JPH01107125U - - Google Patents

Info

Publication number
JPH01107125U
JPH01107125U JP221888U JP221888U JPH01107125U JP H01107125 U JPH01107125 U JP H01107125U JP 221888 U JP221888 U JP 221888U JP 221888 U JP221888 U JP 221888U JP H01107125 U JPH01107125 U JP H01107125U
Authority
JP
Japan
Prior art keywords
wafer holding
boat
holding part
unloading
loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP221888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP221888U priority Critical patent/JPH01107125U/ja
Publication of JPH01107125U publication Critical patent/JPH01107125U/ja
Pending legal-status Critical Current

Links

JP221888U 1988-01-11 1988-01-11 Pending JPH01107125U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP221888U JPH01107125U (enrdf_load_stackoverflow) 1988-01-11 1988-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP221888U JPH01107125U (enrdf_load_stackoverflow) 1988-01-11 1988-01-11

Publications (1)

Publication Number Publication Date
JPH01107125U true JPH01107125U (enrdf_load_stackoverflow) 1989-07-19

Family

ID=31202798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP221888U Pending JPH01107125U (enrdf_load_stackoverflow) 1988-01-11 1988-01-11

Country Status (1)

Country Link
JP (1) JPH01107125U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012009643A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012009643A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置

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