JPH01104719U - - Google Patents
Info
- Publication number
- JPH01104719U JPH01104719U JP20014087U JP20014087U JPH01104719U JP H01104719 U JPH01104719 U JP H01104719U JP 20014087 U JP20014087 U JP 20014087U JP 20014087 U JP20014087 U JP 20014087U JP H01104719 U JPH01104719 U JP H01104719U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- holder
- closes
- open end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20014087U JPH01104719U (cs) | 1987-12-29 | 1987-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20014087U JPH01104719U (cs) | 1987-12-29 | 1987-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104719U true JPH01104719U (cs) | 1989-07-14 |
Family
ID=31490565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20014087U Pending JPH01104719U (cs) | 1987-12-29 | 1987-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104719U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62112329A (ja) * | 1985-11-11 | 1987-05-23 | Deisuko Saiyaa Japan:Kk | 搬入時での半導体基板の酸化防止方法 |
| JPS63257220A (ja) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | 縦型処理装置及び処理方法 |
-
1987
- 1987-12-29 JP JP20014087U patent/JPH01104719U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62112329A (ja) * | 1985-11-11 | 1987-05-23 | Deisuko Saiyaa Japan:Kk | 搬入時での半導体基板の酸化防止方法 |
| JPS63257220A (ja) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | 縦型処理装置及び処理方法 |
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