JPH01106562U - - Google Patents
Info
- Publication number
- JPH01106562U JPH01106562U JP171488U JP171488U JPH01106562U JP H01106562 U JPH01106562 U JP H01106562U JP 171488 U JP171488 U JP 171488U JP 171488 U JP171488 U JP 171488U JP H01106562 U JPH01106562 U JP H01106562U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- substrate member
- supported
- predetermined angle
- sputtering particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 4
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP171488U JPH01106562U (enrdf_load_stackoverflow) | 1988-01-12 | 1988-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP171488U JPH01106562U (enrdf_load_stackoverflow) | 1988-01-12 | 1988-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106562U true JPH01106562U (enrdf_load_stackoverflow) | 1989-07-18 |
Family
ID=31201841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP171488U Pending JPH01106562U (enrdf_load_stackoverflow) | 1988-01-12 | 1988-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106562U (enrdf_load_stackoverflow) |
-
1988
- 1988-01-12 JP JP171488U patent/JPH01106562U/ja active Pending
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