. Then 1st optical fibers 3a and 3b are mounted and fixed in the 1st grooves 5a and 5b and 2nd optical fibers 2a and 2b cut and cross the 1st optical fibers 3a and 3b; and the dielectric multilayer film member 4 is inserted into the 3rd groove 7 and cuts and crosses the 1st and 2nd optical fibers 3a and 3b, and 2a and 2b and reflects light with specific wavelength selectively. Consequently, the optical fibers are connected mutually without being aligned, so the manufacture is facilitated.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical demultiplexer/multiplexer and a method for manufacturing the same. The present invention relates to a demultiplexer/multiplexer for demultiplexing and multiplexing, and a method for manufacturing the same.

[Prior art]

Among the optical communication methods, optical signals of multiple wavelengths are injected into a wooden optical fiber to multiplex communications.
There is a wavelength communication method that transmits a large amount of information using optical fiber. In order to carry out this wavelength communication method, it is necessary to use a multiplexer that injects light of multiple wavelengths into one optical fiber, or a multiplexer that injects light of multiple wavelengths into one optical fiber. A demultiplexer is required to split the signal into individual wavelengths.

There are two main types of such demultiplexers and multiplexers: (1) optical fiber coupler types that realize this function by bringing the core spacing of two optical fibers close together (for example, the optical fiber coupler type [applied, optical Su J198
Michel, Dlgonnet ev.
at, ”wavelengthmultiplex
ing in single mode ``1
ber couplers eight PP1. Go to IE 0P
TIC8/ Vol, 22. No, 8/l
February 1983).

), (2) A device that realizes this function using a diffraction grating (for example, "Diffraction grating micro-optics optical (3) A device that realizes this function using a ball lens (published by Masuda et al. in the Institute of Electronics, Information and Communication Engineers, Technical Research Report 1979, 79-84, p. 13). (4) A method that realizes this function by using a dielectric multilayer film. Examples of this include Iwama et al.'s 1986 Institute of Electronics and Communication Engineers, General A paper titled "Optical demultiplexer" published in Volume 4 of the National Conference, page 91, relates to the combination of a dielectric multilayer film and an optical fiber, and a structure in which the dielectric multilayer film is deposited directly on the end face of the optical fiber. .

In addition, the paper titled "Low-loss, low-stroke single-mode photosynthesizer" by Okuno et al. presented at the 19861 National Conference of the Optical and Radio Communications Division of the Institute of Electronics and Communication Engineers, and the "Light-mode optical A paper entitled ``Turnout'', published by IEICE, 70th Anniversary General Conference, Volume 10, Volume 4
A paper titled “Single mode optical splitter” published on page 9,
1986 Institute of Electronics, Information and Communication Engineers, Spring National Conference Special C-
1, page 180 of the paper entitled "Single-mode optical multiplexer/demultiplexer for multi-core systems" describes a structure in which a dielectric multilayer film is formed on a glass substrate, then formed into chips and inserted between fibers. has been done.

In recent years, optical demultiplexer/multiplexers using dielectric multilayer films have been attracting attention. One of these concrete examples is shown in Figure 12 (a
). In the multiplexer/demultiplexer shown in the figure, a dielectric multilayer filter 14 inclined at a predetermined angle with respect to the optical axis is inserted in the middle of an optical fiber 1n into which an optical signal is input. The optical fiber 10 is inserted into a through hole 15 formed in the base body 14. The base body 11 has an inclined through hole 13 connected to the through hole 15 at a predetermined angle, and an optical fiber 12 whose tip end is cut diagonally is inserted into the inclined through hole 3. has been done. Of the optical signals incident from the one end 10a of the optical fiber 10, light having a specific wavelength is selectively reflected by the dielectric multilayer filter 14, enters the core of the optical fiber 12, and enters the core of the optical fiber 12. It is output from one end 12b.

Further, the optical signal other than the specific wavelength passes through the dielectric multilayer filter 14 and is output from the other end 10b of the optical fiber 10. In this way, light was split. In addition, multiplexing can also be performed according to the principle of light traveling backwards.

