JPH01104038U - - Google Patents
Info
- Publication number
- JPH01104038U JPH01104038U JP19799687U JP19799687U JPH01104038U JP H01104038 U JPH01104038 U JP H01104038U JP 19799687 U JP19799687 U JP 19799687U JP 19799687 U JP19799687 U JP 19799687U JP H01104038 U JPH01104038 U JP H01104038U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- spring
- wafer
- semiconductor wafer
- storage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 11
- 238000012856 packing Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19799687U JPH01104038U (de) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19799687U JPH01104038U (de) | 1987-12-25 | 1987-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01104038U true JPH01104038U (de) | 1989-07-13 |
Family
ID=31488522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19799687U Pending JPH01104038U (de) | 1987-12-25 | 1987-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01104038U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991012631A1 (en) * | 1990-02-19 | 1991-08-22 | Purex Co., Ltd. | Semiconductor wafer sample container and sample preparation method |
-
1987
- 1987-12-25 JP JP19799687U patent/JPH01104038U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991012631A1 (en) * | 1990-02-19 | 1991-08-22 | Purex Co., Ltd. | Semiconductor wafer sample container and sample preparation method |