JPH01107125U - - Google Patents
Info
- Publication number
- JPH01107125U JPH01107125U JP221888U JP221888U JPH01107125U JP H01107125 U JPH01107125 U JP H01107125U JP 221888 U JP221888 U JP 221888U JP 221888 U JP221888 U JP 221888U JP H01107125 U JPH01107125 U JP H01107125U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holding
- boat
- holding part
- unloading
- loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP221888U JPH01107125U (enExample) | 1988-01-11 | 1988-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP221888U JPH01107125U (enExample) | 1988-01-11 | 1988-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01107125U true JPH01107125U (enExample) | 1989-07-19 |
Family
ID=31202798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP221888U Pending JPH01107125U (enExample) | 1988-01-11 | 1988-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01107125U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009643A (ja) * | 2010-06-25 | 2012-01-12 | Koyo Thermo System Kk | 連続拡散処理装置 |
-
1988
- 1988-01-11 JP JP221888U patent/JPH01107125U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009643A (ja) * | 2010-06-25 | 2012-01-12 | Koyo Thermo System Kk | 連続拡散処理装置 |