Another example of multiplexing and demultiplexing using a dielectric multilayer filter is shown in FIG. 13(a). As shown in this figure, optical fibers 20.21 are arranged parallel to each other, and dielectric multilayer filters 14a and 14b are placed in the middle of each optical fiber 20.21 and are inclined at a predetermined angle with respect to the optical axis. This is an insert. and optical fiber 2
1, only those having a specific wavelength are reflected by the dielectric multilayer filter 14a.

This reflected optical signal enters the optical fiber 20, is reflected by the dielectric multilayer filter 14b, and is transmitted to the optical fiber 20.
is injected into the core portion of and output from the end 20a. In addition, optical signals other than a specific wavelength are filtered through a dielectric multilayer filter 14.
a).

In this way, the light is demultiplexed.

[Problem to be solved by the invention]

In the conventional demultiplexer/multiplexer shown in FIG. 11(a), a dielectric multilayer filter is inserted midway in the optical axis direction of the optical fiber, and then the tip of the branching optical fiber 12 is processed into a certain shape. After that, as shown in FIG. 12(b), in order to accurately receive the reflected light from the dielectric multilayer filter 14 at the core of the optical fiber 12, the optical fiber 12 is rotated or its position is shifted. The optical axis had to be aligned using the

Further, in the demultiplexer/multiplexer shown in FIG. 12, optical fibers 21 and 20 into which dielectric multilayer filters 14a and 14b are inserted are arranged parallel to each other and inserted into the through hole 16 in the base 11, and then the dielectric The light reflected from the multilayer filter 14a,
In order to reflect the light by the dielectric multilayer filters 1 and 4b and guide it accurately to the core of the optical fiber 20, the optical fiber 20 is moved in the optical axis direction and aligned as shown in FIG. 13(b). I had to. For this reason, the manufacturing process of the multiplexer/demultiplexer becomes complicated, and the unit price of the multiplexer/demultiplexer becomes high. In particular, in a demultiplexer/multiplexer incorporating a plurality of optical fibers, the above-mentioned optical axis alignment work is required for each optical fiber, resulting in a significant increase in unit cost.

Further, it is known that a dielectric multilayer filter has a splitting characteristic in which polarization dependence increases as the angle of incidence thereon increases. Therefore, in order to suppress the polarization dependence, the angle of incidence on the dielectric multilayer filter must be made small, but in the demultiplexer/combiner shown in Figure 13(a), the angle of incidence on the dielectric multilayer filter is small. In order to reduce the angle of incidence of the dielectric multilayer filters 14a and 14b, the distance between the dielectric multilayer filters 14a and 14b must be increased. Therefore, there is a problem in that the insertion loss of the optical signal emitted from the one end 20a of the optical eyeber 20 becomes large.

Furthermore, in the demultiplexer/multiplexer shown in FIG. 12(a), it is difficult to increase the number of fibers, and the optical fibers cannot be mounted in a high density.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a demultiplexer/multiplexer that does not require alignment work and allows high-density mounting of optical fibers.

Furthermore, it is a fourth object of the present invention to provide a method for manufacturing a multiplexer/demultiplexer that can manufacture a multiplexer/demultiplexer in a simple process that allows high-density packaging of optical fibers.

[Means to solve the problem]

In the demultiplexing/multiplexing device of the present invention, the first and second grooves intersect with each other at a predetermined angle, and the first and second grooves pass through the intersection of the first and second grooves. a substrate having a third groove formed on its upper surface extending in a direction perpendicular to the equal dividing line; a first optical fiber placed and fixed in the first groove; and a first optical fiber placed in the second groove of 1i1. A second optical fiber is inserted into the third groove, cuts and traverses the first and second fibers, and a second optical fiber is inserted into the third groove to cut and traverse the first optical fiber. It is characterized by comprising a dielectric multilayer film member that selectively reflects light of different wavelengths.

Historically, the method for manufacturing a demultiplexer/multiplexer of the present invention includes a first groove forming step of forming a first groove having a predetermined cross-sectional shape on a substrate, and a step of forming a first optical fiber in the first groove.・The first optical fiber i ('Mir beam length,
a second groove having a predetermined cross-sectional shape that intersects the first groove at a predetermined angle; a groove forming step, a second optical fiber fixing step of placing and fixing a second optical fiber in the second groove, and forming the first and second grooves at the intersection of the first and second grooves. forming a third groove extending in a direction perpendicular to the bisector of the dielectric material, cutting the first and second fibers, and forming a dielectric multilayer film in the third groove; The method is characterized by comprising a dielectric multilayer film member fixing step of inserting and fixing the multilayer film member.

