JPS61162044U - - Google Patents
Info
- Publication number
- JPS61162044U JPS61162044U JP4562285U JP4562285U JPS61162044U JP S61162044 U JPS61162044 U JP S61162044U JP 4562285 U JP4562285 U JP 4562285U JP 4562285 U JP4562285 U JP 4562285U JP S61162044 U JPS61162044 U JP S61162044U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- cap
- boat
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4562285U JPS61162044U (enExample) | 1985-03-28 | 1985-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4562285U JPS61162044U (enExample) | 1985-03-28 | 1985-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162044U true JPS61162044U (enExample) | 1986-10-07 |
Family
ID=30559281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4562285U Pending JPS61162044U (enExample) | 1985-03-28 | 1985-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162044U (enExample) |
-
1985
- 1985-03-28 JP JP4562285U patent/JPS61162044U/ja active Pending