JPH01104719U - - Google Patents

Info

Publication number
JPH01104719U
JPH01104719U JP20014087U JP20014087U JPH01104719U JP H01104719 U JPH01104719 U JP H01104719U JP 20014087 U JP20014087 U JP 20014087U JP 20014087 U JP20014087 U JP 20014087U JP H01104719 U JPH01104719 U JP H01104719U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
holder
closes
open end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20014087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20014087U priority Critical patent/JPH01104719U/ja
Publication of JPH01104719U publication Critical patent/JPH01104719U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
JP20014087U 1987-12-29 1987-12-29 Pending JPH01104719U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20014087U JPH01104719U (OSRAM) 1987-12-29 1987-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20014087U JPH01104719U (OSRAM) 1987-12-29 1987-12-29

Publications (1)

Publication Number Publication Date
JPH01104719U true JPH01104719U (OSRAM) 1989-07-14

Family

ID=31490565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20014087U Pending JPH01104719U (OSRAM) 1987-12-29 1987-12-29

Country Status (1)

Country Link
JP (1) JPH01104719U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112329A (ja) * 1985-11-11 1987-05-23 Deisuko Saiyaa Japan:Kk 搬入時での半導体基板の酸化防止方法
JPS63257220A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置及び処理方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112329A (ja) * 1985-11-11 1987-05-23 Deisuko Saiyaa Japan:Kk 搬入時での半導体基板の酸化防止方法
JPS63257220A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置及び処理方法

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