[Function] Since the demultiplexer/multiplexer of the present invention is configured as described above, the input optical fiber is arranged so as to cut and cross the branch/multiplex optical fiber, and the dielectric By cutting these optical fibers and arranging the multilayer filter so as to cross them, high-density packaging can be easily realized, and furthermore, there is no need to align the optical axes of the optical fibers, which facilitates manufacturing.

Furthermore, in the method for manufacturing a demultiplexer/multiplexer of the present invention, when forming the groove into which the input optical fiber is inserted, the branching optical fiber is cut, and the positioning of the optical fibers is performed during processing. Then, when forming the groove into which the dielectric multilayer film member is inserted, the input optical fiber and the branching/combining optical fiber are cut and formed (2. Inserting the dielectric multilayer film member there) Therefore, the axis alignment between the tip fiber and the dielectric multilayer film is set to 6 points.

〔Example〕

Embodiments according to the present invention will be described below with reference to the drawings.

Elements with the same reference numerals have the same functions, so duplicate explanations will be omitted.

FIG. 1 is a perspective view of a multiplexer/demultiplexer according to the present invention. Although it will be explained below as a demultiplexer, it can also be used as a multiplexer according to the principle of light reversal. This duplexer includes a substrate 1 made of metal silicon, optical signal input optical fibers 2a, 2b, branching optical fibers 3a, 3b,
The dielectric multilayer filter member 4 includes a dielectric multilayer film 4a formed on one surface thereof. This substrate 1 has first grooves 5a, b for holding the branching optical fibers 3a, 3b therein, respectively, and first grooves 5a, b for holding the branching optical fibers 3a, 3b therein, and the input optical fiber 2a.
, 2b respectively retained therein.
is formed. Dummy first grooves 5c and 5d are formed on both sides of the first grooves 5a and 5b, and second grooves 6a and 5d are formed on both sides of the first grooves 5a and 5b.
, 6b are also formed with dummy second grooves 6c and 6d.

Then, the first grooves 5a, 5b and the dummy first grooves 5c, 5
d are formed parallel to each other with a constant pitch interval P. In addition, the second grooves 6a, 6b and the dummy second groove 6C
% 6d are also formed parallel to each other with a constant pitch interval P.

In addition, the first groove 5as 5b and the dummy first groove 5c.

5d, second groove 6a-6b, and dummy second groove 5c.

6d are formed at an angle of 20 degrees with each other. Further, in this substrate 1, a groove is formed in a direction perpendicular to the bisector g of the first groove 5 and the second groove 6, passing through the intersection 8 of the first groove and the second groove. An extending third groove 7 is formed, and a dielectric multilayer filter member 4 is inserted and fixed into this third groove 7. The third groove 7 is such that the reflective surface of the dielectric multilayer film 4a of the dielectric multilayer filter member 4 inserted and fixed therein is aligned with the optical axis of the optical fiber 2 for optical signal input and the optical fiber 3 for branching. It is formed so as to be inclined by 10 degrees with respect to the surface.

FIG. 3 shows first and second grooves 5a, 5b, and 6a.

6b is shown. In the above embodiment, the first and second grooves 5a, 5b, 5c, 5d, and 6a.

The cross-sectional shapes of 6b- and 6c-6b are as shown in FIG. 3(c). 3: These first grooves 5a, 5b and second groove "as6b" are formed to the same depth at their respective intersections 8. Furthermore, one end of the first /R5a, 5b In the vicinity of 9, this first a
The depths of 5a and 5b are deep. FIG. 4 shows the cross-sectional shape of the first grooves 5a and 5b. As shown in this figure, this first groove 5a.

5b has two levels of depth, and the deep portion 5f is formed to a depth that allows the optical signal input optical fiber 2b to cross over the covering portion of the branching optical fiber 3a. On the other hand, the depth of the shallow portion 5e is the dummy first groove 5c, 5d.
, the second grooves 6a, 6b, and the same depth as the dummy second grooves 6c, 6d. In the above embodiment, the first and second grooves 5.6 are formed on the substrate with the cross-sectional shape shown in FIG. 3(c).
It may also have the cross-sectional shape shown in b). In addition, Fig. 3 (a
In the cross-sectional shape shown in Figure 3(c), the groove width and groove depth must be precisely machined, and the machining process is more difficult than that shown in Figure 3(c). <, and also the first shape with the shape shown in Figure 3(b)
If the second grooves 5 and 6 are formed at the same depth, a gap will be created between the optical coupling part of the optical signal input optical fiber 2 and the branching optical fiber 3, compared to the case shown in FIG. 3(c). transmission loss increases.

An enlarged view of the intersection 8 is shown in FIG. As shown in FIG. 2, an optical fiber 2a for optical signal input.

2b cuts and extends across the branching optical fibers 3a, 3b, and the dielectric multilayer filter member 4 includes the optical signal input optical fibers 2a, 2b and the branching optical fiber 3a,
3b is cut and extends across. This dielectric multilayer filter member 4 is formed by depositing S 1.02 and TiO2 on one surface of a quartz substrate glass with a V of 35 μm, and forming a dielectric multilayer film 4b with a thickness of 7 B m. has been done. Then, this dielectric multilayer film 4b is applied to the optical signal fibers 2a, 2b and the branching optical fiber 3a,
A dielectric multilayer filter member 4 is inserted and fixed in the third groove 7 so as to be located on the intersection of the optical axes 3b.

Next, the function of the duplexer of the above embodiment will be explained using FIG.

Wavelength λ incident from one end of the optical fiber 2a for optical signal input
, λ2 are transmitted through the optical fiber 2 a and enter the dielectric multilayer filter member 4 . A dielectric multilayer film 4a provided on one surface of the dielectric multilayer filter member 4
, only the wavelength λ2 is selectively reflected. The reflected optical signal of wavelength λ2 is transmitted to the dielectric multilayer filter member 4.
and enters the core portion of the branching optical fiber 3a.

The optical signal of wavelength λ2 that has entered the branching optical fiber 3a is output from one end thereof. On the other hand, the optical signal with the wavelength λ1 is transmitted through the dielectric multilayer film 4a and is connected to the optical signal input optical fiber 2.
a, and is output from the other end. In this way, the optical signal is demultiplexed.Furthermore, according to the principle of light reversal, it is also possible to combine light in the above embodiment. can.

Next, a method of manufacturing the demultiplexer/multiplexer of the above embodiment will be explained with reference to FIGS. 5 to 7.

As shown in Figure 5, this manufacturing method can be broadly divided into
Groove forming step 30, first optical fiber fixing step 31, second groove forming step 32, second optical fiber fixing step 33,
A dielectric multilayer film member fixing step 34 is also included.

In the first groove forming step 30, a third groove is formed on the metal silicon substrate 1.
A first groove 5a having a cross-sectional shape as shown in Figure (c), and having a predetermined pitch interval (P) and a predetermined depth (h).
, 5b are formed in parallel.

When forming the first grooves 5a and 5b, a deep groove 5f is formed halfway through the substrate 1, and a predetermined depth (
Form the groove 58 of h). Here, the groove 5e is formed to a depth that allows the optical fiber (diameter 125 μm) to be fitted therein by removing the coating. Here, the reason why the deep groove 5f is formed is to create a three-dimensional intersection structure between the optical signal input optical fiber and the branching optical fiber.

In addition, in this first groove forming step 30, these first grooves 5
A dummy first groove 5C15d is placed on both sides of the first groove 5a and 5b.
a and 5b, and are formed at a pitch interval P1 and a predetermined depth h. The dummy first grooves 5c and 5d are used for position calibration when forming the third groove 7 of the dielectric multilayer filter member 4, which will be described later. The state of the substrate formed in this first groove forming step 30 is shown in FIG. 6(a).

Next, a first optical fiber fixing step 31 is performed.

In this step, the branching optical fibers 3a and 3b are inserted into the first grooves 5a and 5b formed in the first groove forming step 30 and fixed. At the time of this insertion, the branching optical fiber 3a
, 3b is partially peeled off to expose the cladding portion, and the exposed cladding portion is placed in the shallow groove portion 5e, and the covered portion is placed in the deep groove portion 5f. Then, use epoxy adhesive to connect the branching optical fiber 3.
a, 3b are fixed within the 11th: tt5a, 5b.

Next, a second groove forming step 32 is performed. In this second groove forming step 32, second grooves 5a and 6b are formed on the substrate 1 at a constant angle, for example, 20 degrees, with the first grooves 5a and 5b. This angle is determined by the incident angle of the light incident on the dielectric multilayer film 4a.

The second grooves 6a and 6b are parallel to each other and are parallel to the first groove.
Like the grooves, they are formed at the pitch interval P, and with the same cross-sectional shape and depth as the first grooves. In this second groove forming step 32 as well, dummy second grooves 6 are formed on both sides of the second grooves 6 a s 6 b in the same way as in the first groove forming step 30 .
Form 0.6d. Here, what is important in forming the second groove is to form it to the same depth as the first groove. For example, the core diameter of a single mode optical fiber is approximately 7 to 8
micrometers, and even a few micrometers of axis misalignment will severely degrade the overall transmission efficiency, so if the depth of the grooves differs even slightly between the first and second grooves, axis misalignment will occur. . Therefore, using the dummy first groove 5C15d formed in the first groove forming step 30, the intersection A of the dummy first grooves 5c, 5d and the dummy second grooves 6c, 6d was observed with a microscope, etc., and the dimensions were While measuring, the height position of the tool of the processing machine is adjusted so that the depths of both grooves match, and while this height position is maintained, the second grooves 6 a s 6 b are cut and formed. Further, by performing this second groove forming step 32, the branching optical fiber 3a fixed to the first grooves 5a, 5b
, 3b are cut at a constant angle with respect to the second groove. As a result, the alignment accuracy between the branching optical fibers 3a and 3b and the optical signal manual optical fibers 2a and 2b is as follows. This depends on the processing accuracy of the processing machine used for groove processing, and alignment work for the optical fibers becomes unnecessary. The state after implementing this second groove forming step is shown in FIG. 6(b).

Next, a second optical fiber fixing step 33 is performed.

In this step, the second groove formed in the previous second groove forming step 32 is
Optical fibers 2a for optical signal input are provided in the grooves 6a s 6b,
Insert 2b. Before this insertion, the coating of the optical fiber is peeled off to expose the cladding portion. After inserting the optical signal input optical fibers 2a and 2b into the second grooves 6a and 6b, they are fixed with an epoxy adhesive. The state after implementing this second optical fiber fixing step 33 is shown in FIG. 6(c).

Next, a dielectric multilayer film member fixing step 34 is performed.

In this step, a thickness of 50 mm is created so as to accurately connect the intersections of the dummy first groove 5C%5d and the dummy second grooves 6c and 6d formed in the first groove forming step 30 and the second groove forming step 32.
A rectangular third groove 7 of μm is formed. In this way, by using the dummy #5Cs5ds5c15d, it is possible to accurately form the third groove in the direction perpendicular to the bisector of the first groove and the second groove. . The positional relationship of these valley grooves is shown in FIG. In this figure, B
, B is the intersection of the dummy grooves, and the bold line is the part where the first groove is deeper, and in this part C, the branching optical fiber and the optical signal input optical fiber intersect three-dimensionally. There is. Then, the dielectric multilayer film member 4 having a rectangular cross section is inserted into the third groove formed in this way.

Then, the reflective surface of the dielectric multilayer film 4a formed on one surface of the dielectric multilayer film member 4 is adjusted so that it is exactly at the intersection of the optical axis of the optical fiber for optical signal use and the optical axis of the optical fiber for branching. After that, the dielectric multilayer film member 4 is fixed with an epoxy adhesive.

In this way, a demultiplexer/multiplexer can be manufactured.

The transmission loss of the demultiplexer/multiplexer in the above embodiment depends on the length shown in FIG. 2 on the reflection side.
In this case, if the angle formed by the optical signal input optical fiber and the branching optical fiber is θ, and the outer diameter of the optical fiber is d, then L=(d/2)X(1/s in 2θ).

Therefore, by decreasing d, L can be decreased, and transmission loss can be reduced. In order to reduce this d, the optical fiber may be etched with hydrofluoric acid to reduce the outer diameter of the optical fiber.

In the demultiplexing/multiplexing device of the above embodiment, the optical fiber for optical signal input and the optical fiber for branching are intersected three-dimensionally to achieve high density integration. Even higher density integration is possible by reducing the crossing angle with the branching optical fiber. In this case, by reducing the crossing angle, the angle of incidence on the dielectric multilayer film is also reduced, and the polarization dependence of the filter characteristics of the dielectric multilayer film is reduced. Therefore, in the above embodiment according to the present invention, not only high density integration is achieved, but also filter characteristics are further improved.

In accordance with the above embodiment, a demultiplexer/multiplexer having a structure in which four 1.3 μm band single mode optical fibers are arranged on a substrate was manufactured as a prototype. In this prototype, a metal silicon substrate with good workability was used as the substrate, the groove spacing (P) was 1.5 mm, and 1.
For a 3 μm band single mode optical fiber, the fiber outer diameter is 125 μm, the mode field diameter is 10 μm, the cutoff wavelength is 1.1 to 1.2 μm, the non-refractive index difference is 0.3%, and the coating is UV-cured to a diameter of 0.25 mm. I used one made of resin and used for regular communications.

Moreover, this dielectric multilayer film member was created by laminating 40 layers of SiO and T t O2 by vapor deposition on a 30 μm quartz glass substrate.

The filter characteristics of the dielectric multilayer film member thus prepared were as shown in FIG. 8 at an incident angle of 10 degrees. As can be seen from this figure, this dielectric multilayer film member has a diameter of 1.3 μm.
It can transmit light with a wavelength of m and reflect light with a wavelength of 1.55 μm.

The dielectric multilayer film member thus formed was inserted into the third groove having a width of 50 μm, and the transmission loss characteristics of the optical signal were examined, and the results shown in FIGS. 9 and 10 were obtained. 9 shows the relationship between the transmission loss between X and 2 in FIG. 2 and wavelength, and FIG. 10 shows the relationship between the transmission loss between X and Y and wavelength in FIG. Note that the characteristics shown in Figures 9 and 10 are shown for one of the four optical fibers, but the variations in the characteristics of the other four optical fibers are due to the wavelength λ1-1.3μ.
m, λ2 - 1.55 um, it was about ±0.2 dB, and stable characteristics could be obtained for the other four wires.

The present invention is not limited to the above embodiments, and various modifications may be made.

Specifically, the number of optical fibers connected to the demultiplexer/multiplexer is not limited to the case of the above embodiment, and any number can be used.

In addition, in the above embodiment, the optical fiber for optical signal input and the optical fiber for branching are prevented from overlapping with each other by the three-dimensional crossing structure, but even if such a three-dimensional crossing structure is not used, the optical fibers can be connected within the substrate plane. Overlapping may be prevented by bending at the angle.

Furthermore, in the above embodiment, a part of the first groove is deepened to realize a three-dimensional intersection structure, but the method is not limited to this, and for example, a structure as shown in FIG. 11 may be adopted. .

〔Effect of the invention〕

As explained above, the demultiplexer/multiplexer of the present invention can connect optical fibers without alignment, so
It is inexpensive and has stable characteristics. Furthermore, since the structure allows high-density packaging, it is suitable for multiplexing and demultiplexing between multi-core optical fibers, and is effective for wavelength division multiplexing communication systems.

Furthermore, the method for manufacturing a demultiplexer/multiplexer according to the present invention eliminates the need for alignment work between optical fibers, and the characteristics of the manufactured demultiplexer/multiplexer are improved by the processing dimensional accuracy of the processing machine. is determined, it is possible to manufacture a large quantity of multiplexers and demultiplexers with uniform characteristics.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the structure of the demultiplexer/multiplexer according to the present invention, FIG. 2 is a partially enlarged view of the demultiplexer/multiplexer shown in FIG. 1, and FIG. 3 is the structure shown in FIG. 1. FIG. 4 is a longitudinal sectional view of the groove of the demultiplexer/multiplexer shown in FIG. 1, and FIG. manufacturing process diagram,
6 is a diagram showing the state of each step of the method for manufacturing a demultiplexer/multiplexer according to the present invention, FIG. 7 is a diagram explaining the principle of the dielectric multilayer film member fixing step in the step shown in FIG. 5, FIG. 8 is a diagram showing filter characteristics of a dielectric multilayer film member according to an example of the present invention;
9 and 10 are diagrams showing the relationship between transmission loss and wavelength of a demultiplexer/multiplexer according to an embodiment of the present invention, respectively, and FIG. 11 is a diagram illustrating a modification of the embodiment of the present invention. FIG. 12 and FIG. 13 are diagrams showing a conventional multiplexer/demultiplexer. DESCRIPTION OF SYMBOLS 1... Board, 2a s 2 b... Optical fiber for optical signal input, 3a, 3b... Optical fiber for branching, 4.
...Dielectric multilayer film member, 5a, 5b-...First groove, 5
c, 5d... dummy first groove, 6a, 6b... second groove. 6c. 6d...Dummy second groove, 7...Third groove. Patent applicant: Sumitomo Electric Industries, Ltd. Representative patent attorney Yoshiki Hase
Fumi Terasaki Figure 3 Cross-sectional shape of the groove Figure 4 Longitudinal cross-section of the first groove Figure 4 Manufacturing process of the example Figure 5 Alignment of groove formation Figure 7 Figure 8 A. Loss and wavelength Figure 9 Wavelength (, gm) Figure 10 Procedure? rD original book

Claims (1)

[Scope of Claims] 1. First and second grooves that intersect with each other at a predetermined angle;
and a third groove extending perpendicularly to the bisector of the second groove.
a substrate having a groove formed on its upper surface; a first optical fiber placed and fixed in the first groove; and a substrate placed in the second groove and cutting the first optical fiber. a second optical fiber that traverses; and a dielectric multilayer film member that is inserted into the third groove, cuts and traverses the first and second optical fibers, and selectively reflects light of a predetermined wavelength. A demultiplexer/multiplexer comprising: 2. A plurality of the first grooves are provided in parallel to each other on the substrate, a plurality of the second grooves are provided at the predetermined angle with respect to the first groove, and each groove has a first and a first groove. The demultiplexer/multiplexer according to claim 1, wherein a second optical fiber is mounted, and the first optical fiber intersects the second optical fiber three-dimensionally at a portion other than the intersection. . 3. The demultiplexing/multiplexing device according to claim 1 or 2, wherein dummy grooves having the same shapes as the first groove and the second groove are formed on both sides of the first groove and the second groove. vessel. 4. A first groove forming step of forming a first groove having a predetermined cross-sectional shape on the substrate, and a first optical fiber fixing step of placing and fixing the core part of the first optical fiber in the first groove. and a second groove forming step of forming a second groove having a predetermined cross-sectional shape that intersects the first groove at a predetermined angle, and cutting the first optical fiber at the intersection thereof. and a second optical fiber fixing step of placing and fixing a second optical fiber in the second groove, and placing two of the first and second grooves at the intersection of the first and second grooves. A dielectric multilayer film member in which a third groove extending perpendicularly to the split line is formed, the first and second optical fibers are cut, and a dielectric multilayer film is formed in the third groove. A method for manufacturing a demultiplexer/multiplexer, comprising a step of fixing a dielectric multilayer film member by inserting and fixing the dielectric multilayer film member. 5. In the first groove forming step, a plurality of first grooves are formed parallel to each other, and in the second groove forming step, a plurality of second grooves are formed parallel to each other, and one end of the first groove is connected to another 5. The method of manufacturing a demultiplexer/multiplexer according to claim 4, wherein the demultiplexer/multiplexer is formed deeply relative to the portion. 6. In the first groove forming step, a first alignment groove in which the optical fiber is not inserted and fixed is formed on both outer sides of the first groove, and in the second groove forming step, the optical fiber is not inserted and fixed. In the dielectric multilayer film member fixing step, second alignment grooves are formed on both outer sides of the second groove, and the dielectric multilayer film member fixing step is performed on a straight line connecting the intersections of these first and second alignment grooves. 5. The method for manufacturing a demultiplexing/multiplexing device according to claim 4, wherein the third groove is formed in the demultiplexer/multiplexer.